Fixed wavelength vertical cavity optical devices and method of manufacture therefor

• US 6,953,702 B2
• Filed: 05/16/2002
• Issued: 10/11/2005
• Est. Priority Date: 05/16/2002
• Status: Expired due to Fees

• Current Assignee: Avago Technologies General IP PTE Limited (Broadcom, Inc.)
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Robbins, Virginia M., Lester, Steven D., Miller, Jeffrey N.
• Primary Examiner(s): Mulpuri, Savitri
• Application Number:
  US10/151,631
• Publication Number:
  US 20030215969A1
• Time in Patent Office: 1,244 Days
• Field of Search: 438 22- 47
• US Class Current: 438/22
• CPC Class Codes: H01S 5/0014 Measuring characteristics or properties thereof measuring techniques per se G01J, G01K, G01N, G01R
• CPC Class Codes: H01S 5/0205 during growth of the semiconductor body
• CPC Class Codes: H01S 5/18341 Intra-cavity contacts
• CPC Class Codes: H01S 5/18358 containing spacer layers to adjust the phase of the light wave in the cavity
• CPC Class Codes: H01S 5/18366 Membrane DBR, i.e. a movable DBR on top of the VCSEL
• CPC Class Codes: H01S 5/4087 emitting more than one wavelength
• CPC Class Codes: H01S 5/423 having a vertical cavity

Abstract

Vertical cavity optical devices, and a method of manufacturing therefor, are provided where the method includes partially forming a first vertical cavity optical device on a wafer, adjusting the lasing wavelength of the first vertical cavity optical device, and fixing the lasing wavelength of the first vertical cavity optical device to complete the forming thereof.

Claims

1. A method for manufacturing vertical cavity optical devices comprising:

forming a first vertical cavity optical device including an upper and lower reflector on a wafer;

adjusting the lasing wavelength of the first vertical cavity optical device by moving the upper reflector;

fixing the lasing wavelength of the first vertical cavity optical device by fixing the position of the upper reflector thereof; and

forming a monolithic array with a second vertical cavity optical device having a fixed lasing wavelength different from the fixed lasing wavelength of the first vertical cavity optical device.

2. The method for manufacturing the vertical cavity optical devices as claimed in claim 1 wherein:

fixing the lasing wavelength uses a fixative material in an air gap of the first vertical cavity optical device.

3. The method for manufacturing the vertical cavity optical devices as claimed in claim 1 wherein:

fixing the lasing wavelength uses a fixative material.

4. The method for manufacturing the vertical cavity optical devices as claimed in claim 1 wherein:

fixing the lasing wavelength uses a fixative material having a coefficient of thermal expansion compensating the remainder of the first vertical cavity optical device.

5. A method for manufacturing vertical cavity optical devices comprising:

forming a first adjustable vertical cavity optical device on a substrate;

adjusting the lasing wavelength of the first adjustable vertical cavity optical device using a voltage;

fixing the lasing wavelength of the first adjustable vertical cavity optical device by fixing a height of an air gap therein to complete the forming thereof; and

forming a monolithic array with a second adjustable vertical cavity optical device having a fixed lasing wavelength different from the fixed lasing wavelength of the first vertical cavity optical device.

6. The method for manufacturing the vertical cavity optical devices as claimed in claim 5 wherein:

fixing the lasing wavelength uses a fixative material in the air gap of the first adjustable vertical cavity optical device filling the height of the air gap.

7. The method for manufacturing the vertical cavity optical devices as claimed in claim 5 including:

fixing the lasing wavelength uses a fixative material selected from a group consisting of being transparent, opaque, and a combination thereof.

8. The method for manufacturing the vertical cavity optical devices as claimed in claim 5 including:

fixing the lasing wavelength uses a fixative material having a coefficient of thermal expansion that compensates for the remainder of the first adjustable vertical cavity optical device.