Apparatus for adjusting the resonance frequency of a microelectromechanical (MEMS) resonator using tensile/compressive strain and applications thereof

• US 6,954,020 B2
• Filed: 02/27/2003
• Issued: 10/11/2005
• Est. Priority Date: 06/11/2001
• Status: Expired due to Term

• Current Assignee: Intel Corporation
• Original Assignee: Intel Corporation
• Inventors: Berlin, Andy, Ma, Qing
• Primary Examiner(s): Dougherty, Tom
• Assistant Examiner(s): ADDISON, KAREN B
• Application Number:
  US10/376,880
• Publication Number:
  US 20030160539A1
• Time in Patent Office: 957 Days
• Field of Search: 310/309, 310/307, 310/306, 605/27, 257/415, 257/467, 374/187
• US Class Current: 310/309
• CPC Class Codes: H03H 9/24 Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive

Abstract

A method for varying the resonance frequency of a resonator beam is disclosed. The method comprises first manufacturing a resonator beam having a first end and a second end. The resonator beam is suspended above a substrate by the first end and the second end. At least one end of the resonator beam is connected to an actuator that applies an actuation force to the resonator beam to apply tensile strain or compressive strain onto said resonator beam. By varying the amount of actuation force, the resonance frequency of the resonator beam may be tuned. Additionally, by varying the magnitude and direction of the actuation force, the resonator beam may be used as a temperature sensor or a temperature compensated resonator.

Claims

1. An apparatus comprising:

a resonator beam having a first end and a second end, the resonator beam suspended above a substrate by the first end and the second end;

a lever arm connected to a pivot and to the first end of the resonator beam; and

an actuator coupled to the lever arm, the actuator applying an actuation force to the lever arm to apply strain onto the resonator beam, wherein the positions on the lever arm where the first end of the resonator beam is connected and where the actuation force is applied are on the same side of the pivot.

2. The apparatus of claim 1 wherein the actuator is a comb structure.

3. The apparatus of claim 1 wherein the actuator is a ratchet wheel.

4. The apparatus of claim 1 wherein the actuator is a ratchet wedge.

5. The apparatus of claim 1 wherein the actuator is a large coefficient of thermal expansion heater.

6. The apparatus of claim 1 wherein the actuator is a ratcheting shaft.

7. The apparatus of claim 1 wherein the actuation force supplied by the actuator is proportional to a temperature.

8. The apparatus of claim 7 wherein a tensile strain is applied to the resonator beam as the temperature increases.

9. The apparatus of claim 7 wherein a compressive strain is applied to the resonator beam as the temperature increases.

10. The apparatus of claim 2 wherein the comb structure exerts force on a curved beam that in turn transmits force onto the lever arm.

11. The apparatus of claim 1, further comprising a second lever arm connected to the second end of the resonator beam and using the second lever arm in concert with the first lever aim to apply a strain to the resonator beam.

12. The apparatus of claim 11 wherein the actuator applies the actuation force to both the lever arm and the second lever arm.

13. The apparatus of claim 11 wherein the lever arm and the second lever arm rotate about a pivot point so as to proportionally modify the amount of strain applied to the resonator beam.

14. The method of claim 11 wherein the actuator is an expansion bar that provides the actuation force proportional to a temperature.

15. An apparatus comprising:

a resonator beam having a first end and a second end, the resonator beam suspended above a substrate by the first end and the second end;

a lever arm connected to a pivot and to the first end of the resonator beam; and

an actuator coupled to the lever arm, the actuator applying an actuation force to the lever arm to apply strain onto the resonator beam, wherein the positions on the lever arm where the first end of the resonator beam is connected and where the actuation force is applied are on opposite sides of the pivot.

16. The apparatus of claim 15 wherein the actuator is a comb structure.

17. The apparatus of claim 15 wherein the actuator is a ratchet wheel.

18. The apparatus of claim 15 wherein the actuator is a ratchet wedge.

19. The apparatus of claim 15 wherein the actuator is a large coefficient of thermal expansion heater.

20. The apparatus of claim 15 wherein the actuator is a ratcheting shaft.

21. The apparatus of claim 15 wherein the actuation force supplied by the actuator is proportional to a temperature.

22. The apparatus of claim 21 wherein a tensile strain is applied to the resonator beam as the temperature increases.

23. The apparatus of claim 21 wherein a compressive strain is applied to the resonator beam as the temperature increases.

24. The apparatus of claim 16 wherein the comb structure exerts force on a curved beam that in turn transmits force onto the lever arm.

25. The apparatus of claim 15 further comprising a second lever arm connected to the second end of the resonator beam and using the second lever arm in concert with the first lever arm to apply a strain to the resonator beam.

26. The apparatus of claim 25 wherein the actuator applies the actuation force to both the lever arm and the second lever arm.

27. The apparatus of claim 25 wherein the lever arm and the second lever arm rotate about a pivot point so as to proportionally modify the amount of strain applied to the resonator beam.

28. The apparatus of claim 25 wherein the actuator is an expansion bar that provides the actuation force proportional to a temperature.

29. A temperature compensated resonator comprising:

a resonator beam having a first end and a second end, the resonator beam suspended above a substrate by the first end and the second end;

a lever arm connected to a pivot and to the first end of the resonator beam; and

an actuator connected to the lever arm, the actuator applying an actuation force to the lever arm to apply a tensile strain onto the resonator beam, the actuation force dependent upon a temperature.

30. The temperature compensated resonator of claim 29 wherein the actuator is an expansion bar.

31. The temperature compensated resonator of claim 29 wherein the actuator is an expansion bar acting on the lever arm.

32. The temperature compensated resonator of claim 29, further comprising a second lever arm connected to the second end of the resonator beam and using the second lever arm in concert with the first lever arm to apply the tensile strain to the resonator beam.

33. The temperature compensated resonator of claim 32 wherein the actuator applies the actuation force to both the lever arm and the second lever arm.

34. The temperature compensated resonator of claim 32 wherein the lever arm and the second lever arm rotate about a pivot point so as to proportionally modify the amount of tensile strain applied to the resonator beam.

35. A temperature sensor comprising:

a resonator beam having a first end and a second end, said resonator beam suspended above a substrate by said first end and said second end; and

an expansion bar connected to said first end of said resonator beam, said actuator applying an actuation force to said resonator beam to apply a compressive strain onto said resonator beam, said actuation force dependent upon a temperature.

36. A temperature sensor comprising:

a resonator beam having a first end and a second end, said resonator beam suspended above a substrate by said first end and said second end; and

an actuator connected to said first end of said resonator beam, said actuator applying an actuation force to said resonator beam to apply a compressive strain onto said resonator beam, said actuation force dependent upon a temperature, wherein said actuator is an expansion bar acting on said lever arm.

37. The apparatus of claim 36 wherein said actuator applies said actuation force to both said lever arm and said second lever arm.

38. The apparatus of claim 37 wherein said lever arm and said second lever arm rotate about a pivot point so as to proportionally modify the amount of tensile strain applied to said monitor beam.