Apparatus for adjusting the resonance frequency of a microelectromechanical (MEMS) resonator using tensile/compressive strain and applications thereof
First Claim
1. An apparatus comprising:
- a resonator beam having a first end and a second end, the resonator beam suspended above a substrate by the first end and the second end;
a lever arm connected to a pivot and to the first end of the resonator beam; and
an actuator coupled to the lever arm, the actuator applying an actuation force to the lever arm to apply strain onto the resonator beam, wherein the positions on the lever arm where the first end of the resonator beam is connected and where the actuation force is applied are on the same side of the pivot.
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Abstract
A method for varying the resonance frequency of a resonator beam is disclosed. The method comprises first manufacturing a resonator beam having a first end and a second end. The resonator beam is suspended above a substrate by the first end and the second end. At least one end of the resonator beam is connected to an actuator that applies an actuation force to the resonator beam to apply tensile strain or compressive strain onto said resonator beam. By varying the amount of actuation force, the resonance frequency of the resonator beam may be tuned. Additionally, by varying the magnitude and direction of the actuation force, the resonator beam may be used as a temperature sensor or a temperature compensated resonator.
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Citations
38 Claims
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1. An apparatus comprising:
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a resonator beam having a first end and a second end, the resonator beam suspended above a substrate by the first end and the second end;
a lever arm connected to a pivot and to the first end of the resonator beam; and
an actuator coupled to the lever arm, the actuator applying an actuation force to the lever arm to apply strain onto the resonator beam, wherein the positions on the lever arm where the first end of the resonator beam is connected and where the actuation force is applied are on the same side of the pivot. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. An apparatus comprising:
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a resonator beam having a first end and a second end, the resonator beam suspended above a substrate by the first end and the second end;
a lever arm connected to a pivot and to the first end of the resonator beam; and
an actuator coupled to the lever arm, the actuator applying an actuation force to the lever arm to apply strain onto the resonator beam, wherein the positions on the lever arm where the first end of the resonator beam is connected and where the actuation force is applied are on opposite sides of the pivot. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A temperature compensated resonator comprising:
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a resonator beam having a first end and a second end, the resonator beam suspended above a substrate by the first end and the second end;
a lever arm connected to a pivot and to the first end of the resonator beam; and
an actuator connected to the lever arm, the actuator applying an actuation force to the lever arm to apply a tensile strain onto the resonator beam, the actuation force dependent upon a temperature. - View Dependent Claims (30, 31, 32, 33, 34)
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35. A temperature sensor comprising:
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a resonator beam having a first end and a second end, said resonator beam suspended above a substrate by said first end and said second end; and
an expansion bar connected to said first end of said resonator beam, said actuator applying an actuation force to said resonator beam to apply a compressive strain onto said resonator beam, said actuation force dependent upon a temperature.
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36. A temperature sensor comprising:
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a resonator beam having a first end and a second end, said resonator beam suspended above a substrate by said first end and said second end; and
an actuator connected to said first end of said resonator beam, said actuator applying an actuation force to said resonator beam to apply a compressive strain onto said resonator beam, said actuation force dependent upon a temperature, wherein said actuator is an expansion bar acting on said lever arm. - View Dependent Claims (37, 38)
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Specification