Resonant energy MEMS array and system including dynamically modifiable power processor
First Claim
Patent Images
1. An integrated MEMS resonant generator-based system, comprising:
- a substrate;
a plurality of piezoelectric micro generators disposed on said substrate, said micro generators comprising at least one suspended structure including a piezoelectric layer, said suspended structure attached to an inertial mass, each of said plurality of micro generators generating a voltage output across said piezeolectric layer through deflection of said suspended structure in response to vibrational energy received, and at least one power processor disposed on said substrate, said power processor electrically coupled to outputs of said plurality of micro generators.
2 Assignments
0 Petitions
Accused Products
Abstract
An integrated MEMS resonant generator system includes a substrate, a plurality of piezoelectric micro generators disposed on the substrate, the micro generators each generating a voltage output in response to vibrational energy received, and at least one power processor disposed on the substrate. The power processor electrically coupled to outputs of the plurality of micro generators. When the input conditions change, the power processor can dynamically adjust its switching functions to optimize the power delivered to a load or energy storage reservoir.
-
Citations
19 Claims
-
1. An integrated MEMS resonant generator-based system, comprising:
-
a substrate;
a plurality of piezoelectric micro generators disposed on said substrate, said micro generators comprising at least one suspended structure including a piezoelectric layer, said suspended structure attached to an inertial mass, each of said plurality of micro generators generating a voltage output across said piezeolectric layer through deflection of said suspended structure in response to vibrational energy received, and at least one power processor disposed on said substrate, said power processor electrically coupled to outputs of said plurality of micro generators. - View Dependent Claims (2, 3, 5, 6, 7, 8, 9, 11, 12)
-
-
4. The system of clain 3, wherein said power processor further comprises a rectifier coupled to said outputs of said plurality of micro generators for generating a rectified voltage wherein said sensor comprises a peak detector, said dynamic switching of said power processor being based on said peak detector determining instants when said rectified voltage is at a peak value.
-
10. The system of clain 9, wherein said power processor includes a plurality of reconfigurable switches, said plurality of reconfigurable switches dynamically alterable groupings of said plurality of micro generators to form reconfigurable ones of said sub-arrays.
-
13. A method of generating electrical energy from vibrational energy, comprising the steps of:
-
providing an integrated MEMS resonant generator system comprising a substrate, a plurality of piezoelectric micro generators disposed on said substrate, said micro generators comprising at least one suspended structure including a piezoelectric layer, said suspended structure attached to an inertial mass each of said plurality of micro generators generating a voltage output across said piezeolectric layer through deflection of said suspended structure in response to vibrational energy received, and at least one power processor disposed on said substrate, said power processor electrically coupled to outputs of said plurality of micro generators;
subjecting said system to external vibrational energy, and providing electrical energy from summing said plurality of voltage outputs. - View Dependent Claims (14, 15, 16, 17, 18, 19)
-
Specification