Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography
First Claim
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1. A method of determining a spacing between a template and a substrate spaced-apart from the template, defining a region therebetween having an index of refraction associated therewith, the method comprising:
- impinging incident light upon the region by propagating the incident light along a path having a plurality of indices of refraction associated therewith, including the index of refraction, to form monitoring light; and
determining from the monitoring light, a measured dimension of the region by ascertaining a wavenumber associated with the monitoring light that is a function of a wavelength of the monitoring light and the index of refraction.
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Abstract
Described are high precision gap and orientation measurement methods between a template and a substrate used in imprint lithography processes. Gap and orientation measurement methods presented here include uses of broad-band light based measuring techniques.
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Citations
49 Claims
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1. A method of determining a spacing between a template and a substrate spaced-apart from the template, defining a region therebetween having an index of refraction associated therewith, the method comprising:
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impinging incident light upon the region by propagating the incident light along a path having a plurality of indices of refraction associated therewith, including the index of refraction, to form monitoring light; and
determining from the monitoring light, a measured dimension of the region by ascertaining a wavenumber associated with the monitoring light that is a function of a wavelength of the monitoring light and the index of refraction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A method of determining a spacing between a template and a substrate, the method comprising:
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positioning the template in a spaced relationship with respect to the substrate defining a gap therebetween, with a material being disposed in the gap and having an index of refraction associated therewith;
applying incident light to the template and the substrate;
monitoring light reaching an interface of the template with the material, defining monitored light; and
determining a magnitude of the spacing between the template and the substrate based on the monitored light by obtaining data representative of optical properties of the monitored light, with the magnitude being a function of optical characteristics of the material and a wavelength of the monitored light. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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39. A method of determining a spacing between a template and a substrate, with a material being disposed between the template and the substrate, the method comprising:
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positioning the template in a spaced relationship with respect to the substrate defining a gap therebetween, with said material being disposed in said gap and having an index of refraction associated therewith;
applying light to the template and the substrate, wherein the light comprises a plurality of wavelengths;
monitoring light reflected from a surface of the template and the substrate defining monitored light; and
determining a magnitude of the spacing between the template and the substrate based on the monitored light by obtaining data representative of an intensity of at least some of the wavelengths associated with the monitored light arid determining a wavenumber associated therewith, wherein the wavenumber is a function of the index of refraction and the wavelength of the monitored light, with said magnitude being a function of the wavenumber. - View Dependent Claims (40, 41, 42, 43, 44, 45, 46, 47, 48, 49)
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Specification