Method to control the relative position between a body and a surface

• US 6,955,868 B2
• Filed: 02/24/2004
• Issued: 10/18/2005
• Est. Priority Date: 10/29/1999
• Status: Expired due to Term

• Current Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Original Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Inventors: Sreenivasan, Sidlgata V., Johnson, Stephen C., Choi, Byung Jin
• Primary Examiner(s): Young, Christopher G.
• Application Number:
  US10/785,248
• Publication Number:
  US 20050089774A1
• Time in Patent Office: 602 Days
• Field of Search: 430/22, 430/30, 355/18, 355/72, 396/428
• US Class Current: 430/22
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: G03F 9/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically G03F7/22 takes precedence; preparation of photographic masks G03F1/00; within photographic printing apparatus for making copies G03B27/00

Abstract

A method to control a relative position between a surface and a body to form a pattern in the surface that features moving a body to obtain a desired relationship between the surface and the body. To that end, the method includes sensing the surface and the body and moving that body to obtain a desired spatial relationship with the surface.

Claims

1. A method to control a relative position between a surface and a body to form a pattern in said surface, said pattern comprising a plurality of protrusions and recessions, said method comprising:

sensing said relative position between said surface and said body; and

moving said body to obtain a desired spatial relationship between said surface and said body while minimizing undesirable dimensional variations between said surface and said plurality of protrusions and said surface and said plurality of recessions.

2. The method as recited in claim 1 wherein said body extends in a first plane and said surface extends in a second plane, wherein moving further includes positioning said first plane parallel to said second plane.

3. The method as recited in claim 1 wherein sensing further includes detecting a fringe pattern produced by light impinging upon an interface of said body with said surface.

4. The method as recited in claim 1 wherein said body is coupled to be displaced along two orthogonal axes with a portion of said surface extending substantially parallel to a plane lying in said two orthogonal axes, wherein moving further includes displacing said body to lie parallel to said plane.

5. The method as recited in claim 1 further including coupling said body to move about first and second axes and decoupling movement of said body about said first and second axes so that movement about one of said first and second axes is substantially independent of movement about the remaining of said first and second axes.

6. The method as recited in claim 1 wherein said body is coupled to be displaced along two orthogonal axes, wherein moving further includes causing said body to undergo a displacement with respect to a subset of said two orthogonal axes, with said displacement being selected from a set of movements consisting of translation and rotation.

7. The method as recited in claim 1 further includes mounting said body to a flexure system having first and second axes of rotation and mounting said flexure system to an actuation system and moving said body with said actuation system to arrange said body to be substantially parallel to a portion of said surface in superimposition therewith.

8. The method as recited in claim 1 further including disposing a formable material on said surface and contacting said formable material with said body and measuring a force of said contact.

9. The method as recited in claim 1 wherein said body lies in a first plane and a portion of said surface lies in a second plane, with moving further including contacting said surface with said body and positioning said first plane parallel to said second plane before contacting said surface with said body.

10. A method to control a relative position between a surface and a body to form a pattern in said surface, said pattern comprising a plurality of protrusions and recessions, said method comprising:

sensing said relative position between said surface and said body;

moving said body to obtain a desired spatial relationship between said surface and said body while minimizing undesirable dimensional variations between said surface and said plurality of protrusions and said surface and said plurality of recessions; and

after moving said body to obtain said desired spatial relationship, contacting said surface with said body.

11. The method as recited in claim 10 wherein sensing further includes detecting a fringe pattern produced by light impinging upon said body and said surface to sense said relative position.

12. The method as recited in claim 10 wherein said body extends in a first plane and a portion of said surface extends in a second plane, with moving further includes positioning said first plane parallel to said second plane.

13. The method as recited in claim 10 wherein said body is coupled to be displaced along two orthogonal axes with a portion of said surface extending substantially parallel to a plane lying in said two orthogonal axes, wherein moving further includes displacing said body to lie parallel to said plane.

14. The method as recited in claim 10 further including coupling said body to move about first and second axes and decoupling movement of said body about said first and second axes so that movement about one of said first and second axes is substantially independent of movement about the remaining of said first and second axes.

15. The method as recited in claim 10 wherein said body is coupled to be displaced along two orthogonal axis, wherein moving further includes causing said body to undergo a displacement with respect to a subset of two orthogonal axes, with said displacement being selected from a set of movements consisting of translation and rotation.

16. The method as recited in claim 10 further including mounting said body to a flexure system having a flexure member defining first and second axes of rotation and mounting said flexure system to an actuation system and moving said body with said actuation system body arrange said body to be substantially parallel to a portion of said surface in superimposition therewith.

17. A method to control a relative position between a surface and a body to form a pattern in said surface, said pattern comprising a plurality of protrusions and recessions, said method comprising:

sensing said relative position between said surface and said body by detecting a fringe pattern produced by light impinging upon said body and said surface; and

moving said body to obtain a desired spatial relationship between said surface and said body while minimizing undesirable dimensional variations between said surface and said plurality of protrusions and said surface and said plurality of recessions.

18. The method as recited in claim 17 wherein said body is coupled to be displaced along two orthogonal axes with a portion of said surface extending substantially parallel to a plane lying in said two orthogonal axes, wherein moving further includes displacing said body to lie parallel to said plane.

19. The method as recited in claim 18 further including decoupling movement of said body with respect to said two orthogonal axes so that movement about one of said two axes is substantially independent of movement about the remaining of said two axes.

20. The method as recited in claim 19 wherein said movement is selected from a set of movements consisting of translation and rotation.

21. The method as recited in claim 20 further including mounting said body to a flexure system having first and second axes of rotation and mounting said flexure system to an actuation system and moving said body with said actuation system to arrange said body to be substantially parallel to a portion of said surface in superimposition therewith.