Resonant cavity III-nitride light emitting devices fabricated by growth substrate removal
First Claim
Patent Images
1. A III-nitride light emitting device comprising:
- an n-type region;
a p-type region; and
a light emitting region disposed between the n-type region and the p-type region;
wherein the n-type region, p-type region, and light emitting region form a cavity, the cavity having a top surface and a bottom surface, wherein each of the top surface and the bottom surface comprise a plurality of peaks separated by a plurality of valleys.
5 Assignments
0 Petitions
Accused Products
Abstract
A semiconductor light emitting device includes an n-type region, a p-type region, and light emitting region disposed between the n- and p-type regions. The n-type, p-type, and light emitting regions form a cavity having a top surface and a bottom surface. Both the top surface and the bottom surface of the cavity may have a rough surface. For example, the surface may have a plurality of peaks separated by a plurality of valleys. In some embodiments, the thickness of the cavity is kept constant by incorporating an etch-stop layer into the device, then thinning the layers of the device by a process that terminates on the etch-stop layer.
99 Citations
25 Claims
-
1. A III-nitride light emitting device comprising:
-
an n-type region; a p-type region; and a light emitting region disposed between the n-type region and the p-type region; wherein the n-type region, p-type region, and light emitting region form a cavity, the cavity having a top surface and a bottom surface, wherein each of the top surface and the bottom surface comprise a plurality of peaks separated by a plurality of valleys. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
-
Specification