Semiconductor device and manufacturing method therefor

• US 6,956,324 B2
• Filed: 07/31/2001
• Issued: 10/18/2005
• Est. Priority Date: 08/04/2000
• Status: Expired due to Term

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei
• Primary Examiner(s): Patel, Nimeshkumar D.
• Assistant Examiner(s): LEURIG, SHARLENE L
• Application Number:
  US09/917,677
• Publication Number:
  US 20020030440A1
• Time in Patent Office: 1,540 Days
• Field of Search: 313498-509, 313/512, 445 23- 25, 438/151, 438/156, 438/157, 438/166, 257/350
• US Class Current: 313/506
• CPC Class Codes: H05B 33/24 of metallic reflective layers H05B33/26 takes precedence
• CPC Class Codes: H10K 2102/311 Flexible OLED
• CPC Class Codes: H10K 50/80 Constructional details
• CPC Class Codes: H10K 50/844 Encapsulations
• CPC Class Codes: H10K 50/86 Arrangements for improving contrast, e.g. preventing reflection of ambient light
• CPC Class Codes: H10K 50/865 comprising light absorbing layers, e.g. light-blocking layers
• CPC Class Codes: H10K 59/12 Active-matrix OLED [AMOLED] displays
• CPC Class Codes: H10K 59/873 Encapsulations
• CPC Class Codes: H10K 59/8792 comprising light absorbing layers, e.g. black layers
• CPC Class Codes: H10K 77/00 Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80

Abstract

A light weight and a low cost EL display device is provided, in which light emitting elements are formed on a flexible film. A thin metallic substrate is used as an element forming substrate with the present invention, edge portions of the metallic substrate are bent, and the metallic substrate is attached with good adhesion, within a vacuum, to a substrate holder which possesses curvature in its edge portions. After then forming light emitting elements on the thin metallic substrate, the substrate holder is separated.

Claims

1. A light emitting device comprising:

a substrate having a metallic surface;

a first insulating film over the substrate having the metallic surface;

at least one thin film transistor over the first insulating film;

a second insulating film over the at least one thin film transistor;

a light shielding film over the second insulating film; and

a light emitting element over the light shielding film;

said light emitting element including;

an anode;

a cathode; and

an EL material interposed between the anode and the cathode; and

wherein a thickness of the substrate having the metallic surface is in a range of 5 to 30 μ

m, and

wherein the light shielding film is made of a resin film.

2. A device according to claim 1,

wherein the substrate having the metallic surface is a heat resistive metallic substrate.

3. A device according to claim 1,

wherein a maximum surface roughness (Rmax) of the substrate is equal to or less than 1 μ

m.

4. A device according to claim 1,

wherein a radius of curvature of convex portions existing on a surface of the substrate is equal to or greater than 1 μ

m.

5. A device according to claim 1,

wherein the light emitting device is one selected from the group consisting of a video camera, a digital camera, a goggle-type display, a navigation system for vehicles, a personal computer, and a portable information terminal.

6. A device according to claim 1,

wherein the light shielding film is formed in contact with the cathode.

7. A device according to claim 1,

wherein the shielding film is formed adjacent to the cathode with an insulating film or a conductive film interposed therebetween.

8. A light emitting device comprising:

a metal substrate;

an insulating film over a first surface of the metal substrate;

a light emitting element over the insulating film;

said light emitting element including;

an anode;

a cathode; and

an EL material interposed between the anode and the cathode, and

a substrate holder under a majority of a surface of the metal substrate opposite the first surface,

wherein the substrate holder is made of stainless steel, ceramic or alumina.

9. A device according to claim 8,

wherein the metal substrate is a heat resistive metallic substrate.

10. A device according to claim 9,

wherein a thickness of the heat resistive metallic substrate is in a range of 5 to 30 μ

m.

11. A device according to claim 8,

wherein a maximum surface roughness (Rmax) of the substrate is equal to or less than 1 μ

m.

12. A device according to claim 8,

wherein a radius of curvature of convex portions existing on a surface of the substrate is equal to or greater than 1 μ

m.

13. A device according to claim 8,

wherein the light emitting device is one selected from the group consisting of a video camera, a digital camera, a goggle-type display, a navigation system for vehicles, a personal computer, and a portable information terminal.

14. A light emitting device comprising:

a substrate holder;

a metal substrate over the entire surface of the substrate holder;

an insulating film over the metal substrate; and

a light emitting element over the insulating film;

said light emitting element including;

an anode;

a cathode; and

an EL material interposed between the anode and the cathode; and

a light shielding film provided between the light emitting element and the metal substrate and overlapped with the light emitting element,

wherein the substrate holder is made of stainless steel, ceramic or alumina.

15. A device according to claim 14,

wherein the metal substrate is a heat resistive metallic substrate.

16. A device according to claim 15,

wherein a thickness of the heat resistive metallic substrate is in a range of 5 to 30 μ

m.

17. A device according to claim 14,

wherein a maximum surface roughness (Rmax) of the substrate is equal to or less than 1 μ

m.

18. A device according to claim 14,

wherein a radius of curvature of convex portions existing on a surface of the substrate is equal to or greater than 1 μ

m.

19. A device according to claim 14,

wherein the light emitting device is one selected from the group consisting of a video camera, a digital camera, a goggle-type display, a navigation system for vehicles, a personal computer, and a portable information terminal.

20. A device according to claim 14,

wherein the light shielding film is formed in contact with the cathode.

21. A device according to claim 14,

wherein the shielding film is formed adjacent to the cathode with an insulating film or a conductive film interposed therebetween.

22. A light emitting device comprising:

a metal substrate;

a first insulating film over a first surface of the metal substrate;

at least one thin film transistor over the first insulating film;

a second insulating film over the at least one thin film transistor;

a first electrode over the second insulating film wherein the first electrode is electrically connected with the thin film transistor;

a light emitting layer over the first electrode;

a second electrode over the light emitting layer; and

a substrate holder under a majority of a surface of the metal substrate opposite the first surface,

wherein the substrate holder is made of stainless steel, ceramic or alumina.

23. A device according to claim 22,

wherein the metal substrate is a heat resistive metallic substrate.

24. A device according to claim 23,

wherein a thickness of the heat resistive metallic substrate is in a range of 5 to 30 μ

m.

25. A device according to claim 22,

wherein a maximum surface roughness (Rmax) of the substrate is equal to or less than 1 μ

m.

26. A device according to claim 22,

wherein a radius of curvature of convex portions existing on a surface of the substrate is equal to or greater than 1 μ

m.

27. A device according to claim 22,

wherein the light emitting device is one selected from the group consisting of a video camera, a digital camera, a goggle-type display, a navigation system for vehicles, a personal computer, and a portable information terminal.