Method for self-calibrated sub-aperture stitching for surface figure measurement

• US 6,956,657 B2
• Filed: 11/25/2002
• Issued: 10/18/2005
• Est. Priority Date: 12/18/2001
• Status: Expired due to Term

• Current Assignee: QED Technologies International, Inc. (Entegris Incorporated)
• Original Assignee: QED Technologies, Inc.
• Inventors: Forbes, Greg, Golini, Donald, Murphy, Paul
• Primary Examiner(s): Lee, Andrew H.
• Application Number:
  US10/303,236
• Publication Number:
  US 20030117632A1
• Time in Patent Office: 1,058 Days
• Field of Search: 356511-516, 356/450, 356/489, 356/495
• US Class Current: 356/512
• CPC Class Codes: G01B 11/255 for measuring radius of curvature measuring diameter G01B11/08
• CPC Class Codes: G01B 2210/52 Combining or merging partially overlapping images to an overall image
• CPC Class Codes: G01B 2290/65 Spatial scanning object beam
• CPC Class Codes: G01B 9/02074 of the detector
• CPC Class Codes: G01B 9/02085 Combining two or more images of different regions
• CPC Class Codes: G01M 11/0264 by using targets or reference patterns
• CPC Class Codes: G01M 11/0271 by using interferometric methods

Abstract

A method for accurately synthesizing a full-aperture data map from a series of overlapped sub-aperture data maps. In addition to conventional alignment uncertainties, a generalized compensation framework corrects a variety of errors, including compensators that are independent in each sub-aperture. Another class of compensators (interlocked) include coefficients that are the same across all the sub-apertures. A constrained least-squares optimization routine maximizes data consistency in sub-aperture overlap regions. The stitching algorithm includes constraints representative of the accuracies of the hardware to ensure that the results are within meaningful bounds. The constraints also enable the computation of estimates of uncertainties in the final results. The method therefore automatically calibrates the system, provides a full-aperture surface map, and an estimate of residual uncertainties. Therefore, larger surfaces can be tested with greater departures from a best-fit sphere to greater accuracy than was possible in the prior art.

Claims

1. A method for synthesizing a full-aperture numerical data map of a test surface of an object from a plurality of overlapping sub-aperture data maps of said surface, comprising the steps of:

a) collecting said plurality of sub-aperture numerical data maps of said surface from a plurality of regions of said surface, at least a portion of each such map overlapping a portion of at least one adjacent map to create a region of overlapping data;

b) projecting said plurality of overlapping data maps onto a global coordinate system with a nominal distortion map;

c) selecting a plurality of error compensators from one of two groups consisting of free compensators having free amplitude range and interlocked compensators having identical constrained amplitudes to compensate for stitching errors in said overlapping data regions; and

d) simultaneously minimizing mismatch of data from each of said data maps in said overlapping regions through linear combinations of said compensators.

2. A method in accordance with claim 1 further comprising the step of selecting constraints on said compensator amplitudes.

3. A method in accordance with claim 2 wherein said selecting constraints on said compensator amplitudes includes the steps of:

a) determining inaccuracies derived from measurement apparatus used to collect said plurality of sub-aperture data maps; and

b) incorporating said apparatus inaccuracies into said numerical solution in synthesizing said full-aperture numerical data map.

4. A method in accordance with claim 1 further comprising the step of weighting the significance of individual data values within each of said sub-aperture data maps to reduce the sensitivity of said numerical solution to less-significant data points.

5. A method in accordance with claim 1 wherein said individual measurements are obtained via measurement tools including an interferometer, and wherein said interferometer and said object having said test surface are disposed on a multi-axis stage.

6. A method in accordance with claim 5 wherein said interlocked compensators are employed to obtain and compensate for spatially-dependent system biases of said measurement tools.

7. A method in accordance with claim 6 wherein said system biases include deviations from a nominal pixel scale and distortion map of said interferometer.

8. A method in accordance with claim 6 wherein a reference wave error in said interferometer is calibrated, said reference wave being modeled with an orthogonal basis set and each term in said set being represented by an interlocked compensator.

9. A method in accordance with claim 1 wherein said linear free compensators are employed in a first-order correction for sub-aperture placement error.

10. A method in accordance with claim 1 comprising the further steps of:

a) estimating actual shift and scale errors as inferred from said compensator amplitudes;

b) refining said measurement data positions and mapping by applying said estimated shift and scale errors to said original data positions; and

c) projecting said refined measurement data positions onto said global coordinate system to re-minimize said overlapped data mismatch.

11. A method in accordance with claim 1 for improving the accuracy of a synthetic full-aperture numerical data map of a test surface of an object derived from a plurality of overlapping sub-aperture data maps of said surface, comprising the further steps of iteratively performing the steps of claims 1 and 10.