Apparatus for manufacturing stacked type electronic part

• US 6,958,095 B2
• Filed: 03/27/2003
• Issued: 10/25/2005
• Est. Priority Date: 03/29/2002
• Status: Active Grant

• Current Assignee: UHT Corporation
• Original Assignee: UHT Corporation
• Inventors: Furuta, Makoto, Matsumoto, Fumiaki, Kakimoto, Masakazu, Yasoda, Hisashi
• Primary Examiner(s): Fiorilla, Chris
• Assistant Examiner(s): TADESSE, YEWEBDAR T
• Application Number:
  US10/397,270
• Publication Number:
  US 20030183165A1
• Time in Patent Office: 943 Days
• Field of Search: 118/313, 118/314, 118/315, 118/316, 118/206
• US Class Current: 118/314
• CPC Class Codes: H01L 21/67092 Apparatus for mechanical treatment or grinding or cutting, see the relevant groups in subclasses B24B or B28D
• CPC Class Codes: H01L 21/6715 Apparatus for applying a liquid, a resin, an ink or the like H01L21/67126 takes precedence
• CPC Class Codes: H01L 21/67173 in-line arrangement
• CPC Class Codes: H01L 21/67236 the substrates being processed being not semiconductor wafers, e.g. leadframes or chips
• CPC Class Codes: H05K 3/1241 by ink-jet printing or drawing by dispensing
• CPC Class Codes: H05K 3/4664 Adding a circuit layer by thick film methods, e.g. printing techniques or by other techniques for making conductive patterns by using pastes, inks or powders H05K3/4647 takes precedence

Abstract

An object of the present invention is to provide an apparatus for manufacturing a stacked type electronic part which can manufacture a stacked type electronic part dried at low temperature for a product by increasing a manufacturing speed. A base plate is placed in a predetermined linear section path to be moved back and forth and be moved vertically. Above the section path are juxtaposed one or more insulator layer forming means discharging an insulating resin paste, conductor layer forming means jetting a conductor paste by an ink jet system and drying means drying the pastes. A thin film layer having a predetermined conductor pattern placed on an insulator layer while the base plate is moved back and forth one or more times. Those steps are repeated to form a stacked type electronic part.

Claims

1. An apparatus for manufacturing a stacked type electronic part having a stage, an insulator layer former that discharges an insulating resin paste, and a conductor layer former that jets a conductor paste, wherein said insulator layer former and said conductor layer former stack on said stage a required number of thin film layers having a predetermined conductor pattern placed on an insulator layer, wherein said stage is a base plate, the base plate being provided in a predetermined linear section path so as to be moved back and forth and be moved vertically, above the section path are juxtaposed one or more insulator layer formers that discharge an insulating resin paste, conductor layer formers that jet a conductor paste and dryers that dry said pastes, and a required number of thin film layers having a predetermined conductor pattern placed on an insulator layer are stacked while said base plate is moved back and forth in said section path one or more times.

2. The apparatus for manufacturing a stacked type electronic part according to claim 1, wherein at least one of said dryers is arranged in the substantially central part of said section path.

3. The apparatus for manufacturing a stacked type electronic part according to claim 2, wherein at least one of said insulator layer formers jets the insulating resin paste by the ink jet system to form an insulator layer.

4. The apparatus for manufacturing a stacked type electronic part according to claim 2, wherein said insulator layer former fills the insulating resin paste into a recessed part between conductor layers formed by the conductor layer former or a predetermined region except for a region formed with the conductor layer.

5. The apparatus for manufacturing a stacked type electronic part according to claim 2, wherein said conductor layer former jets the conductor paste onto said conductor pattern by the ink jet system to form a via conductor.

6. The apparatus for manufacturing a stacked type electronic part according to claim 1, wherein at least one of said insulator layer formers jets the insulating resin paste by the ink jet system to form an insulator layer.

7. The apparatus for manufacturing a stacked type electronic part according to claim 6, wherein said insulator layer former fills the insulating resin paste into a recessed part between conductor layers formed by the conductor layer former or a predetermined region except for a region formed with the conductor layer.

8. The apparatus for manufacturing a stacked type electronic part according to claim 6, wherein said conductor layer former jets the conductor paste onto said conductor pattern by the ink jet system to form a via conductor.

9. The apparatus for manufacturing a stacked type electronic part according to claim 1, wherein said insulator layer former fills the insulating resin paste into a recessed part between conductor layers formed by the conductor layer former or a predetermined region except for a region formed with the conductor layer.

10. The apparatus for manufacturing a stacked type electronic part according to claim 9, wherein said conductor layer former jets the conductor paste onto said conductor pattern by the ink jet system to form a via conductor.

11. The apparatus for manufacturing a stacked type electronic part according to claim 1, wherein said conductor layer former jets the conductor paste onto said conductor pattern by the ink jet system to form a via conductor.

12. The apparatus for manufacturing a stacked type electronic part according to claim 1, wherein a laser device that provides a via hole in said insulator layer is provided, and said conductor layer former fills the conductor paste into the via hole provided by the laser device to form a via conductor.

13. The apparatus for manufacturing a stacked type electronic part according to claim 1, wherein a temporary presser that presses the top surface of said thin film layer at the appropriate time when stacking the layer is provided.

14. The apparatus for manufacturing a stacked type electronic part according to claim 13, wherein said temporary presser is a pressing roll contacted with the insulating resin paste and the conductor paste dried by the dryer and having on its surface very small adhesiveness, and a particle removing roller having adhesiveness is brought into contact with the roller.

15. The apparatus for manufacturing a stacked type electronic part according to claim 14, wherein in addition to said insulator layer former, conductor layer former and dryer, a laser device that provides a via hole in an insulator layer is provided, the laser device is a unit, and the units can be exchanged with each other.

16. The apparatus for manufacturing a stacked type electronic part according to claim 1, wherein said insulator layer is an ink jet system.

17. The apparatus for manufacturing a stacked type electronic part according to claim 16, wherein at least one of said insulator layer formers jets the insulating resin paste by the ink jet system to form an insulator layer.

18. The apparatus for manufacturing a stacked type electronic part according to claim 16, wherein said insulator layer former fills the insulating resin paste into a recessed part between conductor layers formed by the conductor layer former or a predetermined region except for a region formed with the conductor layer.

19. The apparatus for manufacturing a stacked type electronic part according to claim 16, wherein said conductor layer former jets the conductor paste onto said conductor pattern by the ink jet system to form a via conductor.

20. The apparatus for manufacturing a stacked type electronic part according to claim 1, wherein said insulator layer former, conductor layer former and dryer are units, respectively, and the units can be exchanged with each other.

21. The apparatus for manufacturing a stacked type electronic part according to claim 1, wherein said insulator layer former fills the insulating resin paste into a recessed part between conductor layers formed by the conductor layer former or a predetermined region except for a region formed with the conductor layer.

22. An apparatus for manufacturing a stacked type electronic part having a stage, an insulator layer former that discharges an insulating resin paste, a conductor layer former that jets a conductor paste, and a dryer that dries said pastes, wherein said insulator layer former and said conductor layer former stack on said stage a required number of thin film layers having a predetermined conductor pattern placed on an insulator layer, wherein said insulator layer former, conductor layer former and dryer are units, respectively, and the units can be exchanged with each other.

23. An apparatus for manufacturing a stacked type electronic part having a stage, an insulator layer former that discharges an insulating resin paste and a dry solvent, a conductor layer former that jets a conductor paste and said dry solvent, and a dryer that dries said pastes, wherein said insulator layer former and said conductor layer former stack on said stage a required number of thin film layers having a predetermined conductor pattern placed on an insulator layer, wherein said insulator layer former, conductor layer former and dryer are units, respectively, and the units can be exchanged with each other.