Micro electro-mechanical system (MEMS) phase shifter
First Claim
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1. A phase shifter for shifting the phase of a radio frequency (RF) signal, comprising:
- a quadrature coupler having an input port, an output port, a first load port and a second load port;
a first variable reactance having a first plurality of reflecting phase shifting elements each having an associated micro electro mechanical system (MEMS) switching element to individually and selectively couple the reflecting phase shifting elements of the first variable reactance to the first load port; and
a second variable reactance having a second plurality of reflecting phase shifting elements each having an associated MEMS switching element to individually and selectively couple the reflecting phase shifting elements of the second variable reactance to the second load port.
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Abstract
A micro electro-mechanical system (MEMS) phase shifter for shifting the phase of a radio frequency (RF) signal. The phase shifter includes a quadrature coupler having an input port, an output port, a first load port and a second load port. A first variable reactance is coupled to the first load port and a second variable reactance is coupled the second load port. Each variable reactance has a plurality of reflecting phase shifting elements each having an associated micro electro-mechanical system (MEMS) switching element to individually and selectively couple the reflecting phase shifting element to the appropriate load port.
27 Citations
23 Claims
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1. A phase shifter for shifting the phase of a radio frequency (RF) signal, comprising:
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a quadrature coupler having an input port, an output port, a first load port and a second load port;
a first variable reactance having a first plurality of reflecting phase shifting elements each having an associated micro electro mechanical system (MEMS) switching element to individually and selectively couple the reflecting phase shifting elements of the first variable reactance to the first load port; and
a second variable reactance having a second plurality of reflecting phase shifting elements each having an associated MEMS switching element to individually and selectively couple the reflecting phase shifting elements of the second variable reactance to the second load port. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 20, 21)
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9. A phase shifter for shifting the phase of a radio frequency (RF) signal, comprising:
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a first and a second phase shifter stage each including;
a quadrature coupler having an input port, an output port, a first load port and a second load port;
a first variable reactance having a first plurality of reflecting phase shifting elements each having an associated micro electro-mechanical system (MEMS) switching element to individually and selectively couple the reflecting phase shifting elements of the first variable reactance to the first load port; and
a second variable reactance having a second plurality of reflecting phase shifting elements each having an associated MEMS switching element to individually and selectively couple the reflecting phase shifting elements of the second variable reactance to the second load port; and
wherein the output port of the first phase shifter stage is coupled to the input port of the second phase shifter stage. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 22, 23)
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Specification