Method of fabricating a microfabricated high aspect ratio device with electrical isolation

• US 6,960,488 B2
• Filed: 06/29/1999
• Issued: 11/01/2005
• Est. Priority Date: 06/13/1997
• Status: Expired due to Term

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Brosnihan, Timothy J., Clark, William A., Bustillo, James
• Primary Examiner(s): Pham, Long
• Assistant Examiner(s): MAI, ANH D
• Application Number:
  US09/342,348
• Publication Number:
  US 20040147055A1
• Time in Patent Office: 2,317 Days
• Field of Search: 735/143.2, 174/253, 438 50- 52, 438/706
• US Class Current: 438/52
• CPC Class Codes: B81B 2203/033 Trenches
• CPC Class Codes: B81C 1/00246 Monolithic integration, i.e. micromechanical structure and electronic processing unit are integrated on the same substrate
• CPC Class Codes: B81C 2203/0778 Topology for facilitating the monolithic integration not provided for in B81C2203/0764 - B81C2203/0771
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/0888 for indicating angular acceleration
• CPC Class Codes: G01P 15/097 by vibratory elements
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type

Abstract

A microfabricated device having a high vertical aspect ratio and electrical isolation between a structure region and a circuit region. The device may be fabricated on a single substrate and may include electrical interconnections between the structure region and the circuit region. The device includes a substrate and an isolation trench surrounding a structure region in the substrate. The isolation trench includes a lining of a dielectric insulative material. A plurality of microstructure elements are located in the structure region and are laterally anchored to the isolation trench.

Claims

1. A method of fabricating a microelectromechanical system, comprising:

providing a substrate having a device layer including single-crystal silicon, a handle layer and a sacrificial layer between the device layer and the handle layer;

etching a first trench in the single-crystal silicon;

depositing a dielectric isolation layer in the first trench to form an isolation trench;

after depositing the dielectric isolation layer, etching a second trench in the single-crystal silicon, the second trench defining a microstructure including a plurality of elements laterally anchored to the isolation trench such that the isolation trench provides electrical isolation for the anchored elements of the microstructure from each other; and

removing a portion of the sacrificial layer, wherein the removed portion entirely undercuts the plurality of laterally anchored elements.

2. The method of claim 1 further comprising depositing a filler material over the isolation layer in the first trench.

3. The method of claim 1 wherein the isolation layer fills the first trench.

4. The method of claim 1 wherein removing a portion of the sacrificial layer includees releasing the microstructure.

5. The method of claim 1 wherein the step of etching the first trench etches in the single-crystal silicon exposes the sacrificial layer.

6. The method of claim 1 wherein the step of etching the second trench etches through the device layer to expose the sacrificial layer.

7. The method of claim 1 wherein the sacrificial layer includes silicon dioxide.

8. The method of claim 1 wherein the device layer includes epitaxial silicon.

9. The method of claim 1 wherein the isolation layer includes silicon nitride.

10. The method of claim 1, wherein the step of etching the second trench includes etching a portion of the device layer that abuts the isolation trench.

11. The method of claim 1, wherein the step of etching the second trench includes forming at least one movable element and at least one generally immobile element.

12. The method of claim 1, wherein the step of etching the first trench comprises inductively coupled plasma etching.

13. The method of claim 1, wherein the step of etching the second trench comprises inductively coupled plasma etching.

14. The method of claim 1, wherein removing the portion of the sacrificial layer at least partially undercuts the isolation trench.

15. The method of claim 1, wherein the first trench surrounds a region of the device layer.

16. The method of claim 1, wherein the first trench electrically isolates a first region of the device layer from a second region of the device layer.

17. The method of claim 16, wherein the second trench is located in the first region.

18. The method of claim 17 further comprising forming circuitry in the second region of the device layer outside the first region.

19. The method of claim 2 further comprising depositing an electrical connection over the first trench to connect the microstructure to the circuitry.