Moving apparatus, exposure apparatus, and device manufacturing method

• US 6,960,845 B2
• Filed: 10/02/2003
• Issued: 11/01/2005
• Est. Priority Date: 10/08/2002
• Status: Expired due to Fees

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Koide, Hiroyuki
• Primary Examiner(s): Schuberg, Darren
• Assistant Examiner(s): JONES, JUDSON
• Application Number:
  US10/675,996
• Publication Number:
  US 20040066497A1
• Time in Patent Office: 761 Days
• Field of Search: 310/12, 355/53, 355/72
• US Class Current: 310/12.15
• CPC Class Codes: G03B 27/58 Baseboards, masking frames, or other holders for the sensitive material G03B27/53 takes precedence ; for electrophotographic copiers G03G15/65
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70725 control
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: G03F 7/70766 Reaction force control means, e.g. countermass
• CPC Class Codes: H02K 16/00 Machines with more than one rotor or stator machines for transmitting mechanical power from a driving shaft to a driven shaft and comprising structurally interrelated motor and generator parts H02K51/00; permanent magnet machines with multiple rotors or stators relatively rotated for vectorially combining the excitation fields or the armature voltages H02K21/029
• CPC Class Codes: H02K 41/031 of the permanent magnet type
• CPC Class Codes: H02P 6/16 Circuit arrangements for detecting position

Abstract

A moving apparatus includes a first actuator having a movable element and a stator, and a second actuator for driving the stator. The second actuator drives the stator in a direction to suppress rotation of the stator which accompanies movement of the movable element.

Claims

1. A moving apparatus comprising:

a first actuator having a movable element and a stator;

a second actuator which drives said stator;

a feed forward compensator which controls said second actuator on the basis of a signal supplied to said first actuator or a physical quantity of said movable element; and

a compensator which controls said second actuator on the basis of an acceleration of said movable element,

wherein said second actuator drives said stator in a direction to suppress rotation of said stator which accompanies movement of said movable element.

2. The apparatus according to claim 1, wherein a target acceleration is used as the acceleration of said movable element.

3. The apparatus according to claim 1, wherein an actual acceleration measured by a measurement unit is used as the acceleration of said movable element.

4. The apparatus according to claim 1, wherein the signal includes a manipulated variable with which said first actuator is operated.

5. The apparatus according to claim 1, wherein a gain of said compensator is determined in accordance with a distance between a power point of said movable element in a predetermined direction and a barycenter of said stator when said movable element is driven by said first actuator.

6. The apparatus according to claim 1, wherein said stator absorbs a reaction force that acts on said stator when said movable element is driven by said first actuator.

7. A moving apparatus comprising:

a first actuator having a movable element and a stator;

a second actuator which drives said stator; and

a feed forward compensator which controls said second actuator on the basis of a signal supplied to said first actuator or a physical quantity of said movable element,

wherein said second actuator drives said stator in a direction to suppress rotation of said stator which accompanies movement of said movable element, and

wherein a gain of said compensator is determined in accordance with a distance between a power point of said movable element in a predetermined direction and a barycenter of said stator when said movable element is driven by said first actuator.

8. The apparatus according to claim 7, further comprising a compensator which controls said second actuator on the basis of an acceleration of said movable element.

9. The apparatus according to claim 8, wherein a target acceleration is used as the acceleration of said movable element.

10. The apparatus according to claim 8, wherein an actual acceleration measured by a measurement unit is used as the acceleration of said movable element.

11. The apparatus according to claim 7, wherein the signal includes a manipulated variable with which said first actuator is operated.

12. The apparatus according to claim 7, wherein said stator absorbs a reaction force that acts on said stator when said movable element is driven by said first actuator.