Strain sensor
First Claim
Patent Images
1. A strain sensor comprising:
- a sensor section having a conductor and a first magnetic material provided on one surface of the conductor, the magnetic material having a negative magnetic strain constant with a value of −
5×
10−
7 or less;
a fixing mechanism which holds the sensor section so as to allow a central portion of the sensor section to be deformed in response to stress, and fixes an entire periphery of the sensor section;
an inductor disposed to face a surface of the sensor section which is opposite a surface on which the first magnetic material is provided, the inductor being disposed away from the sensor section; and
a detection unit which detects an amount of deformation of the sensor section based on a change in inductance of the inductor, wherein magnetic permeability of the first magnetic material changes based on the amount of deformation, and increases when the first magnetic material contracts as a result of stress applied to the sensor section.
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Abstract
A strain sensor includes a sensor section having a magnetic material provided on one surface of a conductor, the magnetic material being formed integrally with the conductor and having a magnetic strain constant with an absolute value larger than 1×10−7, a fixing mechanism which fixes at least a part of the sensor section, an inductor disposed in a surface side of the sensor section which is opposite the surface on which the magnetic material is provided, the inductor being disposed opposite and away from the sensor section, and a detection unit which detects the amount of deformation of the sensor section caused by stress applied thereto on the basis of a change in inductance of the inductor.
23 Citations
24 Claims
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1. A strain sensor comprising:
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a sensor section having a conductor and a first magnetic material provided on one surface of the conductor, the magnetic material having a negative magnetic strain constant with a value of −
5×
10−
7 or less;
a fixing mechanism which holds the sensor section so as to allow a central portion of the sensor section to be deformed in response to stress, and fixes an entire periphery of the sensor section;
an inductor disposed to face a surface of the sensor section which is opposite a surface on which the first magnetic material is provided, the inductor being disposed away from the sensor section; and
a detection unit which detects an amount of deformation of the sensor section based on a change in inductance of the inductor, wherein magnetic permeability of the first magnetic material changes based on the amount of deformation, and increases when the first magnetic material contracts as a result of stress applied to the sensor section. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A strain sensor comprising:
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a sensor section having a conductor and a first magnetic material provided on one surface of the conductor, the magnetic material having a positive magnetic strain constant with a value of 5×
10−
7 or more;
a fixing mechanism which fixes a part of a periphery of the sensor section;
an inductor disposed to face a surface of the sensor section which is opposite a surface on which the first magnetic material is provided, the inductor being disposed away from the sensor section; and
a detection unit which detects an amount of deformation of the sensor section based on a change in inductance of the inductor, wherein magnetic permeability of the first magnetic material changes based on the amount of deformation, and increases when the first magnetic material expands as a result of stress applied to the sensor section. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22)
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23. A strain sensor comprising:
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a sensor section having a conductor and a first magnetic material provided on one surface of the conductor, the magnetic material having a positive magnetic strain constant with a value of 5×
10−
7 or more;
a fixing mechanism which has a member fixing the central portion of the sensor section;
an inductor disposed to face a surface of the sensor section which is opposite a surface on which the first magnetic material is provided, the inductor being disposed away from the sensor section; and
a detection unit which detects an amount of deformation of the sensor section based on a change in inductance of the inductor, wherein magnetic permeability of the first magnetic material changes based on the amount of deformation, and increases when the first magnetic material expands as a result of stress applied to the sensor section. - View Dependent Claims (24)
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Specification