Apparatus and method for disturb-free programming of passive element memory cells

• US 6,963,504 B2
• Filed: 11/19/2004
• Issued: 11/08/2005
• Est. Priority Date: 03/31/2003
• Status: Expired due to Term

• Current Assignee: SanDisk Technologies LLC (Western Digital Corporation)
• Original Assignee: Matrix Semiconductor, Inc. (Western Digital Corporation)
• Inventors: Scheuerlein, Roy E., Knall, N. Johan
• Primary Examiner(s): TRAN, MICHAEL THANH
• Application Number:
  US10/994,016
• Publication Number:
  US 20050073898A1
• Time in Patent Office: 354 Days
• Field of Search: 365/185.18, 365/185.02
• US Class Current: 365/185.18
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: G11C 13/0014 comprising cells based on organic memory material
• CPC Class Codes: G11C 17/16 using electrically-fusible links
• CPC Class Codes: G11C 17/165 Memory cells which are electrically programmed to cause a change in resistance, e.g. to permit multiple resistance steps to be programmed rather than conduct to or from non-conduct change of fuses and antifuses digital stores using resistance random access memory elements G11C13/0002
• CPC Class Codes: G11C 2213/71 Three dimensional array
• CPC Class Codes: G11C 2213/72 Array wherein the access device being a diode

Abstract

In a passive element memory array, such as a rail stack array having a continuous semiconductor region along one or both of the array lines, programming a memory cell may disturb nearby memory cells as result of a leakage path along the array line from the selected cell to the adjacent cell. This effect may be reduced substantially by changing the relative timing of the programming pulses applied to the array lines for the selected memory cell, even if the voltages are unchanged. In an exemplary three-dimensional antifuse memory array, a positive-going programming pulse applied to the anode region of the memory cell preferably is timed to lie within the time that a more lightly-doped cathode region is pulsed low.

Claims

1. A method for programming a memory array of antifuse memory cells coupled between a respective array line on one memory array layer and a respective array line on another memory array layer, said memory cells comprising two opposite conductivity type semiconductor regions, one being more lightly-doped than the other, said method comprising:

pulsing for a first time period a first selected array line coupled to the more heavily-doped region of a selected memory cell from an unselected bias voltage to a selected bias voltage; and

pulsing for a second time period a second selected array line coupled to the more lightly-doped region of the selected memory cell from an unselected bias voltage to a selected bias voltage;

wherein the first and second array line pulses are arranged so that the selected memory cell, once programmed, is reversed biased whenever the second selected array line is biased at an intermediate voltage closer to its unselected bias voltage than its selected bias voltage.

2. The method of claim 1 wherein the first and second array line pulses are arranged so that the selected memory cell, once programmed, is reversed biased whenever the second selected array line is biased at an intermediate voltage more than 10% toward its unselected bias voltage relative to its selected bias voltage.

3. The method of claim 1 wherein the memory array comprises a three-dimensional array having at least three array line layers defining at least two memory planes.

4. The method of claim 3 wherein the array comprises at least one layer of rail-stack array lines.

5. The method of claim 4 wherein at least one layer of passive element memory cell material is continuous along the selected array line associated with the more lightly-doped side of the memory cell.

6. The method of claim 1 wherein the memory array comprises at least three array line layers defining at least two memory planes, and comprises memory cells whose anode region is alternately an upper region of some memory planes and a lower region of vertically adjacent memory planes.

7. The method of claim 1 wherein the memory array comprises at least three array line layers defining at least two memory planes, and comprises memory cells whose anode region is either an upper region of all memory planes, or a lower region of all memory planes.

8. The method of claim 1 wherein:

the more lightly-doped region comprises a p−

region; and

the more heavily-doped region comprises an n+ region.

9. The method of claim 1 wherein:

the more lightly-doped region comprises an n−

region associated with a word line;

the more heavily-doped region comprises a p+ region associated with a bit line;

the word line is pulsed with a negative-going programming pulse to a selected bias voltage for the word line; and

the bit line is pulsed with a positive-going programming pulse to a selected bias voltage for the bit line.

10. The method of claim 9 further comprising programming more than one memory cell associated with a word line by pulsing each of a number of bit lines within a single word line pulse.

11. The method of claim 1 wherein the first time period substantially occurs within the second time period.

12. The method of claim 1 wherein each array line coupled to the more lightly-doped region of memory cells associated therewith comprises a continuous semiconductor layer that forms the more lightly-doped region of each such memory cell associated therewith.

13. The method of claim 1 wherein each array line coupled to the more lightly-doped region of memory cells associated therewith comprises a continuous semiconductor layer that connects to the more lightly-doped region of each such memory cell associated therewith, wherein the continuous semiconductor layer and the more lightly-doped regions of each memory cell have a different doping density.

14. The method of claim 1 wherein each array line coupled to the more lightly-doped region of memory cells associated therewith comprises a rail-stack.

15. The method of claim 1 further comprising:

pulsing for a third time a third selected array line coupled to the more heavily-doped region of a second selected memory cell from an unselected bias voltage to a selected bias voltage, said second selected memory cell also being coupled to the second selected array line;

wherein the third time period substantially occurs within the second time period.

16. The method of claim 15 wherein the first and third pulses overlap.

17. The method of claim 15 wherein the first and third pulses do not substantially overlap.

18. The method of claim 15 wherein the memory array comprises a three-dimensional array having at least two memory planes, and the first selected memory cell and the second selected memory cell fall within different memory planes.

19. An integrated circuit comprising:

a memory array of antifuse memory cells coupled between a respective array line on one memory array layer and a respective array line on another memory array layer, said memory cells comprising two opposite conductivity type semiconductor regions, one being more lightly-doped than the other; and

array support circuitry configured, when in a programming mode, for pulsing for a first time period a first selected array line coupled to the more heavily-doped region of a selected memory cell from an unselected bias voltage to a selected bias voltage, and for pulsing for a second time period a second selected array line coupled to the more lightly-doped region of the selected memory cell from an unselected bias voltage to a selected bias voltage, wherein the first and second array line pulses are arranged so that the selected memory cell, once programmed, is reversed biased whenever the second selected array line is biased at an intermediate voltage closer to its unselected bias voltage than its selected bias voltage.

20. The integrated circuit of claim 19 wherein the first and second array line pulses are arranged so that the selected memory cell, once programmed, is reversed biased whenever the second selected array line is biased at an intermediate voltage more than 10% toward its unselected bias voltage relative to its selected bias voltage.

21. The integrated circuit of claim 19 wherein the memory array comprises a three-dimensional array having at least three array line layers defining at least two memory planes.

22. The integrated circuit of claim 21 wherein the memory array comprises at least one layer of rail-stack array lines.

23. The integrated circuit of claim 22 wherein at least one layer of passive element memory cell material is continuous along the selected array line associated with the more lightly-doped side of the memory cell.

24. The integrated circuit of claim 19 wherein the memory array comprises at least three array line layers defining at least two memory planes, and comprises memory cells whose anode region is alternately an upper region of some memory planes and a lower region of vertically adjacent memory planes.

25. The integrated circuit of claim 19 wherein the memory array comprises at least three array line layers defining at least two memory planes, and comprises memory cells whose anode region is either an upper region of all memory planes, or a lower region of all memory planes.

26. The integrated circuit of claim 19 wherein:

the more lightly-doped region comprises a p−

region; and

the more heavily-doped region comprises an n+ region.

27. The integrated circuit of claim 19 wherein:

the more lightly-doped region comprises an n−

region associated with a word line;

the more heavily-doped region comprises a p+ region associated with a bit line;

the word line is pulsed with a negative-going programming pulse to a selected bias voltage for the word line; and

the bit line is pulsed with a positive-going programming pulse to a selected bias voltage for the bit line.

28. The integrated circuit of claim 27 wherein, when in a programming mode, the array support circuitry is further configured to program more than one memory cell associated with a word line by pulsing each of a number of bit lines within a single word line pulse.

29. The integrated circuit of claim 19 wherein the first time period substantially occurs within the second time period.

30. The integrated circuit of claim 19 wherein each array line coupled to the more lightly-doped region of memory cells associated therewith comprises a continuous semiconductor layer that forms the more lightly-doped region of each such memory cell associated therewith.

31. The integrated circuit of claim 19 wherein each array line coupled to the more lightly-doped region of memory cells associated therewith comprises a continuous semiconductor layer that connects to the more lightly-doped region of each such memory cell associated therewith, wherein the continuous semiconductor layer and the more lightly-doped regions of each memory cell have a different doping density.

32. The integrated circuit of claim 19 wherein each array line coupled to the more lightly-doped region of memory cells associated therewith comprises a rail-stack.

33. The integrated circuit of claim 19 wherein the array support circuitry is further configured, when in a programming mode, to pulse for a third time a third selected array line coupled to the more heavily-doped region of a second selected memory cell from an unselected bias voltage to a selected bias voltage, said second selected memory cell also being coupled to the second selected array line, wherein the third time period substantially occurs within the second time period.

34. The integrated circuit of claim 33 wherein the first and third pulses overlap.

35. The integrated circuit of claim 33 wherein the first and third pulses do not substantially overlap.

36. The integrated circuit of claim 33 wherein the memory array comprises a three-dimensional array having at least two memory planes, and the first selected memory cell and the second selected memory cell fall within different memory planes.

37. A computer readable medium encoding an integrated circuit, said encoded integrated circuit as recited in claim 19.

38. The computer readable medium of claim 37 wherein the encoded memory array comprises at least three array line layers defining at least two memory planes.