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Micro-opto-electro-mechanical switching system

  • US 6,963,679 B1
  • Filed: 10/18/2001
  • Issued: 11/08/2005
  • Est. Priority Date: 05/24/2000
  • Status: Expired due to Term
First Claim
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1. A micro-electro-mechanical optical apparatus comprising:

  • an optical element capable of motion in at least one degree of freedom wherein the motion in the at least one degree of freedom is enabled by serpentine hinges configured to enable the optical element to move in the at least one degree of freedom;

    driving elements configured to deflect the optical element in said at least one degree of freedom to controllably induce deflection in the optical element; and

    damping element;

    wherein said damping element comprises the serpentine hinges configured to reduce a magnitude of resonances.

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