Micromachined vibratory gyroscope and method with electronic coupling
First Claim
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1. A micromachined vibratory gyroscope having drive and sense modes of operation, comprising:
- a plurality of physically uncoupled masses mounted on a substrate for movement independently of each other along drive and sense axes, and means coupling the masses together electronically in at least one of the modes by applying electrical signals to adjust the resonance frequency of at least one of the masses.
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Abstract
Micromachined vibratory gyroscope and method in which the vibrating masses are coupled electronically, e.g. by electronically adjusting the resonance frequency of one or more of the masses so that all of the masses have the same resonance frequency.
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Citations
33 Claims
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1. A micromachined vibratory gyroscope having drive and sense modes of operation, comprising:
- a plurality of physically uncoupled masses mounted on a substrate for movement independently of each other along drive and sense axes, and means coupling the masses together electronically in at least one of the modes by applying electrical signals to adjust the resonance frequency of at least one of the masses.
- View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of operating a micromachined vibratory gyroscope with drive and sense modes, comprising the steps of:
- allowing a plurality of physically uncoupled masses to move independently of each other along drive and sense axes, and coupling the masses together electronically in at least one of the modes by using electrical signals to adjust the resonance frequency of at least one of the masses.
- View Dependent Claims (8, 9, 10)
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11. A micromachined vibratory gyroscope having drive and sense modes of operation, comprising:
- a plurality of drive masses and sensing masses, means coupling the drive masses and sensing masses together in such manner that the drive masses move independently of the sensing masses along a drive axis and the sensing masses move in concert with the drive masses along a sense axis, and means coupling the masses together electronically in the sense mode by application of electrical signals to adjust the resonance frequencies of at least one of the masses in the sense mode.
- View Dependent Claims (12, 13, 14, 15, 16, 17)
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18. A method of operating a micromachined vibratory gyroscope having a plurality of drive masses and sensing masses, with drive and sense modes of operation, comprising the steps of:
- allowing the drive masses to move independently of the sensing masses along a drive axis, constraining the sensing masses to move in concert with the drive masses along a sense axis, and coupling the masses together electronically in the sense mode by using electrical signals to adjust the resonance frequencies of at least one of the masses in the sense mode.
- View Dependent Claims (19, 20, 21, 22)
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23. A micromachined vibratory gyroscope having drive and sense modes, comprising:
- a plurality of masses which are uncoupled and free to move independently of each other along a drive axis, a pickoff beam coupling the masses together for movement in opposite directions along a sense axis, means responsive to movement of the pickoff beam for sensing movement of the masses along the sense axis, and means coupling the masses together electronically in the drive mode by application of electrical signals to adjust the resonance frequencies of the masses in the drive mode.
- View Dependent Claims (24, 25, 26, 27, 28, 29)
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30. A method of operating a micromachined vibratory gyroscope having a plurality of masses which are uncoupled and free to move independently of each other along a drive axis and a pickoff beam coupling the masses together for movement in opposite directions along a sense axis, comprising the steps of:
- monitoring movement of the pickoff beam to sense movement of the masses along the sense axis, and coupling the masses together electronically in a drive mode by applying electrical signals to adjust the resonance frequency of at least one of the masses in the drive mode.
- View Dependent Claims (31, 32, 33)
Specification