Method for fabricating nanoscale patterns in light curable compositions using an electric field

• US 6,964,793 B2
• Filed: 05/16/2001
• Issued: 11/15/2005
• Est. Priority Date: 05/16/2002
• Status: Expired due to Fees

• Current Assignee: University of Texas System
• Original Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Inventors: Sreenivasan, Sidlgata V., Willson, Carlton Grant, Bonnecaze, Roger T.
• Primary Examiner(s): CHEN, BRET P
• Application Number:
  US09/905,718
• Publication Number:
  US 20030215577A1
• Time in Patent Office: 1,644 Days
• Field of Search: 427/466, 427/458, 427/459, 427/595, 427/385.5, 427/256
• US Class Current: 427/466
• CPC Class Codes: B05D 1/40 Distributing applied liquids or other fluent materials by members moving relatively to surface
• CPC Class Codes: B05D 3/067 Curing or cross-linking the coating
• CPC Class Codes: B05D 3/145 After-treatment
• CPC Class Codes: B29C 2043/025 forming a microstructure, i.e. fine patterning
• CPC Class Codes: B29C 2043/3211 magnets
• CPC Class Codes: B29C 43/003 characterised by the choice of material
• CPC Class Codes: B81C 1/0046 using stamping, e.g. imprinting nanoimprinting for making etch masks G03F7/0002
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping

Abstract

A high-throughput lithography process for creating high-resolution patterns in a polymerizable composition using carefully controlled electric field followed by curing of the polymerizable composition is described. The process involves the use of a template that includes the desired patterns. This template is brought into close proximity to the polymerizable composition on the substrate. An external electric file is applied to the template-substrate interface while maintaining a uniform, carefully controlled gap between the template and substrate. This causes the polymerizable composition to be attracted to the raised portions of the template. By appropriately choosing the various process parameters such as the viscosity of the polymerizable composition, the magnitude of the electric field, and the distance between the template and substrate, the resolution of the structures formed in the liquid may be controlled to conform to that of the template.

Claims

1. A method of creating a pattern on a body, said method comprising:

arranging a liquid to be between a template and said body;

orienting said template proximate to said liquid; and

moving a portion of said liquid between said template and said body to form a contiguous region of said liquid between two spaced-apart electric field gradients, with each of said electric field gradients being defined by first and second electric fields, with said first electric field being adjacent to said second electric field and said first electric field being greater than said second electric field.

2. The method as recited in claim 1, wherein said pattern comprises a topology selected from a group of topologies consisting essentially of recessed and protruded, smooth, and planarized.

3. The method as recited in claim 1, wherein moving said portion of said liquid further includes moving said portion away from said body, toward said template.

4. The method as recited in claim 1, further includes solidifying said liquid.

5. The method as recited in claim 4, wherein solidifying further includes solidifying said liquid in the presence of said first and second electric fields.

6. The method as recited in claim 1, wherein said template further includes a surface facing said body and moving paid portion of said liquid further includes applying said first, and second electric fields to said surface.

7. The method as recited in claim 1, wherein arranging said liquid further includes arranging a low viscosity liquid between said template and said body.

8. The method as recited in claim 1, further including providing said template with an electrically conducting material.

9. A method of creating a pattern on a body, said method comprising:

disposing a liquid between a template and said body;

orientating said template proximate to said liquid; and

moving a portion of said liquid between said template and said body toward said template to form a contiguous region of said liquid between two spaced-apart electric field gradients, with each of said electric field gradients being defined by first and second electric fields, with said first electric field being adjacent to said second electric field and said first electric field being greater than said second electric field.

10. The method as recited in claim 9, wherein said pattern comprises a topology selected from a group of topologies consisting essentially of recessed and protruded, smoothed, and planarized.

11. The method as recited in claim 9, wherein moving said portion of said liquid causes said portion of said liquid to contact a portion of said template.

12. The method as recited in claim 9 further including polymerizing said liquid, with said liquid comprising a polymerizable composition.

13. The method as recited in claim 12, wherein polymerizing said liquid occurs in the presence of said first and second electric fields.

14. A method of creating a pattern on a body, said method comprising:

disposing a polymerizable liquid on said body;

orientating said a template proximate to said polymerizable liquid;

moving a portion of said polymerizable liquid toward said template to form a contiguous region of said polymerizable liquid between two spaced-apart electric field gradients, with each of said electric field gradients being defined by first and second electric fields, with said first electric field being adjacent to said second electric field and said first electric field being greater than said second electric field; and

polymerizing said polymerizable liquid.

15. The method as recited in claim 14, wherein disposing said liquid further includes disposing a low viscosity liquid.

16. The method as recited in claim 14, further includes providing said template with an electrically conducting material.

17. The method as recited in claim 14, wherein polymerizing said liquid occurs in the presence of said electric field.