Method of fabricating a transistor on a substrate to operate as a fully depleted structure

• US 6,964,903 B2
• Filed: 01/25/2002
• Issued: 11/15/2005
• Est. Priority Date: 09/01/1998
• Status: Expired due to Fees

• Current Assignee: Round Rock Research LLC
• Original Assignee: Micron Technology, Inc.
• Inventors: Forbes, Leonard, Noble, Wendell P. Jr.
• Primary Examiner(s): TRINH, MICHAEL MANH
• Application Number:
  US10/057,225
• Publication Number:
  US 20020081808A1
• Time in Patent Office: 1,390 Days
• Field of Search: 438/157, 438/283, 438/268, 438/269, 438/279, 438/212, 438/156
• US Class Current: 438/283
• CPC Class Codes: H01L 27/0705 comprising components of the field effect type
• CPC Class Codes: H01L 29/7828 without inversion channel, e.g. vertical ACCUFETs, normally-on vertical MISFETs
• CPC Class Codes: H01L 29/7831 with multiple gate structure FinFETs or MuGFETs H01L29/7855, thin film transistors H01L29/78645
• CPC Class Codes: H03D 7/125 with field effect transistors

Abstract

A method provides a structure that includes dual-gated metal-oxide semiconducting field effect transistor (MOSFET). The dual-gated MOSFET can be fabricated according to current CMOS processing techniques. The method includes forming a body region of the dual-gated MOSFET as a fully depleted structure. The structure includes two gates which are positioned on opposite sides of the opposing sides of the body region. Further, the structure operates as one device where the threshold voltage of one gate depends on the bias of the other gate. Thus, the structure yields a small signal component in analog circuit applications which depends on the product of the signals applied to the gates, and not simply one which depends on the sum of the two signals.

Claims

1. A method of fabricating a transistor on a substrate, the method comprising:

forming a first source/drain region on the substrate;

vertically forming a body region on the first source/drain region as a fully depleted structure,

forming a second source/drain region on the body region to form a column on the substrate, the body region having opposing sidewall surfaces on the column;

forming a first gate on a first one of the opposing sidewall surfaces after forming the column, the first gate separated from the first one of the opposing sidewall surfaces by a first oxide layer; and

forming a second gate on a second one of the opposing sidewall surfaces after forming the column, the second gate separated from the second one of the opposing sidewall surfaces by a second oxide layer, wherein vertically forming the body region includes vertically growing an epitaxial layer such that the body region is formed having a width and a doping concentration such that a threshold voltage is substantially independent of bulk charge in the body region in transistor operation.

2. The method of claim 1, wherein fabricating a transistor includes fabricating the transistor on a p-type bulk silicon substrate.

3. The method of claim 1, wherein forming the body region includes forming the body region having a thickness of less than 0.2 microns.

4. The method of claim 1, wherein forming the transistor includes forming the body region having a thickness of about 0.4 microns.

5. The method of claim 1, wherein forming the first source/drain region includes forming the first source/drain region using ion implantation.

6. The method of claim 1, wherein forming the first source/drain region includes vertically growing an epitaxial layer.

7. The method of claim 1, wherein forming the first source/drain region includes using ion implantation and includes vertically growing an epitaxial layer.

8. The method of claim 1, wherein the method further includes forming an insulating layer between the first source/drain region and the substrate.

9. The method of claim 1, wherein forming a body region includes forming the body region such that the body region is not formed across surfaces other than a surface of the first source/drain region.

10. The method of claim 1, vertically growing an epitaxial layer such that the body region is formed having a width and a doping concentration such that a threshold voltage is substantially independent of bulk charge in the body region in transistor operation includes forming the body region with a width and doping such that a threshold voltage is insensitive to fluctuations in the doping concentration.

11. A method of fabricating a transistor on a substrate, the method comprising:

forming a first source/drain region on the substrate;

vertically forming a body region on the first source/drain region;

forming a second source/drain region on the body region to form a column on the substrate, the body realon having opposing sidewall surfaces on the column;

forming a first gate on a first one of the opposing sidewall surfaces after forming the column, the first gate separated from the first one of the opposing sidewall surfaces by a first oxide layer; and

forming a second gate on a second one of the opposing sidewall surfaces after forming the column, the second gate separated from the second one of the opposing sidewall surfaces by a second oxide layer, wherein vertically forming the body region includes vertically growing an epitaxial layer such that the body region is formed as a single crystalline structure having a width and a doping concentration such that a threshold voltage of the transistor is substantially independent of bulk charge in the body region in transistor operation, and the body region, the first gate, and the second gate are formed such that biasing the first and the second gates fully depletes the body region.

12. The method of claim 11, wherein the method further includes forming an insulating layer between the first source/drain region and the substrate.

13. A method of fabricating a transistor on a substrate, the method comprising:

forming a first conductivity type first source/drain region on the substrate;

vertically forming a second conductivity type body region on the first source/drain layer,

forming a first conductivity type second source/drain region on the body region layer to form a column on the substrate, the body region having opposing sidewall surfaces on the column;

forming a first gate on a first one of the opposing sidewall surfaces after forming the column, the first gate separated from the first one of the opposing sidewall surfaces by a first oxide layer; and

forming a second gate on a second one of the opposing sidewall surfaces after forming the column, the second gate separated from the second one of the opposing sidewall surfaces by a second oxide layer, wherein vertically forming the body region includes vertically growing an epitaxial layer such that the body region is formed as a fully depleted structure with a single crystalline structure having a width and a doping concentration such that a threshold voltage of the transistor is substantially independent of bulk charge in the body region in transistor operation.

14. The method of claim 13, wherein forming a first conductivity type first source/drain region includes vertically growing a p-type epitaxial layer.

15. The method of claim 13, wherein forming a first conductivity type first source/drain region includes vertically growing an n-type epitaxial layer.

16. The method of claim 13, wherein vertically forming a second conductivity type body region includes forming, wherein forming the second conductivity type body region having a thickness of less than 0.2 microns.

17. The method of claim 13, wherein the method further includes forming an insulating layer between the first conductivity type first source/drain region and the substrate.

18. A method of fabricating a transistor on a substrate, the method comprising:

vertically growing an n-type epitaxial first source/drain region on the substrate;

vertically forming a second conductivity type body region on the first source/drain layer as a fully depleted structure;

vertically growing an n-type epitaxial second source/drain region on the body region layer to form a column on the substrate, the body region having opposing sidewall surfaces on the column;

forming a first gate on a first one of the opposing sidewall surfaces after forming the column, the second gate separated from the first one of the opposing sidewall surfaces by a first oxide layer; and

forming a second gate on a second one of the opposing sidewall surfaces after forming the column, the second gate separated from the second one of the opposing sidewall surfaces by a second oxide layer, wherein vertically forming the body region includes vertically growing an epitaxial layer such that the body region is formed as a fully depleted structure with a single crystalline structure having a width and a doping concentration such that a threshold voltage is substantially independent of bulk charge in the body region in transistor operation.

19. The method of claim 18, wherein the method further includes forming an insulating layer between the n-type epitaxial first source/drain region and the substrate.

20. A method of fabricating a transistor on a substrate, the method comprising:

forming an isolated vertical device region extending outwardly from the substrate, the isolated vertical device region formed as a region of semiconductor material;

forming a body region in the vertical device region extending outwardly from the substrate, wherein vertically forming the body region includes forming the body region with opposing sidewall surfaces;

forming a first source/drain region adjacent to the body region;

forming a second source/drain region adjacent to the body region;

forming a first gate on a first one of the opposing sidewall surfaces separated from the first one of the opposing sidewall surfaces by a first oxide layer; and

forming a second gate on a second one of the opposing sidewall surfaces separated from the second one of the opposing sidewall surfaces by a second oxide layer, the body region, the first and second source/drain regions, and the first and second gates being formed after forming the isolated vertical device region, wherein vertically forming the body region includes forming the body region as a fully depleted structure with a single crystalline structure having a width and a doping concentration such that a threshold voltage is substantially independent of bulk charge in the body region in transistor operation.

21. The method of claim 20, wherein fabricating a transistor on a substrate includes fabricating the transistor on an insulator layer.

22. The method of claim 20, wherein forming a first source/drain region adjacent to the body region includes encasing a portion of the body region with Arsenic silicate glass (ASG) and annealing the ASG.

23. The method of claim 22, wherein encasing a portion of the body region with Arsenic silicate glass (ASG) includes depositing the ASG using chemical vapor deposition (CVD).

24. The method of claim 20, wherein forming a first source/drain region adjacent to the body region includes encasing a portion of the body region with Borosilicate silicate glass (BSG) and includes annealing the BSG.

25. The method of claim 24, wherein encasing a portion of the body region with Borosilicate silicate glass (BSG) includes depositing the BSG using chemical vapor deposition (CVD).

26. The method of claim 20, wherein forming a first source/drain region adjacent to the body region includes forming the first source/drain region on the substrate and along the body region.

27. The method of claim 20, wherein forming a first source/drain region adjacent to the body region and forming a second source/drain region adjacent to the body region includes forming the first source/drain region adjacent and the second source/drain region on a common level on the substrate.

28. A method of fabricating a transistor on a substrate, the method comprising:

forming an isolated vertical device region extending outwardly from the substrate, the isolated vertical device region formed as a region of semiconductor material;

vertically forming a body region in the vertical device region extending outwardly from the substrate, and wherein vertically forming the body region includes forming the body region with opposing sidewall surfaces;

forming a first source/drain region adjacent to the body region, wherein forming the first source/drain region adjacent to the body region includes encasing a portion of the body region with Arsenic silicate glass (ASG) and annealing the ASG;

forming a second source/drain region adjacent to the body region, wherein forming the second source/drain region adjacent to the body region includes encasing a portion of the body region with Arsenic silicate glass (ASG) and annealing the ASG;

forming a first gate on a first one of the opposing sidewall surfaces separated from the first one of the opposing sidewall surfaces by a first oxide layer; and

forming a second gate on a second one of the opposing sidewall surfaces separated from the second one of the opposing sidewall surfaces by a second oxide layer, the body region, the first and second source/drain regions, and the first and second gates being formed after forming the isolated vertical device region, wherein vertically forming the body region includes forming the body region as a fully depleted structure with a single crystalline structure having a width and a doping concentration such that a threshold voltage is substantially independent of bulk charge in the body region in transistor operation.

29. The method of claim 28, wherein forming a first source/drain region adjacent to the body region includes forming a first source/drain region adjacent to the body region includes forming the first source/drain region on the substrate and along the body region.

30. The method of claim 28, wherein forming a first source/drain region adjacent to the body region and forming a second source/drain region adjacent to the body region includes forming the first source/drain region adjacent and the second source/drain region on a common level on the substrate.

31. The method of claim 28, wherein the method further includes forming an insulating layer between the body region and the substrate.

32. A method of forming a dual-gated transistor on a substrate, comprising:

forming a first source/drain region on the substrate;

vertically forming a body region with a fully depleted structure on the first source/drain region,

forming a second source/drain region on the body region to form a column on the substrate;

forming a first gate on a first one of opposing sidewall surfaces of the body region after forming the column, the first gate separated from the first one of the opposing sidewall surfaces by a first oxide layer; and

forming a second gate on a second one of the opposing sidewall surfaces after forming the column, the second gate separated from the second one of the opposing sidewall surfaces by a second oxide layer, wherein vertically farming the body region includes vertically growing an epitaxial layer such that the body region is formed as a single crystalline structure having a width and a doping concentration such that a threshold voltage for the transistor depends only on a thickness of the first and second oxides and the width of the body region.

33. The method of claim 32, including fabricating the dual-gated transistor on a p-type bulk silicon substrate.

34. The method of claim 32, including forming the body region, the first gate, and the second gate such that biasing the first and the second gates fully depletes the body region.

35. The method of claim 32, including forming the first source/drain region using ion implantation.

36. The method of claim 32, wherein forming the first source/drain region includes vertically growing an epitaxial layer.

37. The method of claim 32, wherein forming the first source/drain region includes using ion implantation and includes vertically growing an epitaxial layer.

38. The method of claim 32, wherein the method further includes forming an insulating layer between the body region and the substrate.