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Micromirror array having reduced gap between adjacent micromirrors of the micromirror array

  • US 6,965,468 B2
  • Filed: 07/24/2003
  • Issued: 11/15/2005
  • Est. Priority Date: 07/03/2003
  • Status: Expired due to Term
First Claim
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1. A spatial light modulator, comprising:

  • an array of movable mirror plates formed on a substrate for selectively reflecting a light beam incident on the mirror plates, wherein adjacent mirror plates have a gap from 0.15 to 0.5 micrometers when the adjacent mirror plates are parallel to the substrate;

    wherein each mirror plate has an area; and

    wherein a ratio of a summation of all areas of the mirror plates to an area of the substrate is 90 percent or more.

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