Single mode VCSEL
First Claim
1. A vertical cavity surface emitting laser, comprising:
- a bottom distributed Bragg reflector;
an active region over said bottom distributed Bragg reflector;
a top distributed Bragg reflector over said active region; and
a metallic contact between said active region and said top distributed Bragg reflector, wherein the top and bottom distributed Bragg reflectors define at least a minimum distance over which photons resonate within the vertical cavity surface emitting laser.
8 Assignments
0 Petitions
Accused Products
Abstract
A VCSEL having a metallic heat spreading layer adjacent a semiconductor buffer layer containing an insulating structure. The heat spreading layer includes an opening that enables light emitted by an active region to reflect from a distributed Bragg reflector (DBR) top mirror located above the heat spreading layer. A substrate is below the active region. A lower contact provides electrical current to that substrate. The lower contact includes an opening that enables light emitted from the active region to reflect from a distributed Bragg reflector (DBR) lower mirror. Beneficially, the substrate includes a slot that enables light to pass through an opening in the lower contact. That slot acts as an alignment structure that enables optical alignment of an external feature to the VCSEL.
-
Citations
24 Claims
-
1. A vertical cavity surface emitting laser, comprising:
- a bottom distributed Bragg reflector;
an active region over said bottom distributed Bragg reflector;
a top distributed Bragg reflector over said active region; and
a metallic contact between said active region and said top distributed Bragg reflector, wherein the top and bottom distributed Bragg reflectors define at least a minimum distance over which photons resonate within the vertical cavity surface emitting laser. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
- a bottom distributed Bragg reflector;
-
23. A method of forming a vertical cavity surface emitting laser, comprising:
-
forming a bottom distributed Bragg reflector on a substrate;
producing an active region on a substrate;
forming a metallic contact over part of the active region; and
forming a top distributed Bragg reflector over the active region, wherein the metallic contact is between the active region and the top distributed Bragg reflector, and wherein the top and bottom distributed Bragg reflectors define at least a minimum distance over which photons resonate within the vertical cavity surface emitting laser.
-
-
24. A vertical cavity surface emitting laser, comprising:
-
a first distributed Bragg reflector;
a second distributed Bragg reflector;
an active region located between said first and said second Bragg reflector; and
a top metallic contact between a portion of said active region and said second distributed Bragg reflector, wherein said first and second distributed Bragg reflectors define at least a minimum distance over which photons resonate within the vertical cavity surface emitting laser.
-
Specification