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Semiconductor light emitting device and fabrication method thereof

  • US 6,967,353 B2
  • Filed: 01/14/2003
  • Issued: 11/22/2005
  • Est. Priority Date: 01/18/2002
  • Status: Expired due to Term
First Claim
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1. A semiconductor light emitting device comprising:

  • a crystal layer formed on a substrate, said crystal layer having a tilt crystal plane tilted from the principal plane of said substrate; and

    a first conductive type layer, an active layer, and a second conductive type layer, which are formed on said crystal layer in such a manner as to extend within planes parallel to said tilt crystal plane;

    wherein said device has a shape formed by removing an apex and its vicinity, the apex including portions of the first conductive type layer, the active layer, the second conductive type layer, and said crystal layer structure formed on said substrate, and wherein the apex is removed such that there remains a substantially planar surface that is generally parallel to the substrate.

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