Network-based photomask data entry interface and instruction generator for manufacturing photomasks

• US 6,968,530 B2
• Filed: 09/08/2003
• Issued: 11/22/2005
• Est. Priority Date: 07/05/2000
• Status: Expired due to Fees

• Current Assignee: Toppan Photomasks Incorporated (TOPPAN Holdings, Inc.)
• Original Assignee: Toppan Photomasks Incorporated (TOPPAN Holdings, Inc.)
• Inventors: Cogdell, Thomas T., Gentry, Jan E., Schepp, Jeffry S.
• Primary Examiner(s): Lin, Sun James
• Application Number:
  US10/657,648
• Publication Number:
  US 20040054982A1
• Time in Patent Office: 806 Days
• Field of Search: 716/19, 716/21, 700/121
• US Class Current: 700/121
• CPC Class Codes: G03F 1/00 Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
• CPC Class Codes: G03F 1/68 Preparation processes not covered by groups G03F1/20 - G03F1/50
• CPC Class Codes: G06Q 30/02 Marketing; Price estimation or determination; Fundraising
• CPC Class Codes: G06Q 30/04 Billing or invoicing
• CPC Class Codes: G06Q 30/0603 Catalogue ordering
• CPC Class Codes: G06Q 50/04 Manufacturing
• CPC Class Codes: H01J 2237/31762 Computer and memory organisation
• CPC Class Codes: Y02P 90/30 Computing systems specially adapted for manufacturing

Abstract

A computer network for generating instructions for photomask manufacturing equipment, based on photomask specification data input by a customer. A series of order entry screens are downloaded to a remote customer'"'"'s computer, typically via an internet connection. The customer is prompted to enter photomask specification data, which is delivered to computing equipment on the manufacturer'"'"'s local network. The manufacturer'"'"'s computing equipment validates the photomask specification data, and uses this data to generate fracturing instructions and equipment control instructions. The fracturing instructions, together with pattern design data from the customer, are delivered to a fracture engine, which provides fractured pattern data. The control instructions and the fractured pattern data may then be electronically delivered to the manufacturing equipment.

Claims

1. A computer network for generating instructions for use by photomask manufacturing equipment, comprising:

a computer accessible to a remote customer computer via a network connection, and during the network connection, the computer operable to receive photomask specification data and design data from the remote customer computer;

a database in communication with the computer, operable to store the photomask specification data and the design data;

a command generator in communication with the photomask specification database, the command generator operable to generate fracturing instructions and control instructions based on the photomask specification data; and

a fracture engine that uses the fracturing instructions and the design data to generate fractured pattern data.

2. The network of claim 1, further comprising the computer operable to receive the design data from the remote customer computer in an electronic format.

3. The network of claim 2, further comprising the computer operable to receive the design data and the photomask specification data during a single network connection.

4. The network of claim 1, further comprising the command generator operable to deliver the control instructions to a data storage device accessible by the photomask manufacturing equipment.

5. The network of claim 1, further comprising the fracture engine operable to deliver the fractured pattern data to a data storage device accessible by the photomask manufacturing equipment.

6. The network of claim 1, wherein the database comprises:

a specification database operable to store the photomask specification data; and

a customer design database operable to store the design data.

7. The network of claim 1, wherein the computer network comprises a local area network that includes the computer and the database.

8. The network of claim 1, wherein the computer receives the photomask specification data and the design data from the customer computer via an internet connection.

9. A method for generating instructions for use by photomask manufacturing equipment, comprising:

providing a network connection between a computer and a remote customer computer;

receiving, at the computer, photomask specification data and design data from the remote customer computer via the network connection;

storing the photomask specification data and the design data in a database;

generating fracturing instructions and control instructions based on the photomask specification data using a command generator in communication with the database; and

generating fractured pattern data from the fracturing instructions and the design data using a fracture engine.

10. The method of claim 9, further comprising receiving the design data from the remote customer computer in electronic form.

11. The method of claim 9, further comprising receiving the design data and the photomask specification data during a single network connection.

12. The method of claim 9, further comprising delivering the control instructions to a data storage device accessible by the photomask manufacturing equipment.

13. The method of claim 9, further comprising delivering the fractured pattern data to a data storage device accessible by the photomask manufacturing equipment.

14. The method of claim 9, wherein the database comprises:

a specification database operable to store the photomask specification data; and

a customer design database operable to store the design data.

15. The method of claim 9, wherein the network connection comprises an internet connection.

16. A method for automatically generating instructions for use by photomask manufacturing equipment, comprising:

receiving photomask specification data in an electronic format from a customer computer; and

in response to receiving the photomask specification data from the customer computer, automatically performing operations including;

storing the photomask specification data;

generating fracture instructions;

generating equipment instructions from the fracture instructions; and

electronically transmitting the equipment instructions to the photomask manufacturing equipment.

17. The method of claim 16, further comprising receiving pattern design data from a customer computer.

18. The method of claim 17, wherein the pattern design data comprises customer circuit design data.

19. The method of claim 17, wherein the operation of receiving pattern design data comprises receiving the pattern design data from the customer computer via file transfer protocol (FTP).

20. The method of claim 16, wherein the operation of generating fracture instructions comprises using a fracture engine to generate fractured pattern data based on the fracture instructions.

21. The method of claim 20, further comprising receiving the pattern design data at the fracture engine for use in generating the fractured pattern data.

22. The method of claim 16, further comprising generating control instructions based on the photomask specification data, wherein the control instructions specify where and how patterns are to be written on a photomask.

23. The method of claim 16, wherein the equipment instructions comprise fractured pattern data and control instructions.

24. The method of claim 16, wherein the equipment instructions comprise data to be used by the photomask manufacturing equipment to produce a photomask for each layer of an integrated circuit.

25. The method of claim 16, wherein the operation of electronically transmitting the equipment instructions to the photomask manufacturing equipment comprises electronically transmitting the equipment instructions to photomask writing tools.

26. The method of claim 16, wherein the manufacturing equipment comprises computer-controlled lithography equipment.

27. A method for generating instructions for use by photomask writing tools comprising:

receiving, at a computer, photomask specification data in an electronic format from a customer computer; and

in response to receiving the photomask specification data, automatically performing operations comprising;

storing the photomask specification data in a database; and

generating a job deck for photomask writing tools based on the photomask specification data.