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Method of detecting a fault condition in a micro-electromechanical device

  • US 6,969,142 B2
  • Filed: 09/27/2004
  • Issued: 11/29/2005
  • Est. Priority Date: 06/30/1999
  • Status: Expired due to Fees
First Claim
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1. A method of detecting a fault condition in a micro-electromechanical device, the method comprising the steps of:

  • applying at least one current pulse to an actuator of the device such that the actuator is cyclically displaced at least once;

    determining an extent of displacement of the actuator;

    calibrating the device by determining a relationship between an operational parameter and said displacement; and

    testing the device by applying said parameter to the device, such that an error is detectable where said relationship is not achieved;

    wherein the step of determining the extent of displacement of the actuator includes the step of generating an electrical signal when the actuator is displaced to said extent; and

    wherein the step of generating the electrical signal includes the step of establishing a switch that is operable upon displacement of the actuator to direct the current from the actuator to processing circuitry upon displacement of the actuator to said extent, such that a switch contact is positioned to correspond with said extent of displacement.

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