Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization

• US 6,969,297 B2
• Filed: 02/13/2001
• Issued: 11/29/2005
• Est. Priority Date: 08/31/1999
• Status: Expired due to Fees

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Moore, Scott E.
• Primary Examiner(s): RACHUBA, MAURINA T
• Application Number:
  US09/782,892
• Publication Number:
  US 20010006870A1
• Time in Patent Office: 1,750 Days
• Field of Search: 451/5, 451/41, 451/56, 451/9, 451/10, 451/99, 451285-290, 451/443, 451/444
• US Class Current: 451/5
• CPC Class Codes: B24B 49/006 taking regard of the speed
• CPC Class Codes: B24B 49/16 taking regard of the load
• CPC Class Codes: B24B 53/017 Devices or means for dressing, cleaning or otherwise conditioning lapping tools
• CPC Class Codes: B24B 53/12 Dressing tools; Holders therefor

Abstract

A method and apparatus for conditioning and monitoring a planarizing medium used for planarizing a microelectronic substrate. In one embodiment, the apparatus can include a conditioning body having a conditioning surface that engages a planarizing surface of the planarizing medium and is movable relative to the planarizing medium. A force sensor is coupled to the conditioning body to detect a frictional force imparted to the conditioning body by the planarizing medium when the conditioning body and the planarizing medium are moved relative to each other. The apparatus can further include a feedback device that controls the motion, position, or force between the conditioning body and the planarizing medium to control the conditioning of the planarizing medium.

Claims

1. An apparatus for monitoring conditioning of a planarizing medium used for planarizing a microelectronic substrate, comprising:

a conditioning body having a conditioning surface configured to engage a planarizing surface of the planarizing medium, at least one of the conditioning body and the planarizing medium being movable relative to the other of the conditioning body and the planarazing medium to condition the planarizing surface;

a first support member having first and second ends and being rotatably coupled toward the first end to the conditioning body, the second end of the first support member extending away from the conditioning body;

a sensor coupled to the conditioning body to detect a frictional force in a plane of the planarizing surface, the frictional force being imparted to the conditioning body by the planarizing medium when the one of the conditioning body and the planarizing medium is moved relative to the other of the conditioning body and the planarizing medium;

a second support member coupled at a pivotable coupling to the first support member toward the second end of the first support member, the sensor being positioned between the first and second support members, the first support member being pivotable relative to the second support member to transmit a force to the sensor corresponding to the frictional force;

a piston; and

a cylinder having an open end and a closed end, the cylinder slidably receiving the piston, at least one of the piston and the cylinder being coupled to the conditioning body to slide relative to the other of the piston and the cylinder under the influence of the frictional force on the conditioning body, the piston and the cylinder defining a gap between an end of the piston and the closed end of the cylinder, the sensor including a gauge positioned to measure movement of the one of the piston and the cylinder relative to the other of the piston and the cylinder.

2. The apparatus of claim 1 wherein the planarizing medium includes a polishing pad.

3. The apparatus of claim 1 wherein the conditioning body has a conditioning surface generally parallel to the planarizing surface.

4. The apparatus of claim 1 wherein the conditioning body includes abrasive elements for abrading the planarizing surface of the planarizing medium.

5. The apparatus of claim 1 wherein the sensor includes a force sensor.

6. The apparatus of claim 1, further comprising an actuator coupled to the conditioning body for controlling at least one of a position of the conditioning body and an approximately normal force between the conditioning body and the planarizing medium, the actuator being coupled to the sensor to receive signals from the sensor and adjust the one of the position and the approximately normal force in response to the signal.

7. The apparatus of claim 1 wherein the piston is sealably engaged with the cylinder.

8. The apparatus of claim 1, further comprising a biasing member coupled to the cylinder and the piston to bias the piston toward or away from the cylinder.

9. The apparatus of claim 1 wherein the gauge includes a pointer on one of the piston and the cylinder and a scale on the other of the piston and the cylinder, the pointer being aligned with the scale and movable relative to the scale to indicate relative movement between the piston and the cylinder.

10. An apparatus for measuring forces during conditioning of a chemical-mechanical planarizing surface, comprising:

a planarizing medium having a planarizing surface for removing material from a microelectronic substrate, the planarizing surface defining a planarizing surface plane;

a conditioning body adjacent to the planarizing medium, at least one of the conditioning body and the planarizing medium being movable relative to the other of the conditioning body and the planarizing medium for conditioning the planarizing surface, the conditioning body and the planarizing medium generating a force in the planarizing surface plane when the one of the conditioning body and the planarizing medium moves relative to the other of the conditioning body and the planarizing medium;

a first support member having first and second ends and being rotatably coupled toward the first end to the conditioning body, the second end of the first support member extending away from the conditioning body;

a second support member coupled at a pivotable coupling to the first support member toward the second end of the first support member, the sensor being positioned between the first and second support members, the first support member being pivotable relative to the second support member to transmit a force to the sensor corresponding to the drag force;

a sensor operatively coupled to the conditioning body to detect the force;

a piston; and

a cylinder having an open end and a closed end, the cylinder slidably receiving the piston, at least one of the piston and the cylinder being coupled to the conditioning body to slide relative to the other of the piston and the cylinder under the influence of the force on the conditioning body, the piston and the cylinder defining a gap between an end of the piston and the closed end of the cylinder, the force sensor including a gauge positioned to measure movement of the piston relative to the cylinder.

11. The apparatus of claim 10 wherein the planarizing medium includes a polishing pad.

12. The apparatus of claim 10 wherein the conditioning body has a conditioning surface generally parallel to the planarizing surface.

13. The apparatus of claim 10 wherein the conditioning body is rotatable relative to the planarizing medium.

14. The apparatus of claim 10 wherein the conditioning body is translatable relative to the planarizing medium.

15. The apparatus of claim 10 wherein the planarizing medium is rotatable relative to the conditioning body.

16. The apparatus of claim 10 wherein the sensor includes a force sensor.

17. The apparatus of claim 10 wherein the piston is sealable engaged with the cylinder.

18. The apparatus of claim 10, further comprising a biasing member coupled to the cylinder and the piston to bias the piston toward or away from the cylinder.

19. The apparatus of claim 10, further comprising a feedback device coupled to the sensor and the conditioning body for changing at least one of the force between the conditioning body and the polishing pad and a position of the conditioning body relative to the polishing pad in response to a signal from the sensor.

20. An apparatus for monitoring conditioning of a planarizing medium used for chemical-mechanical planarization of a microelectronic substrate, comprising:

a conditioning body having a conditioning surface configured to engage a planarizing surface of the planarizing medium, at least one of the conditioning body and the planarizing medium being movable relative to the other of the conditioning body and the planarizing medium to condition the planarizing surface, the conditioning body generating a drag force generally parallel to the planarizing surface;

a piston;

a cylinder having an open end and a closed end, the cylinder slidably receiving the piston, at least one of the piston and the cylinder being coupled to the conditioning body to slide relative to the other of the piston and the cylinder under the influence of the force on the conditioning body, the piston and the cylinder defining a gap between an end of the piston and the closed end of the cylinder, the sensor being positioned to detect relative motion between the piston and the cylinder;

an actuator coupled to the conditioning body with a support assembly to control at least one of a generally normal force between the conditioning body and the planarizing medium and a position of the conditioning body relative to the planarizing medium;

a sensor coupled to the support assembly to detect the drag force; and

a feedback device coupled to the actuator to control activation of the actuator in response to a signal received from the force sensor.

21. The apparatus of claim 20 wherein the feedback device includes a microprocessor.

22. The apparatus of claim 20 wherein the actuator is positioned to move the conditioning body laterally over the planarizing surface.

23. The apparatus of claim 20 wherein the actuator is positioned to rotate the conditioning body in a generally circular motion over the planarizing surface.

24. The apparatus of claim 20 wherein the planarizing medium includes a polishing pad.

25. The apparatus of claim 20, further comprising:

a first support member having first and second ends and being rotatably coupled toward the first end to the conditioning body, the second end of the first support member extending away from the conditioning body; and

a second support member coupled at a pivotable coupling to the first support member toward the second end of the first support member, the sensor being positioned between the first and second support members, the first support member being pivotable relative to the second support member to transmit a force to the sensor corresponding to the drag force.

26. The apparatus of claim 20 wherein the sensor includes a force sensor.

27. The apparatus of claim 20 wherein the piston is sealably engaged with the cylinder and the sensor includes a pressure gauge positioned within the gap to detect a change in pressure in the gap when one of the piston and the cylinder moves relative to the other.

28. The apparatus of claim 20, further comprising a biasing member coupled to the cylinder and the piston to bias the piston toward or away from the cylinder.

29. A method for monitoring conditioning of a planarizing medium used for planarizing a microelectronic substrate, comprising:

moving at least one of the planarizing medium and a conditioning body relative to the other of the planarizing medium and the conditioning body while the conditioning body is engaged with a planarizing surface of the planarizing medium, wherein the conditioning body is coupled to a support member for supporting the conditioning body relative to the planarizing medium, the support member including a generally upwardly extending portion coupled to the conditioning body and a generally laterally extending portion pivotably coupled to the upwardly extending portion, further wherein the support member includes a piston slidably received in a cylinder;

monitoring the conditioning body to detect a force of the planarizing medium on the conditioning body, wherein monitoring the conditioning body includes measuring a force transmitted to the support member by the conditioning body by detecting a movement of one of the piston and the cylinder relative to the other of the piston and the cylinder.

30. The method of claim 29 wherein monitoring the conditioning body includes detecting a frictional force on the conditioning body in a plane generally parallel to a plane of the planarizing surface.

31. The method of claim 29, further comprising biasing one of the piston and the cylinder toward or away from the other of the piston and the cylinder.

32. The method of claim 29 wherein the support member includes a piston slidably and sealably received in a cylinder to form a sealed space between an end of the cylinder and an end of the piston, further wherein monitoring the conditioning body includes detecting a pressure within the sealed space.

33. The method of claim 29, further comprising removing material from the planarizing medium while at least one of the conditioning body and the planarizing medium moves relative to the other of the conditioning body and the planarizing medium.

34. The method of claim 29, further comprising adjusting a force applied to the conditioning body approximately normal to the planarizing surface in response to detecting a force of the planarizing medium on the conditioning body.

35. The method of claim 29 wherein moving at least one of the planarizing medium and the conditioning body includes rotating the planarizing medium at a variable rate as the conditioning body moves across the planarizing medium to maintain a relative velocity between the planarizing medium and the conditioning body at an approximately constant value.

36. A method for monitoring conditioning of a planarizing medium used for planarizing a microelectronic substrate, the method comprising:

coupling a sensor to a conditioning body, wherein the conditioning body is coupled to a support member for supporting the conditioning body relative to the planarizing medium, and the support member includes a piston slidably received in a cylinder;

engaging the conditioning body with the planarizing medium and moving at least one of the conditioning body and the planarizing medium relative to the other of the conditioning body and the planarizing medium while the conditioning body engages the planarizing medium; and

monitoring the conditioning body to detect a frictional force between the conditioning body and the planarizing medium, wherein monitoring the conditioning body includes measuring a force transmitted to the support member by the conditioning body by detecting a movement of one of the piston and the cylinder relative to the other of the piston and the cylinder.

37. The method of claim 36 wherein the support member includes a piston slidably and sealably received in a cylinder to form a sealed space between an end of the cylinder and an end of the piston, further wherein monitoring the conditioning body includes detecting a pressure within the sealed space.

38. A method for conditioning a planarizing medium used for planarizing a semiconductor substrate, the method comprising:

engaging a conditioning body with the planarizing medium, wherein the conditioning body is coupled to a support member for supporting the conditioning body relative to the planarizing medium, and further wherein the support member includes a generally upwardly extending portion coupled to the conditioning body and a generally laterally extending portion pivotably coupled to the upwardly extending portion;

moving at least one of the conditioning body and the planarizing medium relative to the other of the conditioning body and the planarizing medium to remove material from the planarizing medium; and

maintaining an approximately constant frictional force between the conditioning body and the planarizing medium by adjusting a relative velocity between the conditioning body and the planarizing medium, wherein maintaining an approximately constant frictional force includes selecting a target frictional force, detecting a force between the upwardly extending portion and the laterally extending portion coupled to the conditioning body, and adjusting the relative velocity until the force is approximately equal to the target frictional force, and further wherein measuring a force transmitted to the support member includes detecting a force between the upwardly extending portion and the laterally extending portion with a force sensor.

39. The method of claim 38 wherein the support member includes a generally upwardly extending portion coupled to the conditioning body and a generally laterally extending portion pivotably coupled to the upwardly extending portion, further wherein detecting the force includes detecting a force between the upwardly extending portion and the laterally extending portion with a force sensor.

40. The method of claim 38 wherein the support member includes a piston slidably received in a cylinder and detecting the force includes detecting a movement of one of the piston and the cylinder relative to the other of the piston and the cylinder.

41. An apparatus for monitoring conditioning of a planarizing medium used for planarizing a microelectronic substrate, comprising:

a conditioning body having a conditioning surface configured to engage a planarizing surface of the planarizing medium, at least one of the conditioning body and the planarizing medium being movable relative to the other of the conditioning body and the planarizing medium to condition the planarizing surface;

a sensor coupled to the conditioning body to detect a frictional force in a plane of the planarizing surface, the frictional force being imparted to the conditioning body by the planarizing medium when the one of the conditioning body and the planarizing medium is moved relative to the other of the conditioning body and the planarizing medium;

a piston; and

a cylinder having an open end and a closed end, the cylinder sealable and slidably receiving the piston, at least one of the piston and the cylinder being coupled to the conditioning body to slide relative to the other of the piston and the cylinder under the influence of the frictional force on the conditioning body, the piston and the cylinder defining a sealed gap between an end of the piston and the closed end of the cylinder, the sensor being positioned within the gap for measuring a change in pressure within the gap as the piston moves relative to the cylinder.

42. The apparatus of claim 41 wherein the planarizing medium includes a polishing pad.

43. The apparatus of claim 41 wherein the conditioning body has a conditioning surface generally parallel to the planarizing surface.

44. The apparatus of claim 41 wherein the conditioning body includes abrasive elements for abrading the planarizing surface of the planarizing medium.

45. The apparatus of claim 41, further comprising:

a first support member having first and second ends and being rotatably coupled toward the first end to the conditioning body, the second end of the first support member extending away from the conditioning body; and

a second support member coupled at a pivotable coupling to the first support member toward the second end of the first support member, the sensor being positioned between the first and second support members, the first support member being pivotable relative to the second support member to transmit a force to the sensor corresponding to the frictional force.

46. The apparatus of claim 41 wherein the sensor includes a force sensor.

47. The apparatus of claim 41, further comprising an actuator coupled to the conditioning body for controlling at least one of a position of the conditioning body and an approximately normal force between the conditioning body and the planarizing medium, the actuator being coupled to the sensor to receive signals from the sensor and adjust the one of the position and the approximately normal force in response to the signal.

48. The apparatus of claim 41 wherein the piston has a generally circular cross-sectional shape and the cylinder has an aperture with a generally circular cross-sectional shape for receiving the piston.

49. The apparatus of claim 41 wherein the piston has a generally rectangular cross-sectional shape and the cylinder has an aperture with a generally rectangular cross-sectional shape for receiving the piston.

50. The apparatus of claim 41 wherein the piston is sealably engaged with the cylinder.

51. The apparatus of claim 41, further comprising a biasing member coupled to the cylinder and the piston to bias the piston toward or away from the cylinder.

52. An apparatus for monitoring conditioning of a planarizing medium used for planarizing a microelectronic substrate, comprising:

a conditioning body having a conditioning surface configured to engage a planarizing surface of the planarizing medium, at least one of the conditioning body and the planarizing medium being movable relative to the other of the conditioning body and the planarizing medium to condition the planarizing surface;

a sensor coupled to the conditioning body to detect a frictional force in a plane of the planarizing surface, the frictional force being imparted to the conditioning body by the planarizing medium when the one of the conditioning body and the planarizing medium is moved relative to the other of the conditioning body and the planarizing medium;

a piston; and

a cylinder having an open end and a closed end, the cylinder sealably and slidably receiving the piston, at least one of the piston and the cylinder being coupled to the conditioning body to slide relative to the other of the piston and the cylinder under the influence of the frictional force on the conditioning body, wherein the piston has a generally circular cross-sectional shape and the cylinder has an aperture with a generally circular cross-sectional shape for receiving the piston, and further wherein the piston and the cylinder define a sealed gap between an end of the piston and the closed end of the cylinder, the sensor being positioned within the gap for measuring a change in pressure within the gap as the piston move relative to the cylinder.

53. The apparatus of claim 52 wherein the planarizing medium includes a polishing pad.

54. The apparatus of claim 52 wherein the conditioning body has a conditioning surface generally parallel to the planarizing surface.

55. The apparatus of claim 52 wherein the conditioning body includes abrasive elements for abrading the planarizing surface of the planarizing medium.

56. The apparatus of claim 52, further comprising:

a first support member having first and second ends and being rotatably coupled toward the first end to the conditioning body, the second end of the first support member extending away from the conditioning body; and

a second support member coupled at a pivotable coupling to the first support member toward the second end of the first support member, the sensor being positioned between the first and second support members, the first support member being pivotable relative to the second support member to transmit a force to the sensor corresponding to the frictional force.

57. The apparatus of claim 52 wherein the sensor includes a force sensor.

58. The apparatus of claim 52, further comprising an actuator coupled to the conditioning body for controlling at least one of a position of the conditioning body and an approximately normal force between the conditioning body and the planarizing medium, the actuator being coupled to the sensor to receive signals from the sensor and adjust the one of the position and the approximately normal force in response to the signal.

59. The apparatus of claim 52 wherein the piston is sealably engaged with the cylinder.

60. The apparatus of claim 52, further comprising a biasing member coupled to the cylinder and the piston to bias the piston toward or away from the cylinder.

61. An apparatus for monitoring conditioning of a planarizing medium used for planarizing a microelectronic substrate, comprising:

a conditioning body having a conditioning surface configured to engage a planarizing surface of the planarizing medium, at least one of the conditioning body and the planarizing medium being movable relative to the other of the conditioning body and the planarizing medium to condition the planarizing surface;

a sensor coupled to the conditioning body to detect a frictional force in a plane of the planarizing surface, the frictional force being imparted to the conditioning body by the planarizing medium when the one of the conditioning body and the planarizing medium is moved relative to the other of the conditioning body and the planarizing medium;

a piston; and

a cylinder having an open end and a closed end, the cylinder sealably and slidably receiving the piston, at least one of the piston and the cylinder being coupled to the conditioning body to slide relative to the other of the piston and the cylinder under the influence of the frictional force on the conditioning body, the piston and the cylinder defining a sealed gap between an end of the piston and the closed end of the cylinder, wherein the piston has a generally rectangular cross-sectional shape and the cylinder has an aperture with a generally rectangular cross-sectional shape for receiving the piston, and further wherein the sensor being positioned within the gap for measuring a change in pressure within the gap as the piston moves relative to the cylinder.

62. The apparatus of claim 61 wherein the planarizing medium includes a polishing pad.

63. The apparatus of claim 61 wherein the conditioning body has a conditioning surface generally parallel to the planarizing surface.

64. The apparatus of claim 61 wherein the conditioning body includes abrasive elements for abrading the planarizing surface of the planarizing medium.

65. The apparatus of claim 61, further comprising:

a first support member having first and second ends and being rotatably coupled toward the first end to the conditioning body, the second end of the first support member extending away from the conditioning body; and

a second support member coupled at a pivotable coupling to the first support member toward the second end of the first support member, the sensor being positioned between the first and second support members, the first support member being pivotable relative to the second support member to transmit a force to the sensor corresponding to the frictional force.

66. The apparatus of claim 61 wherein the sensor includes a force sensor.

67. The apparatus of claim 61, further comprising an actuator coupled to the conditioning body for controlling at least one of a position of the conditioning body and an approximately normal force between the conditioning body and the planarizing medium, the actuator being coupled to the sensor to receive signals from the sensor and adjust the one of the position and the approximately normal force in response to the signal.

68. The apparatus of claim 61 wherein the piston is sealably engaged with the cylinder.

69. The apparatus of claim 61, further comprising a biasing member coupled to the cylinder and the piston to bias the piston toward or away from the cylinder.

70. An apparatus for monitoring conditioning of a planarizing medium used for planarizing a microelectronic substrate, comprising:

a conditioning body having a conditioning surface configured to engage a planarizing surface of the planarizing medium, at least one of the conditioning body and the planarizing medium being movable relative to the other of the conditioning body and the planarizing medium to condition the planarizing surface;

a sensor coupled to the conditioning body to detect a frictional force in a plane of the planarizing surface, the frictional force being imparted to the conditioning body by the planarizing medium when the one of the conditioning body and the planarizing medium is moved relative to the other of the conditioning body and the planarizing medium;

a piston; and

a cylinder having an open end and a closed end, the cylinder slidably receiving the piston, at least one of the piston and the cylinder being coupled to the conditioning body to slide relative to the other of the piston and the cylinder under the influence of the frictional force on the conditioning body, the piston and the cylinder defining a gap between an end of the piston and the closed end of the cylinder, the sensor including a gauge positioned to measure movement of the one of the piston and the cylinder relative to the other of the piston and the cylinder.

71. The apparatus of claim 70 wherein the planarizing medium includes a polishing pad.

72. The apparatus of claim 70 wherein the conditioning body has a conditioning surface generally parallel to the planarizing surface.

73. The apparatus of claim 70 wherein the conditioning body includes abrasive elements for abrading the planarizing surface of the planarizing medium.

74. The apparatus of claim 70, further comprising:

a first support member having first and second ends and being rotatably coupled toward the first end to the conditioning body, the second end of the first support member extending away from the conditioning body; and

a second support member coupled at a pivotable coupling to the first support member toward the second end of the first support member, the sensor being positioned between the first and second support members, the first support member being pivotable relative to the second support member to transmit a force to the sensor corresponding to the frictional force.

75. The apparatus of claim 70 wherein the sensor includes a force sensor.

76. The apparatus of claim 70, further comprising an actuator coupled to the conditioning body for controlling at least one of a position of the conditioning body and an approximately normal force between the conditioning body and the planarizing medium, the actuator being coupled to the sensor to receive signals from the sensor and adjust the one of the position and the approximately normal force in response to the signal.

77. The apparatus of claim 70 wherein the piston is sealably engaged with the cylinder.

78. The apparatus of claim 70, further comprising a biasing member coupled to the cylinder and the piston to bias the piston toward or away from the cylinder.

79. The apparatus of claim 70 wherein the gauge includes a pointer on one of the piston and the cylinder and a scale on the other of the piston and the cylinder, the pointer being aligned with the scale and movable relative to the scale to indicate relative movement between the piston and the cylinder.

80. An apparatus for monitoring conditioning of a planarizing medium used for planarizing a microelectronic substrate, comprising:

a conditioning body having a conditioning surface configured to engage a planarizing surface of the planarizing medium, at least one of the conditioning body and the planarizing medium being movable relative to the other of the conditioning body and the planarizing medium to condition the planarizing surface;

a sensor coupled to the conditioning body to detect a frictional force in a plane of the planarizing surface, the frictional force being imparted to the conditioning body by the planarizing medium when the one of the conditioning body and the planarizing medium is moved relative to the other of the conditioning body and the planarizing medium;

a piston; and

a cylinder having an open end and a closed end, the cylinder slidably receiving the piston, at least one of the piston and the cylinder being coupled to the conditioning body to slide relative to the other of the piston and the cylinder under the influence of the frictional force on the conditioning body, the piston and the cylinder defining a gap between an end of the piston and the closed end of the cylinder, wherein the piston is sealably engaged with the cylinder and further wherein the sensor includes a gauge positioned to measure movement of the one of the piston and the cylinder relative to the other of the piston and the cylinder.

81. The apparatus of claim 80 wherein the planarizing medium includes a polishing pad.

82. The apparatus of claim 80 wherein the conditioning body has a conditioning surface generally parallel to the planarizing surface.

83. The apparatus of claim 80 wherein the conditioning body includes abrasive elements for abrading the planarizing surface of the planarizing medium.

84. The apparatus of claim 80, further comprising:

a first support member having first and second ends and being rotatably coupled toward the first end to the conditioning body, the second end of the first support member extending away from the conditioning body; and

a second support member coupled at a pivotable coupling to the first support member toward the second end of the first support member, the sensor being positioned between the first and second support members, the first support member being pivotable relative to the second support member to transmit a force to the sensor corresponding to the frictional force.

85. The apparatus of claim 80 wherein the sensor includes a force sensor.

86. The apparatus of claim 80, further comprising an actuator coupled to the conditioning body for controlling at least one of a position of the conditioning body and an approximately normal force between the conditioning body and the planarizing medium, the actuator being coupled to the sensor to receive signals from the sensor and adjust the one of the position and the approximately normal force in response to the signal.

87. The apparatus of claim 80 wherein the piston has a generally circular cross-sectional shape and the cylinder has an aperture with a generally circular cross-sectional shape for receiving the piston.

88. The apparatus of claim 80 wherein the piston has a generally rectangular cross-sectional shape and the cylinder has an aperture with a generally rectangular cross-sectional shape for receiving the piston.

89. The apparatus of claim 80 wherein the piston is sealably engaged with the cylinder.

90. The apparatus of claim 80, further comprising a biasing member coupled to the cylinder and the piston to bias the piston toward or away from the cylinder.

91. The apparatus of claim 80 wherein the gauge includes a pointer on one of the piston and the cylinder and a scale on the other of the piston and the cylinder, the pointer being aligned with the scale and movable relative to the scale to indicate relative movement between the piston and the cylinder.

92. An apparatus for monitoring conditioning of a planarizing medium used for planarizing a microelectronic substrate, comprising:

a conditioning body having a conditioning surface configured to engage a planarizing surface of the planarizing medium, at least one of the conditioning body and the planarizing medium being movable relative to the other of the conditioning body and the planarizing medium to condition the planarizing surface;

a sensor coupled to the conditioning body to detect a frictional force in a plane of the planarizing surface, the frictional force being imparted to the conditioning body by the planarizing medium when the one of the conditioning body and the planarizing medium is moved relative to the other of the conditioning body and the planarizing medium;

a piston;

a cylinder having an open end and a closed end, the cylinder slidably receiving the piston, at least one of the piston and the cylinder being coupled to the conditioning body to slide relative to the other of the piston and the cylinder under the influence of the frictional force on the conditioning body, the piston and the cylinder defining a gap between an end of the piston and the closed end of the cylinder, the sensor including a gauge positioned to measure movement of the one of the piston and the cylinder relative to the other of the piston and the cylinder; and

a biasing member coupled to the cylinder and the piston to bias the piston toward or away from the cylinder.

93. The apparatus of claim 92 wherein the planarizing medium includes a polishing pad.

94. The apparatus of claim 92 wherein the conditioning body has a conditioning surface generally parallel to the planarizing surface.

95. The apparatus of claim 92 wherein the conditioning body includes abrasive elements for abrading the planarizing surface of the planarizing medium.

96. The apparatus of claim 92, further comprising:

a first support member having first and second ends and being rotatably coupled toward the first end to the conditioning body, the second end of the first support member extending away from the conditioning body; and

a second support member coupled at a pivotable coupling to the first support member toward the second end of the first support member, the sensor being positioned between the first and second support members, the first support member being pivotable relative to the second support member to transmit a force to the sensor corresponding to the frictional force.

97. The apparatus of claim 92 wherein the sensor includes a force sensor.

98. The apparatus of claim 92, further comprising an actuator coupled to the conditioning body for controlling at least one of a position of the conditioning body and an approximately normal force between the conditioning body and the planarizing medium, the actuator being coupled to the sensor to receive signals from the sensor and adjust the one of the position and the approximately normal force in response to the signal.

99. The apparatus of claim 92 wherein the piston has a generally circular cross-sectional shape and the cylinder has an aperture with a generally circular cross-sectional shape for receiving the piston.

100. The apparatus of claim 92 wherein the piston has a generally rectangular cross-sectional shape and the cylinder has an aperture with a generally rectangular cross-sectional shape for receiving the piston.

101. The apparatus of claim 92 wherein the piston is sealably engaged with the cylinder.

102. The apparatus of claim 92 wherein the gauge includes a pointer on one of the piston and the cylinder and a scale on the other of the piston and the cylinder, the pointer being aligned with the scale and movable relative to the scale to indicate relative movement between the piston and the cylinder.

103. An apparatus for monitoring conditioning of a planarizing medium used for planarizing a microelectronic substrate, comprising:

a conditioning body having a conditioning surface configured to engage a planarizing surface of the planarizing medium, at least one of the conditioning body and the planarizing medium being movable relative to the other of the conditioning body and the planarizing medium to condition the planarizing surface;

a sensor coupled to the conditioning body to detect a frictional force in a plane of the planarizing surface, the frictional force being imparted to the conditioning body by the planarizing medium when the one of the conditioning body and the planarizing medium is moved relative to the other of the conditioning body and the planarizing medium;

a piston; and

a cylinder having an open end and a closed end, the cylinder slidably receiving the piston, at least one of the piston and the cylinder being coupled to the conditioning body to slide relative to the other of the piston and the cylinder under the influence of the frictional force on the conditioning body, the piston and the cylinder defining a gap between an end of the piston and the closed end of the cylinder, the sensor including a gauge positioned to measure movement of the one of the piston and the cylinder relative to the other of the piston and the cylinder, wherein the gauge includes a pointer on one of the piston and the cylinder and a scale on the other of the piston and the cylinder, the pointer being aligned with the scale and movable relative to the scale to indicate relative movement between the piston and the cylinder.

104. The apparatus of claim 103 wherein the planarizing medium includes a polishing pad.

105. The apparatus of claim 103 wherein the conditioning body has a conditioning surface generally parallel to the planarizing surface.

106. The apparatus of claim 103 wherein the conditioning body includes abrasive elements for abrading the planarizing surface of the planarizing medium.

107. The apparatus of claim 103, further comprising:

a first support member having first and second ends and being rotatably coupled toward the first end to the conditioning body, the second end of the first support member extending away from the conditioning body; and

a second support member coupled at a pivotable coupling to the first support member toward the second end of the first support member, the sensor being positioned between the first and second support members, the first support member being pivotable relative to the second support member to transmit a force to the sensor corresponding to the frictional force.

108. The apparatus of claim 103 wherein the sensor includes a force sensor.

109. The apparatus of claim 103, further comprising an actuator coupled to the conditioning body for controlling at least one of a position of the conditioning body and an approximately normal force between the conditioning body and the planarizing medium, the actuator being coupled to the sensor to receive signals from the sensor and adjust the one of the position and the approximately normal force in response to the signal.

110. The apparatus of claim 103 wherein the piston has a generally circular cross-sectional shape and the cylinder has an aperture with a generally circular cross-sectional shape for receiving the piston.

111. The apparatus of claim 103 wherein the piston has a generally rectangular cross-sectional shape and the cylinder has an aperture with a generally rectangular cross-sectional shape for receiving the piston.

112. The apparatus of claim 103 wherein the piston is sealably engaged with the cylinder.

113. The apparatus of claim 103, further comprising a biasing member coupled to the cylinder and the piston to bias the piston toward or away from the cylinder.

114. An apparatus for measuring forces during conditioning of a chemical-mechanical planarizing surface, comprising:

a planarizing medium having a planarizing surface for removing material from a microelectronic substrate, the planarizing surface defining a planarizing surface plane;

a conditioning body adjacent to the planarizing medium, at least one of the conditioning body and the planarizing medium being movable relative to the other of the conditioning body and the planarizing medium for conditioning the planarizing surface, the conditioning body and the planarizing medium generating a force in the planarizing medium moves relative to the other of the conditioning body and the planarizing medium;

a piston;

a cylinder having an open end and a closed end, the cylinder slidably receiving the piston, at least one of the piston and the cylinder being coupled to the conditioning body to slide relative to the other of the piston and the cylinder under the influence of the force on the conditioning body, the piston and the cylinder defining a gap between an end of the piston and the closed end of the cylinder; and

a sensor operatively coupled to the conditioning body to detect the force;

the sensor including a gauge positioned to measure movement of the piston relative to the cylinder.

115. The apparatus of claim 114 wherein the planarizing medium includes a polishing pad.

116. The apparatus of claim 114 wherein the conditioning body has a conditioning surface generally parallel to the planarizing surface.

117. The apparatus of claim 114 wherein the conditioning body is rotatable relative to the planarizing medium.

118. The apparatus of claim 114 wherein the conditioning body is translatable relative to the planarizing medium.

119. The apparatus of claim 114 wherein the planarizing medium is rotatable relative to the conditioning body.

120. The apparatus of claim 114 wherein the force is a drag force, further comprising:

a first support member having first and second ends and being rotatably coupled toward the first end to the conditioning body, the second end of the first support member extending away from the conditioning body; and

a second support member coupled at a pivotable coupling to the first support member toward the second end of the first support member, the sensor being positioned between the first and second support members, the first support member being pivotable relative to the second support member to transmit a force to the sensor corresponding to the drag force.

121. The apparatus of claim 114 wherein the sensor includes a force sensor.

122. The apparatus of claim 114 wherein the piston is sealably engaged with the cylinder.

123. The apparatus of claim 114, further comprising a biasing member coupled to the cylinder and the piston to bias the piston toward or away from the cylinder.

124. The apparatus of claim 114, further comprising a feedback device coupled to the sensor and the conditioning body for changing at least one of the force between the conditioning body and the polishing pad and a position of the conditioning body relative to the polishing pad in response to a signal from the sensor.

125. An apparatus for measuring forces during conditioning of a chemical-mechanical planarizing surface, comprising:

a planarizing medium having a planarizing surface for removing material from a microelectronic substrate, the planarizing surface defining a planarizing surface plane;

a conditioning body adjacent to the planarizing medium, at least one of the conditioning body and the planarizing medium being movable relative to the other of the conditioning body and the planarizing medium for conditioning the planarizing surface, the conditioning body and the planarizing medium generating a force in the planarizing surface plane when the one of the conditioning body and the planarizing medium moves relative to the other of the conditioning body and the planarizing medium;

a piston;

a cylinder having an open end and a closed end, the cylinder slidably receiving the piston, at least one of the piston and the cylinder being coupled to the conditioning body to slide relative to the other of the piston and the cylinder under the influence of the force on the conditioning body, the piston and the cylinder defining a gap between an end of the piston and the closed end of the cylinder, wherein the piston is sealable engaged with the cylinder; and

a sensor operatively coupled to the conditioning body to detect the force, the sensor including a gauge positioned to measure movement of the piston relative to the cylinder.

126. The apparatus of claim 125 wherein the planarizing medium includes a polishing pad.

127. The apparatus of claim 125 wherein the conditioning body has a conditioning surface generally parallel to the planarizing surface.

128. The apparatus of claim 125 wherein the conditioning body is rotatable relative to the planarizing medium.

129. The apparatus of claim 125 wherein the conditioning body is translatable relative to the planarizing medium.

130. The apparatus of claim 125 wherein the planarizing medium is rotatable relative to the conditioning body.

131. The apparatus of claim 125 wherein the force is a drag force, further comprising:

a first support member having first and second ends and being rotatably coupled toward the first end to the conditioning body, the second end of the first support member extending away from the conditioning body; and

a second support member coupled at a pivotable coupling to the first support member toward the second end of the first support member, the sensor being positioned between the first and second support members, the first support member being pivotable relative to the second support member to transmit a force to the sensor corresponding to the drag force.

132. The apparatus of claim 125 wherein the sensor includes a force sensor.

133. The apparatus of claim 125, further comprising a biasing member coupled to the cylinder and the piston to bias the piston toward or away from the cylinder.

134. The apparatus of claim 125, further comprising a feedback device coupled to the sensor and the conditioning body for changing at least one of the force between the conditioning body and the polishing pad and a position of the conditioning body relative to the polishing pad in response to a signal from the sensor.

135. An apparatus for measuring forces during conditioning of a chemical-mechanical planarizing surface, comprising:

a planarizing medium having a planarizing surface for removing material from a microelectronic substrate, the planarizing surface defining a planarizing surface plane;

a conditioning body adjacent to the planarizing medium, at least one of the conditioning body and the planarizing medium being movable relative to the other of the conditioning body and the planarizing medium for conditioning the planarizing surface, the conditioning body and the planarizing medium generating a force in the planarizing surface plane when the one of the conditioning body and the planarizing medium moves relative to the other of the conditioning body and the planarizing medium;

a piston;

a cylinder having an open end and a closed end, the cylinder slidably receiving the piston, at least one of the piston and the cylinder being coupled to the conditioning body to slide relative to the other of the piston and the cylinder under the influence of the force on the conditioning body, the piston and the cylinder defining a gap between an end of the piston and the closed end of the cylinder;

a biasing member coupled to the cylinder and the piston to bias the piston toward or away from the cylinder; and

a sensor operatively coupled to the conditioning body to detect the force, the sensor including a gauge positioned to measure movement of the piston relative to the cylinder.

136. The apparatus of claim 135 wherein the planarizing medium includes a polishing pad.

137. The apparatus of claim 135 wherein the conditioning body has a conditioning surface generally parallel to the planarizing surface.

138. The apparatus of claim 135 wherein the conditioning body is rotatable relative to the planarizing medium.

139. The apparatus of claim 135 wherein the conditioning body is translatable relative to the planarizing medium.

140. The apparatus of claim 135 wherein the planarizing medium is rotatable relative to the conditioning body.

141. The apparatus of claim 135 wherein the force is a drag force, further comprising:

a first support member having first and second ends and being rotatably coupled toward the first end to the conditioning body, the second end of the first support member extending away from the conditioning body; and

a second support member coupled at a pivotable coupling to the first support member toward the second end of the first support member, the sensor being positioned between the first and second support members, the first support member being pivotable relative to the second support member to transmit a force to the sensor corresponding to the drag force.

142. The apparatus of claim 135 wherein the sensor includes a force sensor.

143. The apparatus of claim 135 wherein the piston is sealably engaged with the cylinder.

144. The apparatus of claim 135, further comprising a feedback device coupled to the sensor and the conditioning body for changing at least one of the force between the conditioning body and the polishing pad and a position of the conditioning body relative to the polishing pad in response to a signal from the sensor.

145. An apparatus for monitoring conditioning of a planarizing medium used for chemical-mechanical planarization of a microelectronic substrate, comprising:

a conditioning body having a conditioning surface configured to engage a planarizing surface of the planarizing medium, at least one of the conditioning body and the planarizing medium being movable relative to the other of the conditioning body and the planarizing medium to condition the planarizing surface, the conditioning body generating a drag force generally parallel to the planarizing surface;

a piston;

a cylinder having an open end and a closed end, the cylinder slidably receiving the piston, at least one of the piston and the cylinder being coupled to the conditioning body to slide relative to the other of the piston and the cylinder under the influence of the force on the conditioning body, the piston and the cylinder defining a gap between an end of the piston and the closed end of the cylinder, wherein the piston is sealably engaged with the cylinder;

an actuator coupled to the conditioning body with a support assembly to control at least one of a generally normal force between the conditioning body and the planarizing medium and a position of the conditioning body relative to the planarizing medium;

a sensor coupled to the support assembly to detect the drag force, the sensor including a pressure gauge positioned within the gap to detect a change in pressure in the gap when one of the piston and the cylinder moves relative to the other, the sensor is positioned to detect relative motion between the piston and the cylinder; and

a feedback device coupled to the actuator to control activation of the actuator in response to a signal received from the force sensor.

146. The apparatus of claim 145 wherein the feedback device includes a microprocessor.

147. The apparatus of claim 145 wherein the actuator is positioned to move the conditioning body laterally over the planarizing surface.

148. The apparatus of claim 145 wherein the actuator is positioned to rotate the conditioning body in a generally circular motion over the planarizing surface.

149. The apparatus of claim 145 wherein the planarizing medium includes a polishing pad.

150. The apparatus of claim 145, further comprising:

a first support member having first and second ends and being rotatably coupled toward the first end to the conditioning body, the second end of the first support member extending away from the conditioning body; and

a second support member coupled at a pivotable coupling to the first support member toward the second end of the first support member, the sensor being positioned between the first and second support members, the first support member being pivotable relative to the second support member to transmit a force to the sensor corresponding to the drag force.

151. The apparatus of claim 145 wherein the sensor includes a force sensor.

152. The apparatus of claim 145, further comprising a biasing member coupled to the cylinder and the piston to bias the piston toward or away from the cylinder.

153. An apparatus for monitoring conditioning of a planarizing medium used for chemical-mechanical planarization of a microelectronic substrate, comprising:

a conditioning body having a conditioning surface configured to engage a planarizing surface of the planarizing medium, at least one of the conditioning body and the planarizing medium being movable relative to the other of the conditioning body and the planarizing medium to condition the planarizing surface, the conditioning body generating a drag force generally parallel to the planarizing surface;

a piston;

a cylinder having an open end and a closed end, the cylinder slidably receiving the piston, at least one of the piston and the cylinder being coupled to the conditioning body to slide relative to the other of the piston and the cylinder under the influence of the force on the conditioning body, the piston and the cylinder defining a gap between an end of the piston and the closed end of the cylinder defining a gap between an end of the piston and the closed end of the cylinder,

an actuator coupled to the conditioning body with a support assembly to control at least one of a generally normal force between the conditioning body and the planarizing medium and a position of the conditioning body relative to the planarizing medium;

a sensor coupled to the support assembly to detect the drag force, the sensor being positioned to detect relative motion between the piston and the cylinder;

a feedback device coupled to the actuator to control activation of the actuator in response to a signal received from the force sensor; and

a biasing member coupled to the cylinder and the piston to bias the piston toward or away from the cylinder.

154. The apparatus of claim 153 wherein the feedback device includes a microprocessor.

155. The apparatus of claim 153 wherein the actuator is positioned to move the conditioning body laterally over the planarizing surface.

156. The apparatus of claim 153 wherein the actuator is positioned to rotate the conditioning body in a generally circular motion over the planarizing surface.

157. The apparatus of claim 153 wherein the planarizing medium includes a polishing pad.

158. The apparatus of claim 153, further comprising:

a first support member having first and second ends and being rotatably coupled toward the first end to the conditioning body, the second end of the first support member extending away from the conditioning body; and

a second support member coupled at a pivotable coupling to the first support member toward the second end of the first support member, the sensor being positioned between the first and second support members, the first support member being pivotable relative to the second support member to transmit a force to the sensor corresponding to the drag force.

159. The apparatus of claim 153 wherein the sensor includes a force sensor.

160. The apparatus of claim 153 wherein the piston is sealably engaged with the cylinder and the sensor includes a pressure gauge positioned within the gap to detect a change in pressure in the gap when one of the piston and the cylinder moves relative to the other.

161. A method for monitoring conditioning of a planarizing medium used for planarizing a microelectronic substrate, comprising:

moving at least one of the planarizing medium and a conditioning body relative to the other of the planarizing medium and the conditioning body while the conditioning body is engaged with a planarizing surface of the planarizing medium, wherein the conditioning body is coupled to a support member for supporting the conditioning body relative to the planarizing medium, the support member including a piston slidably received in a cylinder; and

monitoring the conditioning body to detect a force of the planarizing medium on the conditioning body, wherein monitoring the conditioning body includes measuring a force transmitted to the support member by the conditioning body by detecting a movement of one of the piston and the cylinder relative to the other of the piston and the cylinder.

162. The method of claim 161 wherein monitoring the conditioning body includes detecting a frictional force on the conditioning body in a plane generally parallel to a plane of the planarizing surface.

163. The method of claim 161 wherein the support member includes a generally upwardly extending portion coupled to the conditioning body and a generally laterally extending portion pivotably coupled to the upwardly extending portion, further wherein monitoring the conditioning body includes detecting a force between the upwardly extending portion and the laterally extending portion with a force sensor.

164. The method of claim 161, further comprising biasing one of the piston and the cylinder toward or away from the other of the piston and the cylinder.

165. The method of claim 161 wherein the support member includes a piston slidably and sealably received in a cylinder to form a sealed space between an end of the cylinder and an end of the piston, further wherein monitoring the conditioning body includes detecting a pressure within the sealed space.

166. A method for monitoring conditioning of a planarizing medium used for planarizing a microelectronic substrate, comprising:

moving at least one of the planarizing medium and a conditioning body relative to the other of the planarizing medium and the conditioning body while the conditioning body is engaged with a planarizing surface of the planarizing medium, wherein the conditioning body is coupled to a support member for supporting the conditioning body relative to the planarizing medium, the support member including a piston slidably received in a cylinder;

biasing one of the piston and the cylinder toward or away from the other of the piston and the cylinder; and

monitoring the conditioning body to detect a force of the planarizing medium on the conditioning body, wherein monitoring the conditioning body includes measuring a force transmitted to the support member by the conditioning body by detecting a movement of one of the piston and the cylinder relative to the other of the piston and the cylinder.

167. The method of claim 166 wherein monitoring the conditioning body includes detecting a frictional force on the conditioning body in a plane generally parallel to a plane of the planarizing surface.

168. The method of claim 166 wherein the support member includes a generally upwardly extending portion coupled to the conditioning body and a generally laterally extending portion pivotably coupled to the upwardly extending portion, further wherein monitoring the conditioning body includes detecting a force between the upwardly extending portion and the laterally extending portion with a force sensor.

169. The method of claim 166 wherein the support member includes a piston slidably and sealably received in a cylinder to form a sealed space between an end of the cylinder and an end of the piston, further wherein monitoring the conditioning body includes detecting a pressure within the sealed space.

170. A method for monitoring conditioning of a planarizing medium used for planarizing a microelectronic substrate, comprising:

moving at least one of the planarizing medium and a conditioning body relative to the other of the planarizing medium and the conditioning body while the conditioning body is engaged with a planarizing surface of the planarizing medium, wherein the conditioning body is coupled to a support member for supporting the conditioning body relative to the planarizing medium, the support member including a piston slidably and sealably received in a cylinder to form a sealed space between an end of the cylinder and an end of the piston; and

monitoring the conditioning body to detect a force of the planarizing medium on the conditioning body, wherein monitoring the conditioning body includes measuring a force transmitted to the support member by the conditioning body by detecting a pressure within the sealed space.

171. The method of claim 170 wherein monitoring the conditioning body includes detecting a frictional force on the conditioning body in a plane generally parallel to a plane of the planarizing surface.

172. The method of claim 170 wherein the support member includes a generally upwardly extending portion coupled to the conditioning body and a generally laterally extending portion pivotably coupled to the upwardly extending portion, further wherein monitoring the conditioning body includes detecting a force between the upwardly extending portion and the laterally extending portion with a force sensor.

173. The method of claim 170 wherein the support member includes a piston slidably received in a cylinder and monitoring the conditioning body includes detecting a movement of one of the piston and the cylinder relative to the other of the piston and the cylinder.

174. The method of claim 170, further comprising biasing one of the piston and the cylinder toward or away from the other of the piston and the cylinder.

175. A method for monitoring conditioning of a planarizing medium used for planarizing a microelectronic substrate, the method comprising:

coupling a sensor to a conditioning body, wherein the conditioning body is coupled to a support member for supporting the conditioning body relative to the planarizing medium, and further wherein the support member includes a piston slidably and sealably received in a cylinder to form a sealed space between an end of the cylinder and an end of the piston;

engaging the conditioning body with the planarizing medium and moving at least one of the conditioning body and the planarizing medium relative to the other of the conditioning body and the planarizing medium while the conditioning body engages the planarizing medium; and

monitoring the conditioning body to detect a frictional force between the conditioning body and the planarizing medium, wherein monitoring the conditioning body includes measuring a force transmitted to the support member by the conditioning body by detecting a pressure within the sealed space.

176. The method of claim 175 wherein monitoring the conditioning body further includes detecting a movement of one of the piston and the cylinder relative to the other of the piston and the cylinder.

177. A method for conditioning a planarizing medium used for planarizing a semiconductor substrate, the method comprising:

engaging a conditioning body with the planarizing medium, wherein the conditioning body is coupled to a support member for supporting the conditioning body relative to the planarizing medium, the support member including a piston slidably received in a cylinder;

moving at least one of the conditioning body and the planarizing medium relative to the other of the conditioning body and the planarizing medium to remove material from the planarizing medium; and

maintaining an approximately constant frictional force between the conditioning body and the planarizing medium by adjusting a relative velocity between the conditioning body and the planarizing medium, wherein maintaining an approximately constant frictional force includes selecting a target frictional force, detecting a force between the conditioning body and the planarizing medium and adjusting the relative velocity until the force is approximately equal to the target frictional force, wherein detecting the force includes measuring a force transmitted to the support member by the conditioning body by detecting a movement of one of the piston and the cylinder relative to the other of the piston and the cylinder.

178. The method of claim 177 wherein the support member includes a generally upwardly extending portion coupled to the conditioning body and a generally laterally extending portion pivotally coupled to the upwardly extending portion, further wherein detecting the force includes detecting a force between the upwardly extending portion and the laterally extending portion with a force sensor.

179. An apparatus for monitoring conditioning of a planarizing medium used for planarizing a microelectronic substrate, comprising:

a conditioning body having a conditioning surface configured to engage a planarizing surface of the planarizing medium, at least one of the conditioning body and the planarizing medium being movable relative to the other of the conditioning body and the planarizing medium to condition the planarizing surface;

a first support member having first and second ends and being rotatably coupled toward the first end to the conditioning body, the second end of the first support member extending away from the conditioning body;

a sensor coupled to the conditioning body to detect a frictional force in a plane of the planarizing surface, the frictional force being imparted to the conditioning body by the planarizing medium when the one of the conditioning body and the planarizing medium is moved relative to the other of the conditioning body and the planarizing medium;

a second support member coupled at a pivotable coupling to the first support member toward the second end of the first support member, the sensor being positioned between the first and second support members, the first support member being pivotable relative to the second support member to transmit a force to the sensor corresponding to the frictional force;

a piston; and

a cylinder having an open end and a closed end, the cylinder slidably and sealably engaging the piston, at least one of the piston and the cylinder being coupled to the conditioning body to slide relative to the other of the piston and the cylinder under the influence of the frictional force on the conditioning body, the piston and the cylinder defining a gap between an end of the piston and the closed end of the cylinder, the sensor including a gauge positioned to measure movement of the one of the piston and the cylinder relative to the other of the piston and the cylinder.

180. The apparatus of claim 179 wherein the planarizing medium includes a polishing pad.

181. The apparatus of claim 179 wherein the conditioning body has a conditioning surface generally parallel to the planarizing surface.

182. The apparatus of claim 179 wherein the conditioning body includes abrasive elements for abrading the planarizing surface of the planarizing medium.

183. The apparatus of claim 179 wherein the sensor includes a force sensor.

184. The apparatus of claim 179, further comprising an actuator coupled to the conditioning body for controlling at least one of a position of the conditioning body and an approximately normal force between the conditioning body and the planarizing medium, the actuator being coupled to the sensor to receive signals from the sensor and adjust the one of the position and the approximately normal force in response to the signal.

185. The apparatus of claim 179, further comprising a biasing member coupled to the cylinder and the piston to bias the piston toward or away from the cylinder.

186. The apparatus of claim 179 wherein the gauge includes a pointer on one of the piston and the cylinder and a scale on the other of the piston and the cylinder, the pointer being aligned with the scale and movable relative to the scale to indicate relative movement between the piston and the cylinder.

187. An apparatus for monitoring conditioning of a planarizing medium used for planarizing a microelectronic substrate, comprising:

a conditioning body having a conditioning surface configured to engage a planarizing surface of the planarizing medium, at least one of the conditioning body and the planarizing medium being movable relative to the other of the conditioning body and the planarizing medium to condition the planarizing surface;

a first support member having first and second ends and being rotatably coupled toward the first end to the conditioning body, the second end of the first support member extending away from the conditioning body;

a sensor coupled to the conditioning body to detect a frictional force in a plane of the planarizing surface, the frictional force being imparted to the conditioning body by the planarizing medium when the one of the conditioning body and the planarizing medium is moved relative to the other of the conditioning body and the planarizing medium;

a second support member coupled at a pivotable coupling to the first support member toward the second end of the first support member, the sensor being positioned between the first and second support members, the first support member being pivotable relative to the second support member to transmit a force to the sensor corresponding to the frictional force;

a piston;

a cylinder having an open end and a closed end, the cylinder slidably receiving the piston, at least one of the piston and the cylinder being coupled to the conditioning body to slide relative to the other of the piston and the cylinder under the influence of the frictional force on the conditioning body, the piston and the cylinder defining a gap between an end of the piston and the closed end of the cylinder, the sensor including a gauge positioned to measure movement of the one of the piston and the cylinder relative to the other of the piston and the cylinder; and

a biasing member coupled to the cylinder and the piston to bias the piston toward or away from the cylinder.

188. The apparatus of claim 187 wherein the planarizing medium includes a polishing pad.

189. The apparatus of claim 187 wherein the conditioning body has a conditioning surface generally parallel to the planarizing surface.

190. The apparatus of claim 187 wherein the conditioning body includes abrasive elements for abrading the planarizing surface of the planarizing medium.

191. The apparatus of claim 187 wherein the sensor includes a force sensor.

192. The apparatus of claim 187, further comprising an actuator coupled to the conditioning body for controlling at least one of a position of the conditioning body and an approximately normal force between the conditioning body and the planarizing medium, the actuator being coupled to the sensor to receive signals from the sensor and adjust the one of the position and the approximately normal force in response to the signal.

193. The apparatus of claim 187 wherein the piston is sealably engaged with the cylinder.

194. The apparatus of claim 187 wherein the gauge includes a pointer on one of the piston and the cylinder and a scale on the other of the piston and the cylinder, the pointer being aligned with the scale and movable relative to the scale to indicate relative movement between the piston and the cylinder.

195. An apparatus for monitoring conditioning of a planarizing medium used for planarizing a microelectronic substrate, comprising:

a conditioning body having a conditioning surface configured to engage a planarizing surface of the planarizing medium, at least one of the conditioning body and the planarizing medium being movable relative to the other of the conditioning body and the planarizing medium to condition the planarizing surface;

a first support member having first and second ends and being rotatably coupled toward the first end to the conditioning body, the second end of the first support member extending away from the conditioning body;

a sensor coupled to the conditioning body to detect a frictional force in a plane of the planarizing surface, the frictional force being imparted to the conditioning body by the planarizing medium when the one of the conditioning body and the planarizing medium is moved relative to the other of the conditioning body and the planarizing medium;

a second support member coupled at a pivotable coupling to the first support member toward the second end of the first support member, the sensor being positioned between the first and second support members, the first support member being pivotable relative to the second support member to transmit a force to the sensor corresponding to the frictional force;

a piston; and

a cylinder having an open end and a closed end, the cylinder slidably receiving the piston, at least one of the piston and the cylinder being coupled to the conditioning body to slide relative to the other of the piston and the cylinder under the influence of the frictional force on the conditioning body, the piston and the cylinder defining a gap between an end of the piston and the closed end of the cylinder, the sensor including a gauge positioned to measure movement of the one of the piston and the cylinder relative to the other of the piston and the cylinder, wherein the gauge includes a pointer on one of the piston and the cylinder and a scale on the other of the piston and the cylinder, the pointer being aligned with the scale and movable relative to the scale to indicate relative movement between the piston and the cylinder.

196. The apparatus of claim 195 wherein the planarizing medium includes a polishing pad.

197. The apparatus of claim 195 wherein the conditioning body has a conditioning surface generally parallel to the planarizing surface.

198. The apparatus of claim 195 wherein the conditioning body includes abrasive elements for abrading the planarizing surface of the planarizing medium.

199. The apparatus of claim 195 wherein the sensor includes a force sensor.

200. The apparatus of claim 195, further comprising an actuator coupled to the conditioning body for controlling at least one of a position of the conditioning body and an approximately normal force between the conditioning body and the planarizing medium, the actuator being coupled to the sensor to receive signals from the sensor and adjust the one of the position and the approximately normal force in response to the signal.

201. The apparatus of claim 195 wherein the piston is sealably engaged with the cylinder.

202. An apparatus for measuring forces during conditioning of a chemical-mechanical planarizing surface, comprising:

a planarizing medium having a planarizing surface for removing material from a microelectronic substrate, the planarizing surface defining a planarizing surface plane;

a conditioning body adjacent to the planarizing medium, at least one of the conditioning body and the planarizing medium being movable relative to the other of the conditioning body and the planarizing medium for conditioning the planarizing surface, the conditioning body and the planarizing medium generating a force in the planarizing surface plane when the one of the conditioning body and the planarizing medium moves relative to the other of the conditioning body and the planarizing medium;

a first support member having first and second ends and being rotatably coupled toward the first end to the conditioning body, the second end of the first support member extending away from the conditioning body;

a second support member coupled at a pivotable coupling to the first support member toward the second end of the first support member, the sensor being positioned between the first and second support members, the first support member being pivotable relative to the second support member to transmit a force to the sensor corresponding to the drag force;

a sensor operatively coupled to the conditioning body to detect the force;

a piston; and

a cylinder having an open end and a closed end, the cylinder slidably and sealably engaging the piston, at least one of the piston and the cylinder being coupled to the conditioning body to slide relative to the other of the piston and the cylinder under the influence of the force on the conditioning body, the piston and the cylinder defining a gap between an end of the piston and the closed end of the cylinder, the force sensor including a gauge positioned to measure movement of the piston relative to the cylinder.

203. The apparatus of claim 202 wherein the planarizing medium includes a polishing pad.

204. The apparatus of claim 202 wherein the conditioning body has a conditioning surface generally parallel to the planarizing surface.

205. The apparatus of claim 202 wherein the conditioning body is rotatable relative to the planarizing medium.

206. The apparatus of claim 202 wherein the conditioning body is translatable relative to the planarizing medium.

207. The apparatus of claim 202 wherein the planarizing medium is rotatable relative to the conditioning body.

208. The apparatus of claim 202 wherein the sensor includes a force sensor.

209. The apparatus of claim 202, further comprising a biasing member coupled to the cylinder and the piston to bias the piston toward or away from the cylinder.

210. The apparatus of claim 202, further comprising a feedback device coupled to the sensor and the conditioning body for changing at least one of the force between the conditioning body and the polishing pad and a position of the conditioning body relative to the polishing pad in response to a signal from the sensor.

211. An apparatus for measuring forces during conditioning of a chemical-mechanical planarizing surface, comprising:

a planarizing medium having a planarizing surface for removing material from a microelectronic substrate, the planarizing surface defining a planarizing surface plane;

a conditioning body adjacent to the planarizing medium, at least one of the conditioning body and the planarizing medium being movable relative to the other of the conditioning body and the planarizing medium for conditioning the planarizing surface, the conditioning body and the planarizing medium generating a force in the planarizing surface plane when the one of the conditioning body and the planarizing medium moves relative to the other of the conditioning body and the planarizing medium;

a first support member having first and second ends and being rotatably coupled toward the first end to the conditioning body, the second end of the first support member extending away from the conditioning body;

a second support member coupled at a pivotable coupling to the first support member toward the second end of the first support member, the sensor being positioned between the first and second support members, the first support member being pivotable relative to the second support member to transmit a force to the sensor corresponding to the drag force;

a sensor operatively coupled to the conditioning body to detect the force;

a piston;

a cylinder having an open end and a closed end, the cylinder slidably receiving the piston, at least one of the piston and the cylinder being coupled to the conditioning body to slide relative to the other of the piston and the cylinder under the influence of the force on the conditioning body, the piston and the cylinder defining a gap between an end of the piston and the closed end of the cylinder, the force sensor including a gauge positioned to measure movement of the piston relative to the cylinder; and

a biasing member coupled to the cylinder and the piston to bias the piston toward or away from the cylinder.

212. The apparatus of claim 211 wherein the planarizing medium includes a polishing pad.

213. The apparatus of claim 211 wherein the conditioning body has a conditioning surface generally parallel to the planarizing surface.

214. The apparatus of claim 211 wherein the conditioning body is rotatable relative to the planarizing medium.

215. The apparatus of claim 211 wherein the conditioning body is translatable relative to the planarizing medium.

216. The apparatus of claim 211 wherein the planarizing medium is rotatable relative to the conditioning body.

217. The apparatus of claim 211 wherein the sensor includes a force sensor.

218. The apparatus of claim 211 wherein the piston is sealably engaged with the cylinder.

219. The apparatus of claim 211, further comprising a feedback device coupled to the sensor and the conditioning body for changing at least one of the force between the conditioning body and the polishing pad and a position of the conditioning body relative to the polishing pad in response to a signal from the sensor.

220. A method for monitoring conditioning of a planarizing medium used for planarizing a microelectronic substrate, comprising:

moving at least one of the planarizing medium and a conditioning body relative to the other of the planarizing medium and the conditioning body while the conditioning body is engaged with a planarizing surface of the planarizing medium, wherein the conditioning body is coupled to a support member for supporting the conditioning body relative to the planarizing medium, the support member including a generally upwardly extending portion coupled to the conditioning body and a generally laterally extending portion pivotably coupled to the upwardly extending portion, further wherein the support member includes a piston slidably received in a cylinder;

monitoring the conditioning body to detect a force of the planarizing medium on the conditioning body, wherein monitoring the conditioning body includes measuring a force transmitted to the support member by the conditioning body by detecting a movement of one of the piston and the cylinder relative to the other of the piston and the cylinder; and

biasing one of the piston and the cylinder toward or away from the other of the piston and the cylinder.

221. The method of claim 220 wherein monitoring the conditioning body includes detecting a frictional force on the conditioning body in a plane generally parallel to a plane of the planarizing surface.

222. The method of claim 220 wherein the support member includes a piston slidably and sealably received in a cylinder to form a sealed space between an end of the cylinder and an end of the piston, further wherein monitoring the conditioning body includes detecting a pressure within the sealed space.

223. The method of claim 220, further comprising removing material from the planarizing medium while at least one of the conditioning body and the planarizing medium moves relative to the other of the conditioning body and the planarizing medium.

224. The method of claim 220, further comprising adjusting a force applied to the conditioning body approximately normal to the planarizing surface in response to detecting a force of the planarizing medium on the conditioning body.

225. The method of claim 220 wherein moving at least one of the planarizing medium and the conditioning body includes rotating the planarizing medium at a variable rate as the conditioning body moves across the planarizing medium to maintain a relative velocity between the planarizing medium and the conditioning body at an approximately constant value.

226. A method for monitoring conditioning of a planarizing medium used for planarizing a microelectronic substrate, comprising:

moving at least one of the planarizing medium and a conditioning body relative to the other of the planarizing medium and the conditioning body while the conditioning body is engaged with a planarizing surface of the planarizing medium, wherein the conditioning body is coupled to a support member for supporting the conditioning body relative to the planarizing medium, the support member including a generally upwardly extending portion coupled to the conditioning body and a generally laterally extending portion pivotably coupled to the upwardly extending portion, wherein the support member includes a piston slidably and sealably received in a cylinder to form a sealed space between an end of the cylinder and an end of the piston; and

monitoring the conditioning body to detect a force of the planarizing medium on the conditioning body, wherein monitoring the conditioning body includes measuring a force transmitted to the support member by the conditioning body by detecting a pressure within the sealed space.

227. The method of claim 226 wherein monitoring the conditioning body includes detecting a frictional force on the conditioning body in a plane generally parallel to a plane of the planarizing surface.

228. The method of claim 226 wherein the support member includes a piston slidably received in a cylinder and monitoring the conditioning body includes detecting a movement of one of the piston and the cylinder relative to the other of the piston and the cylinder.

229. The method of claim 228, further comprising biasing one of the piston and the cylinder toward or away from the other of the piston and the cylinder.

230. The method of claim 226, further comprising removing material from the planarizing medium while at least one of the conditioning body and the planarizing medium moves relative to the other of the conditioning body and the planarizing medium.

231. The method of claim 226, further comprising adjusting a force applied to the conditioning body approximately normal to the planarizing surface in response to detecting a force of the planarizing medium on the conditioning body.

232. The method of claim 226 wherein moving at least one of the planarizing medium and the conditioning body includes rotating the planarizing medium at a variable rate as the conditioning body moves across the planarizing medium to maintain a relative velocity between the planarizing medium and the conditioning body at an approximately constant value.