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Method and apparatus for reducing charge injection in control of MEMS electrostatic actuator array

  • US 6,970,031 B1
  • Filed: 05/28/2004
  • Issued: 11/29/2005
  • Est. Priority Date: 05/28/2004
  • Status: Expired due to Fees
First Claim
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1. A control circuit for a MEMS (Micro-Electro-Mechanical System) comprising:

  • a variable capacitor having a fixed plate and movable plate disposed in predetermined spatial relationship with respect to the fixed plate;

    a semiconductor switch which has a source, a drain and a gate, which is associated with a selected one of the fixed and movable plates of the capacitor and which is arranged to selectively connect the selected one of the fixed and movable plates with a voltage source; and

    a charge injection control circuit associated with the semiconductor switch which attenuates current injection into the selected one of the fixed and movable plates of the capacitor.

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