Method and apparatus for reducing charge injection in control of MEMS electrostatic actuator array
First Claim
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1. A control circuit for a MEMS (Micro-Electro-Mechanical System) comprising:
- a variable capacitor having a fixed plate and movable plate disposed in predetermined spatial relationship with respect to the fixed plate;
a semiconductor switch which has a source, a drain and a gate, which is associated with a selected one of the fixed and movable plates of the capacitor and which is arranged to selectively connect the selected one of the fixed and movable plates with a voltage source; and
a charge injection control circuit associated with the semiconductor switch which attenuates current injection into the selected one of the fixed and movable plates of the capacitor.
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Abstract
A control circuit for a MEMS (Micro-Electro-Mechanical System) has a semiconductor switch which has a source, a drain and a gate, which is associated with a selected one of spatially arranged fixed and movable plates of a variable capacitor, and is arranged to selectively connect the selected one of the fixed and movable plates with a voltage source. A charge injection control circuit is associated with the semiconductor switch and attenuates current injection into the selected one of the fixed and movable plates of the capacitor.
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Citations
20 Claims
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1. A control circuit for a MEMS (Micro-Electro-Mechanical System) comprising:
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a variable capacitor having a fixed plate and movable plate disposed in predetermined spatial relationship with respect to the fixed plate; a semiconductor switch which has a source, a drain and a gate, which is associated with a selected one of the fixed and movable plates of the capacitor and which is arranged to selectively connect the selected one of the fixed and movable plates with a voltage source; and a charge injection control circuit associated with the semiconductor switch which attenuates current injection into the selected one of the fixed and movable plates of the capacitor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A display device comprising:
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a plurality of variable capacitors each having a fixed plate and a movable plate disposed in predetermined spatial relationship with respect to the fixed plate; a plurality of semiconductor switches each associated with a selected one of the fixed and movable plates of the capacitors and which is arranged to selectively connect the selected one of the fixed and movable plates with a voltage source; and a plurality of charge injection control circuits each associated with a semiconductor switch for attenuating charge injection into the selected one of the fixed and movable plates of the respective capacitor when the semiconductor switch is closing. - View Dependent Claims (16, 17)
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18. A method of making a control circuit for a MEMS (Micro-Electro-Mechanical System) comprising:
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forming a variable capacitor having a fixed plate and movable plate disposed in predetermined spatial relationship with respect to the fixed plate; forming a semiconductor switch which has a source, a drain and a gate, which is associated with a selected one of the fixed and movable plates of the capacitor and which is arranged to selectively connect the selected one of the fixed and movable plates with a voltage source; forming a circuit associated with the semiconductor switch for attenuating current injection into the selected one of the fixed and movable plates of the capacitor, said circuit comprising; first and second semiconductor elements which are circuited with a gate of the semiconductor switches and which modify a gate signal which is applied to the gate in a manner wherein at least one of; a) a voltage variation time of the gate signal is set so that current can predominantly drain from a channel of the semiconductor switch to the source when the semiconductor switch is closing, and b) the voltage of the signal which is applied to the gate is limited to limit the degree to which the semiconductor switch enters into an inversion region and/or an accumulation region.
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19. A control circuit for a MEMS (Micro-Electro-Mechanical System) comprising:
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variable capacitor means having a fixed plate and movable plate disposed in predetermined spatial relationship with respect to the fixed plate, for operative association with and motivating an arrangement associated with the MEMS; semiconductor switch means which has a source, a drain and a gate, which is associated with a selected one of the fixed and movable plates of the capacitor for selectively connecting the selected one of the fixed and movable plates with a voltage source and for inducing a change in distance between the fixed and movable plates; circuit means associated with the semiconductor switch for attenuating current injection into the selected one of the fixed and movable plates of the capacitor. - View Dependent Claims (20)
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Specification