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Tunable planar capacitor

  • US 6,970,055 B2
  • Filed: 02/02/2004
  • Issued: 11/29/2005
  • Est. Priority Date: 04/11/2001
  • Status: Expired due to Fees
First Claim
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1. A planar tunable capacitor comprising:

  • a substrate;

    a bias electrode formed on the substrate;

    a ferro-electric layer formed over the bias electrode;

    wherein;

    the bias electrode is more narrow than the ferro-electric layer;

    a first capacitor electrode formed over the ferro-electric layer;

    a second capacitor electrode formed over the ferro-electric layer and proximate the first capacitor electrode, the first and second capacitor electrodes forming a capacitor;

    a gap defined by the capacitor electrodes, the gap consisting of non-conducting material;

    wherein the bias electrode is not electrically connected to either of the capacitor electrodes.

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