Metal coated nanocrystalline silicon as an active surface enhanced Raman spectroscopy (SERS) substrate

• US 6,970,239 B2
• Filed: 06/12/2002
• Issued: 11/29/2005
• Est. Priority Date: 06/12/2002
• Status: Expired due to Term

• Current Assignee: Intel Corporation
• Original Assignee: Intel Corporation
• Inventors: Yamakawa, Mineo, Berlin, Andrew A., Chan, Selena
• Primary Examiner(s): Evans, F. L.
• Assistant Examiner(s): GEISEL, KARA E
• Application Number:
  US10/171,357
• Publication Number:
  US 20030231304A1
• Time in Patent Office: 1,266 Days
• Field of Search: 356/301, 356/244
• US Class Current: 356/301
• CPC Class Codes: C12Q 1/6825 Nucleic acid detection involving sensors
• CPC Class Codes: C12Q 2563/155 Particles of a defined size, e.g. nanoparticles
• CPC Class Codes: C12Q 2565/632 being a surface enhanced, e.g. resonance, Raman spectrometer
• CPC Class Codes: G01J 3/44 Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
• CPC Class Codes: G01N 2021/653 Coherent methods [CARS]
• CPC Class Codes: G01N 21/658 enhancement Raman, e.g. surface plasmons

Abstract

The methods and apparatus 300 disclosed herein concern Raman spectroscopy using metal coated nanocrystalline porous silicon substrates 240, 340. In certain embodiments of the invention, porous silicon substrates 110, 210 may be formed by anodic etching in dilute hydrofluoric acid 150. A thin coating of a Raman active metal, such as gold or silver, may be coated onto the porous silicon 110, 210 by cathodic electromigration or any known technique. The metal-coated substrate 240, 340 provides an extensive, metal rich environment for SERS, SERRS, hyper-Raman and/or CARS Raman spectroscopy. In certain embodiments of the invention, metal nanoparticles may be added to the metal-coated substrate 240, 340 to further enhance the Raman signals. Raman spectroscopy may be used to detect, identify and/or quantify a wide variety of analytes, using the disclosed methods and apparatus 300.

Claims

1. A method comprising:

a) providing a crystalline porous substrate having a metal-coated contact surface;

b) exposing the contact surface to a sample comprising one or more analytes so as to capture the analytes on the contact surface of the substrate; and

c) using laser excitation and spectroscopy to detect and/or identify one or more of the analytes.

2. The method of claim 1 wherein the substrate is a porous semiconductor substrate.

3. The method of claim 2, wherein the substrate is selected from the group consisting of nanocrystalline silicon, single crystal silicon, and polycrystalline silicon.

4. The method of claim 1, wherein metal nanoparticles are added to the surface of the metal-coated substrate.

5. The method of claim 1, wherein in metal coating the contact surface comprises silver, gold, platinum, copper and/or aluminum.

6. The method of claim 1, wherein the spectroscopy is Raman spectroscopy.

7. The method of claim 6, wherein the Raman spectroscopy is surface enhanced Raman spectroscopy (SERS), surface enhanced resonance Raman spectroscopy (SERRS) hyper-Raman and/or coherent anti-Stokes Raman spectroscopy (CARS).

8. The method of claim 1, wherein the analyte is selected from the group consisting of an amino acid, peptide, polypeptide, protein, glycoprotein, lipoprotein, nucleoside, nucleotide, oligonucleotide, nucleic acid, sugar, carbohydrate, oligosaccaride, polysaccharide, fatty acid, lipid, hormone, metabolite, cytokine, chemokine, receptor, neurotransmitter, antigen, allergen, antibody, substrate, metabolite, cofactor, inhibitor, drug, pharmaceutical, nutrient, prion, toxin, poison, explosive, pesticide, chemical warfare agent, biohazardous agent, bacteria, virus, radioisotope, vitamin, heterocyclic aromatic compound, carcinogen, mutagen, narcotic, amphetamine, barbiturate, hallucinogen, waste product and contaminant.

9. The method of claim 8, wherein the analyte is a nucleoside, nucleotide, oligonucleotide, nucleic acid, amino acid, peptide, polypeptide or protein.

10. The method of claim 1, wherein the one or more analytes are labeled with one or more Raman labels.

11. The method of claim 10, wherein each analyte is labeled with a distinguishable Raman label.

12. The method of claim 3, wherein one or more capture molecules is attached to the metal-coated contact surface.

13. The method of claim 12, wherein the one or more capture molecules are selected from the group consisting of oligonucleotides, nucleic acids, antibodies, antibody fragments, antigens, epitopes, lectins, proteins, polypeptides, peptides, receptor proteins, ligands, hormones, vitamins, metabolites, substrates, inhibitors, cofactors, pharmaceuticals, aptamers, cytokines and neurotransmitters.

14. An apparatus comprising:

a) a nanocrystalline porous silicon substrate having an upper porous surface coated with a metal;

b) a laser;

c) a Raman detector; and

d) a spectrometer.

15. The apparatus of claim 14, wherein the porous silicon substrate is used as a support layer.

16. The apparatus of claim 15, wherein the support layer is replaced by a metal.

17. The apparatus of claim 14, further comprising metal nanoparticles touching the metal-coated surface.

18. The apparatus of claim 14, wherein the metal comprises silver, gold, platinum, copper and/or aluminum.

19. The apparatus of claim 14, further comprising a computer operably coupled to the Raman detector.

20. The apparatus of claim 14, further comprising a flow through cell operably coupled to the Raman detector, wherein flow passes through the nanocrystalline porous silicon substrate inside the flow through cell.

21. The apparatus of claim 14, wherein the metal-coated porous silicon substrate is incorporated into a micro-electro-mechanical system (MEMS).

22. The apparatus of claim 14, wherein the nanocrystalline silicon substrate is constructed as part of an integrated chip.

23. An apparatus of claim 20, wherein the nanocrystalline porous silicon substrate is removed from a wafer and incorporated into the MEMS.

24. The apparatus of claim 17, wherein the nanocrystalline substrate has at least one chamber or trench in the micron size range in the surface thereof.

25. The apparatus of claim 24, wherein the nanoparticles are nanoparticle aggregates or cross-linked nanoparticles.