Planar and wafer level packaging of semiconductor lasers and photo detectors for transmitter optical sub-assemblies
First Claim
1. A method for packaging a surface emitting laser, the method comprising:
- attaching a laser to a first substrate, wherein the laser emits a laser beam from a surface of the laser;
attaching a photo detector to the first substrate, wherein the photo detector receives light from the laser; and
attaching a second substrate to the first substrate, wherein the first substrate and the second substrate enclose the laser and the photo detector in a cavity,wherein one of the first substrate and the second substrate includes at least one lens element,wherein the at least one lens element is constructed and positioned with respect to the laser to shape and direct the laser beam into a light guide,wherein the step of attaching the photo detector to the substrate includes aligning the photo detector so that the photo detector receives light from an edge of the laser, andwherein the step of aligning the photo detector includes aligning the photo detector so that the photo detector receives light directly from the edge of the laser.
6 Assignments
0 Petitions
Accused Products
Abstract
A planar wafer-level packaging method is provided for a laser and a monitor photo detector. The laser and photo detector are affixed to a planar substrate. The planar substrate provides electrical connections to the components. A lens cap with a microlens is formed and affixed to the substrate with a seal. The lens cap forms a hermetically sealed cavity enclosing the laser and photo detector. The inside surface of the lens cap has a reflective coating with a central opening over the emitting aperture of the laser. The central opening has an anti-reflective coating. Light from the laser is directed and shaped by the lens cap to couple into an external light guide. Residual light from the edge of the laser reflects off the inside surface of the lens cap and is incident upon the photo detector. In an alternate method, the laser may be packaged using flip-chip assembly.
26 Citations
19 Claims
-
1. A method for packaging a surface emitting laser, the method comprising:
-
attaching a laser to a first substrate, wherein the laser emits a laser beam from a surface of the laser; attaching a photo detector to the first substrate, wherein the photo detector receives light from the laser; and attaching a second substrate to the first substrate, wherein the first substrate and the second substrate enclose the laser and the photo detector in a cavity, wherein one of the first substrate and the second substrate includes at least one lens element, wherein the at least one lens element is constructed and positioned with respect to the laser to shape and direct the laser beam into a light guide, wherein the step of attaching the photo detector to the substrate includes aligning the photo detector so that the photo detector receives light from an edge of the laser, and wherein the step of aligning the photo detector includes aligning the photo detector so that the photo detector receives light directly from the edge of the laser. - View Dependent Claims (16)
-
-
2. A method for packaging a surface emitting laser, the method comprising:
-
attaching a laser to a first substrate, wherein the laser emits a laser beam from a first edge of the laser; attaching a photo detector to the first substrate, wherein the photo detector receives light from the laser; attaching an interposer to the first substrate; and attaching a second substrate to the interposer, wherein the first substrate, the interposer, and the second substrate enclose the laser and the photo detector in a cavity and wherein the cavity is heretically sealed, wherein one of the first substrate and the second substrate includes at least one lens element, wherein the at least one lens element is constructed and positioned with respect to the laser to receive the laser beam from the first edge of the laser via reflection from an inside surface of the interposer and to shape and direct the laser beam into a light guide, wherein the step of attaching the photo detector to the first substrate includes aligning the photo detector so that the photo detector receives light directly from a second edge of the laser. - View Dependent Claims (3, 4, 17)
-
-
5. A laser assembly, comprising:
-
a first substrate, wherein the first substrate has formed therein a lens element on a top surface; a second substrate; and a laser attached to the second substrate, wherein the laser emits a laser beam through an aperture on a surface of the laser; and a photo detector attached to the second substrate, wherein the photo detector receives light from the laser, wherein the first substrate and the second substrate form a hermetically sealed cavity enclosing the laser, and wherein the lens element directs and shares the laser beam into a light guide wherein the photo detector receives light directly from an edge of the laser. - View Dependent Claims (6, 7, 18)
-
-
8. A laser assembly, comprising:
-
a first substrate; a second substrate; and a laser attached to the second substrate, wherein the laser emits a laser beam through an aperture on a surface of the laser, wherein one of the first substrate and the second substrate has formed therein a lens element, wherein the first substrate and the second substrate form a hermetically sealed cavity enclosing the laser, and wherein the lens clement directs and shaves the laser beam into a light guide, wherein the second substrate has formed therein the lens element on a top surface of the second substrate a photo detector attached to the second substrate, wherein the photo detector receives light directly from the laser. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 19)
-
Specification