Immersible thermal mass flow meter
First Claim
1. An apparatus for use in a mass flow meter for immersion in a fluid, comprising:
- a velocity sensor element comprising an elongate body for extending into the fluid, said elongate body comprising a housing shell, a distal end of said housing shell receiving and closely holding a spacer therein, said spacer comprising a solid body of metal receiving and closely holding a thin-film Resistance Temperature Detector (RTD) sensor therein, said sensor comprising an active area and electrical leads to carry current to said active area from a proximal end of said shell, said active area in substantially gap-free contact with an internal abutting spacer area.
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Accused Products
Abstract
A thermal anemometer or mass flow meter having temperature and flow velocity sensor elements is provided in which a thin film temperature sensor is provided in the heated sensor of the fluid velocity sensor element of the system. The thin-film sensor is captured at least partially within a spacer or interface member, the spacer being received within a housing. The thermal anemometer is constructed to offer sufficient precision and accuracy in its design to be suitable for sensitive scientific and industrial applications. This goal is achieved while using cost effective parts—as in the thin film temperature sensor(s)—in connection with a construction approach minimizing or eliminating gaps or other system configuration variability.
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Citations
18 Claims
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1. An apparatus for use in a mass flow meter for immersion in a fluid, comprising:
a velocity sensor element comprising an elongate body for extending into the fluid, said elongate body comprising a housing shell, a distal end of said housing shell receiving and closely holding a spacer therein, said spacer comprising a solid body of metal receiving and closely holding a thin-film Resistance Temperature Detector (RTD) sensor therein, said sensor comprising an active area and electrical leads to carry current to said active area from a proximal end of said shell, said active area in substantially gap-free contact with an internal abutting spacer area. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
Specification