Electrochemical method and system for monitoring hydrogen peroxide concentration in slurries

• US 6,972,083 B2
• Filed: 09/27/2002
• Issued: 12/06/2005
• Est. Priority Date: 09/27/2002
• Status: Active Grant

• Current Assignee: Bell Semiconductor, LLC (Hilco Inc. (d/b/a Hilco Global))
• Original Assignee: Agere Systems Incorporated (Broadcom, Inc.)
• Inventors: Tamboli, Dnyanesh Chandrakant, Desai, Vimalkur Haribhai
• Primary Examiner(s): Olsen, Kaj K.
• Application Number:
  US10/259,254
• Publication Number:
  US 20040069625A1
• Time in Patent Office: 1,166 Days
• Field of Search: 204/400, 204/409, 204/411, 204/412, 204/434, 205/782, 205/786, 205/775, 451/41
• US Class Current: 205/782
• CPC Class Codes: G01N 27/4045 for gases other than oxygen

Abstract

Electrochemical monitoring system and method are provided for online determination of hydrogen peroxide concentration in slurries, e.g., a chemical mechanical polishing slurry. The monitoring system includes an electrochemical cell fluidly coupled to receive a slurry including hydrogen peroxide. The cell includes at least a working electrode made up of tungsten, a reference electrode and a counter electrode. The system further includes a potentiostat electrically coupled to the working electrode to supply a desired potentials in increments to the working electrode and measure current flow between the working electrode and the counter electrode. The amount of passive current established between the working electrode and the counter electrode over a selected time window is indicative of the concentration of hydrogen peroxide in the slurry.

Claims

1. An electrochemically-based method for determining hydrogen peroxide concentration in a slurry comprising:

fluidly coupling an electrochemical cell to receive a chemical mechanical polishing slurry including hydrogen peroxide, the cell including at least a working electrode comprising tungsten, and a counter electrode;

applying a desired potential to the working electrode;

measuring current flow between the working electrode and the counter electrode; and

determining the concentration of hydrogen peroxide in said slurry from the measured current.

2. The method of claim 1 wherein the measured current is coupled to a processor having a memory and further comprising storing in the memory a predefined relationship between current measurements and hydrogen peroxide concentration.

3. The method of claim 2 further comprising relating the current measurements between the working electrode and the counter electrode relative to the predefined relationship stored in memory to determine the concentration of hydrogen peroxide in the slurry.

4. The method of claim 1 further comprising configuring the working electrode as a relatively thin roll of tungsten.

5. The method of claim 4 further comprising rotating the working electrode to ensure generally uniform exposure of the working electrode relative to the slurry.

6. The method of claim 1 and including a reference electrode immersed in the slurry for providing a measurement of potential applied to the working electrode.