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Wafer integrated plasma probe assembly array

  • US 6,972,579 B2
  • Filed: 07/26/2004
  • Issued: 12/06/2005
  • Est. Priority Date: 03/31/2000
  • Status: Expired due to Fees
First Claim
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1. A wafer integrated plasma probe assembly array comprising:

  • a plurality of plasma probes;

    the plurality of plasma probes comprising;

    a larger sized probe;

    four medium sized probes; and

    a smaller sized probe;

    wherein the larger sized probe has a geometrical area equal to the geometric area of the four medium sized probes; and

    the smaller probe has an area which is very much smaller than any of the larger and medium sized probes.

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