Multi-beam heterodyne laser doppler vibrometer

• US 6,972,846 B2
• Filed: 03/31/2003
• Issued: 12/06/2005
• Est. Priority Date: 03/31/2003
• Status: Active Grant

• Current Assignee: MetroLaser, Inc.
• Original Assignee: MetroLaser, Inc.
• Inventors: Lal, Amit K., Markov, Vladimir B., Hurtado, L. Ernesto, Aranchuk, Vyacheslav, Hess, Cecil F., Zhang, Hansheng
• Primary Examiner(s): Toatley, Gregory J.
• Assistant Examiner(s): Lyons, Michael A.
• Application Number:
  US10/405,045
• Publication Number:
  US 20050237533A1
• Time in Patent Office: 981 Days
• Field of Search: 356/486, 356/487, 356/488, 356/492, 356/493, 356/494, 356/498, 356/499, 356/502, 356/521
• US Class Current: 356/486
• CPC Class Codes: G01H 9/00 Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means

Abstract

A multi-beam laser Doppler vibrometer simultaneously measures velocity, displacement, and vibration history of multiple locations on an object. A beam of coherent light is split into an object beam and a reference beam. The object beam is divided into a plurality of object beams to simultaneously illuminate multiple locations on the object under inspection. The reference beam is frequency shifted and split into a corresponding plurality of frequency-shifted reference beams. A portion of each object beam is reflected by the object as a modulated object beam. The plurality of modulated object beams are collected and respectively mixed with the plurality of frequency-shifted reference beams to provide a plurality of beam pairs. Each beam pair may be focused onto a photodetector or an optical fiber connected to a photodetector.

Claims

1. A multi-beam heterodyne vibrometer for analyzing vibration of an object, the vibrometer comprising:

an optical system for;

generating a plurality of object beams and a plurality of frequency-shifted reference beams, the plurality of frequency-shifted reference beams having a frequency that is shifted from a frequency of the plurality of object beams;

transmitting the object beams to the object, a portion of each of the object beams being reflected off of the object as a modulated object beam; and

collecting the modulated object beams; and

a combining element for combining each of the modulated object beams with a respective one of the frequency-shifted reference beams into a plurality of beam pairs.

2. The vibrometer of claim 1 wherein the plurality of modulated object beams and the plurality of frequency-shifted reference beams have the same polarization.

3. The vibrometer of claim 1 wherein the plurality of modulated object beams and the plurality of frequency-shifted reference beams are collimated prior to being combined into the beam pairs.

4. The vibrometer of claim 1 wherein the optical system includes a pair of beam splitters for respectively splitting an object beam into the plurality of object beams and a frequency shifted reference beam into the plurality of frequency-shifted reference beams.

5. The vibrometer of claim 4 wherein the optical system further includes:

a laser for providing an output beam; and

an output beam splitter for splitting the output beam into the object beam and a reference beam;

the reference beam being frequency shifted to yield the frequency-shifted reference beam prior to being split into the plurality of frequency-shifted reference beams.

6. The vibrometer of claim 4 wherein the beam splitters split the object beam and the frequency-shifted reference beam such that the plurality of object beams and the plurality of frequency-shifted reference beams diverge from the respective beam splitter at substantially the same angle.

7. The vibrometer of claim 6 wherein the beam splitters split the object beam and the frequency-shifted reference beam such that the number of object beams is equal to the number of frequency-shifted reference beams.

8. The vibrometer of claim 7 wherein the optical system further includes

a first telescope for directing the object beam onto one of the beam splitters;

and

a second telescope for directing the frequency-shifted reference beam onto the other one of the beam splitters.

9. The vibrometer of claim 8 wherein the object beam and the frequency-shifted reference beam each have a diameter;

the telescopes for directing the beams onto a respective one of the beam splitters such that the diameters of the beams are substantially equal when incident upon the beam splitters.

10. The vibrometer of claim 1 wherein the optical system includes a collecting lens for collecting the modulated object beams;

the collecting lens having a focal length and being positioned from a surface of the object by a distance substantially equal to the focal length.

11. The vibrometer of claim 10 wherein the optical system further includes an aperture positioned next to the collecting lens.

12. The vibrometer of claim 11 wherein the frequency-shifted reference beams have a diameter and the aperture has a diameter substantially equal to the diameter of the frequency-shifted reference beams.

13. The vibrometer of claim 10 further comprising a focusing lens positioned downstream from the combining element and having a focal length;

the focusing lens being positioned from the collecting lens by a distance substantially equal to the focal length of the focusing lens.

14. The vibrometer of claim 13 wherein the focusing lens renders the plurality of beam pairs substantially parallel with each other.

15. The vibrometer of claim 13 further comprising a detector element positioned downstream from the focusing lens by a distance substantially equal to the focal length of the focusing lens.

16. The vibrometer of claim 13 further comprising an output element positioned downstream from the focusing lens by a distance substantially equal to the focal length of the focusing lens.

17. The vibrometer of claim 16 wherein the output element includes a plurality of optical fibers;

the focusing lens for focusing each of the beam pairs onto a respective one of the optical fibers.

18. The vibrometer of claim 17 further comprising a detector element positioned downstream from the optical fibers for detecting the beam pairs.

19. The vibrometer of claim 18 wherein the output element includes a plurality of photodetectors each detecting a respective one of the beam pairs.

20. The vibrometer of claim 1 wherein the optical system includes:

a laser for providing an output beam; and

an output beam splitter for splitting the output beam into an object beam from which the plurality of object beams originates and a reference beam from which the plurality of frequency-shifted reference beams originates.

21. The vibrometer of claim 20 wherein the optical system further includes an acousto-optical modulator (AOM) positioned downstream from the output beam splitter for shifting a frequency of the reference beam.

22. The vibrometer of claim 21 wherein the optical system further includes a pair of AOMs positioned in series downstream from the output beam splitter.

23. The vibrometer of claim 22 wherein one of the AOMs operates at a first frequency and the other one of the AOMs operates at a second frequency;

the frequency of the reference beam being shifted by a carrier frequency that is a function of the first frequency and the second frequency.

24. The vibrometer of claim 23 wherein the AOMs are positioned in opposite directions;

the carrier frequency being equal to the difference of the first and second frequencies.

25. The vibrometer of claim 23 further comprising a pair of frequency generators for respectively driving the AOMs at the first frequency and the second frequency.

26. The vibrometer of claim 25 wherein at least one of the frequency generators is adjustable such that the carrier frequency is adjustable.

27. The vibrometer of claim 25 wherein the frequencies from the frequency drivers are mixed to yield a reference signal that is provided to an electronic system for analyzing the modulate object beams.

28. The vibrometer of claim 1 further comprising an output system for analyzing the modulated object beams.

30. The vibrometer of claim 1 further comprising an acoustic source for vibrating the object.

31. The vibrometer of claim 1 further comprising a mirror for reflecting the transmitted object beams onto the object.

32. The vibrometer of claim 31 further comprising a motor for rotating the mirror so that the transmitted object beams scan the object.

29. The vibrometer of the 28 wherein the output system includes a computer.

33. A method for analyzing vibration of an object, the method comprising:

transmitting a plurality of object beams to the object, a portion of each of the object beams being reflected by the object as a modulated object beam;

collecting the modulated object beams; and

combining each of the modulated object beams with a frequency-shifted reference beam.

34. The method of claim 33 further comprising splitting an object beam into the plurality of object beams.

35. The method of claim 34 further comprising splitting a frequency-shifted reference beam into the plurality of frequency-shifted reference beams.

36. The method of claim 35 further comprising shifting a frequency of a reference beam to yield the frequency-shifted reference beam.

37. The method of claim 36 further comprising splitting a coherent light beam into the object beam and the reference beam.

38. The method of claim 35 wherein the object beam and the frequency-shifted reference beam are respectively split into an equal number of object beams and frequency-shifted reference beams.

39. The method of claim 35 wherein the plurality of object beams diverge upon splitting of the object beam at an angle and the plurality of frequency-shifted reference beams diverge at an angle upon splitting of the frequency-shifted reference beam;

the angle of the object beams being substantially equal to the angle of the frequency-shifted reference beams.

40. The method of claim 35 further comprising directing the object beam and directing the frequency-shifted reference beam such that the object beam and the frequency-shifted reference beam are substantially the same size when split.

41. The method of claim 35 further comprising focusing the plurality of object beams onto the object.

42. The method of claim 33 further comprising polarizing the modulated object beams and the frequency-shifted reference beams so that the modulated object beams and the frequency-shifted reference beams have the same polarization prior to combining.

43. The method of claim 33 wherein the collecting step-including collecting the modulated object beams with a collecting lens, the method further comprising:

focusing the modulated object beams onto the collecting lens.

44. The method of claim 33 wherein the modulated object beams have a diameter and the frequency-shifted reference beams have a diameter, the method further comprising:

matching the diameter of the modulated object beams with the diameter of the frequency-shifted reference beams.

45. The method of claim 33 wherein the plurality of object beams transmitted to the object are reflected off of the object as scattered light, the method further comprising:

separating the scattered light into the plurality of modulated object beams.

46. The method of claim 33 further comprising collimating the modulated object beams and the frequency-shifted reference beams prior to combining.

47. The method of claim 33 further comprising rendering the plurality of beam pairs parallel with each other.

48. The method of claim 33 further comprising focusing the plurality of beam pairs onto a detector element.

49. The method of claim 33 further comprising focusing the plurality of beam pairs onto an output element.

50. The method of claim 49 wherein the output element includes a plurality of optical fibers, the method further comprising:

focusing the plurality of beam pairs such that each of the optical fibers receives one of the beam pairs.

51. The method of claim 33 further comprising transmitting the plurality of beam pairs to a plurality of detectors to yield a plurality of frequency-modulated signals.

52. The method of claim 51 further comprising analyzing the plurality of frequency-modulated signals.

53. The method of claim 52 wherein the analyzing step includes calculating displacement of the object.

54. The method of claim 52 wherein the analyzing step includes calculating velocity of the object.

55. The method of claim 52 further comprising displaying analyzed data associated with the frequency-modulated signals.

56. The method of claim 33 wherein the object is buried in soil, the method further comprising:

causing the object to vibrate, thereby causing the soil to vibrate and modulate the plurality of transmitted object beams to yield the plurality of modulated object beams.

57. The method of claim 33 wherein the causing step includes transmitting acoustic waves toward the object.

58. The method of claim 33 further comprising scanning the transmitted object beams over the object.

59. A multi-beam heterodyne vibrometer for analyzing vibration of an object, the vibrometer comprising:

a laser for providing an output beam;

a first beam splitter for splitting the output beam into an object beam and a reference beam;

a second beam splitter for splitting the object beam into a plurality of object beams for transmission to the object, a portion of each of the object beams being reflected by the object as a modulated object beam;

a collecting lens for collecting the plurality of modulated object beams;

a frequency shifter for shifting a frequency of the reference beam to yield a frequency-shifted reference beam;

a third beam splitter for splitting the frequency-shifted reference beam into a plurality of frequency-shifted reference beams;

a combining element for combining each of the modulated object beams with a respective one of the frequency-shifted reference beams into a plurality of beam pairs.

60. The vibrometer of claim 59 further comprising an output element for receiving the plurality of beam pairs.

61. The vibrometer of claim 60 wherein the output element is an array including a plurality of elements.

62. The vibrometer of claim 61 further comprising a focusing lens for focusing each of the beam pairs onto a respective one of the elements of the array.

63. The vibrometer of claim 62 wherein the array includes a plurality of photodetectors.

64. The vibrometer of claim 62 wherein the array includes a plurality of optical fibers.

65. The vibrometer of claim 59 wherein the output element provides a plurality of frequency-modulated signals based on the plurality of beam pairs.

66. The vibrometer of claim 65 further comprising a computer for processing data associated with the frequency-modulated signals.

67. The vibrometer of claim 66 further comprising software for utilization by the computer.

68. The vibrometer of claim 59 further comprising a plurality of waveplates for polarizing the plurality of modulated object beams and the plurality of frequency-shifted reference beams such that the plurality of modulated object beams and the plurality of frequency-shifted reference beams have the same polarization when combined.

69. A multi-beam heterodyne vibrometer for analyzing vibration of an object, the vibrometer comprising:

an optical system for;

generating coherent light;

splitting the coherent light into an object beam and a reference beam;

shifting the frequency of one of the beams;

splitting the object beam into a plurality of object beams

splitting the reference beam into a plurality of reference beams;

transmitting the object beams to the object, a portion of each of the object beams being reflected off of the object as a modulated object beam; and

collecting the modulated object beams; and

a combining element for combining each of the modulated object beams with a respective one of the reference beams into a plurality of beam pairs.

70. The vibrometer of claim 69 wherein the optical system shifts the frequency of the reference beam.