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Micromirror having reduced space between hinge and mirror plate of the micromirror

  • US 6,972,891 B2
  • Filed: 01/11/2005
  • Issued: 12/06/2005
  • Est. Priority Date: 07/24/2003
  • Status: Expired due to Term
First Claim
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1. A method, comprising:

  • depositing two sacrificial layers on a substrate;

    forming an array of mirror plates on one of the two sacrificial layers;

    forming a hinge, for each mirror plate, on the other sacrificial layer of the two sacrificial layers, wherein the sacrificial layer between the mirror plate and the hinge is from 0.15 to 0.45 micrometers; and

    removing at least a portion of one or both of the two sacrificial layers using a spontaneous vapor phase chemical etchant.

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