Tunneling magnetoresistive random access memory with a multilayer fixed layer
First Claim
1. A magnetic random access memory comprising a magnetoresistive element which has a recording layer, a fixed layer, and a tunnel barrier layer arranged between the recording layer and the fixed layer,the fixed layer comprisingan anti-ferromagnetic layer,a first ferromagnetic layer which is in contact with the anti-ferromagnetic layer,a second ferromagnetic layer which is magnetically coupled with the first ferromagnetic layer by first magnetic coupling,a third ferromagnetic layer which is magnetically coupled with the second ferromagnetic layer by second magnetic coupling,a first nonmagnetic layer which is formed between the first and second ferromagnetic layers, anda second nonmagnetic layer which is formed between the second and third ferromagnetic layers and has a thickness different from a thickness of the first nonmagnetic layer.
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Abstract
A magnetic random access memory includes a magnetoresistive element which has a recording layer, a fixed layer, and a tunnel barrier layer arranged between the recording layer and the fixed layer, the fixed layer comprising an anti-ferromagnetic layer, a first ferromagnetic layer which is in contact with the anti-ferromagnetic layer, a second ferromagnetic layer which is magnetically coupled with the first ferromagnetic layer by first magnetic coupling, a third ferromagnetic layer which is magnetically coupled with the second ferromagnetic layer by second magnetic coupling, a first nonmagnetic layer which is formed between the first and second ferromagnetic layers, and a second nonmagnetic layer which is formed between the second and third ferromagnetic layers and has a thickness different from a thickness of the first nonmagnetic layer.
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20 Claims
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1. A magnetic random access memory comprising a magnetoresistive element which has a recording layer, a fixed layer, and a tunnel barrier layer arranged between the recording layer and the fixed layer,
the fixed layer comprising an anti-ferromagnetic layer, a first ferromagnetic layer which is in contact with the anti-ferromagnetic layer, a second ferromagnetic layer which is magnetically coupled with the first ferromagnetic layer by first magnetic coupling, a third ferromagnetic layer which is magnetically coupled with the second ferromagnetic layer by second magnetic coupling, a first nonmagnetic layer which is formed between the first and second ferromagnetic layers, and a second nonmagnetic layer which is formed between the second and third ferromagnetic layers and has a thickness different from a thickness of the first nonmagnetic layer.
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