Temperature compensated strain sensing apparatus
First Claim
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1. A strain sensing apparatus having:
- a strain gauge having a layer to which a strain sensing area is bonded;
a temperature gauge having a layer to which a temperature sensing area is bonded, the temperature sensing area being in thermal contact with the strain sensing area; and
wherein one of the strain sensing area and the temperature sensing area overlies the other, the temperature gauge being directly bonded to the strain gauge.
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Abstract
A strain sensing apparatus for use in the presence of thermal gradients has a strain gauge and resistance temperature gauge in a planar assembly bonded to, deposited on or diffused or implanted in a substrate surface. The apparatus can sense strain and temperature independently and can be used alone or with a plurality of installations in strain gauge based transducers or experimental stress analysis. The output from the temperature gauge can be used accurately to compensate for unwanted thermal effects in the strain gauge and to measure temperature at the strain gauge site.
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Citations
20 Claims
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1. A strain sensing apparatus having:
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a strain gauge having a layer to which a strain sensing area is bonded; a temperature gauge having a layer to which a temperature sensing area is bonded, the temperature sensing area being in thermal contact with the strain sensing area; and wherein one of the strain sensing area and the temperature sensing area overlies the other, the temperature gauge being directly bonded to the strain gauge. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A strain sensing apparatus having:
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a strain gauge comprising a layer having a strain resistor; a temperature gauge comprising a layer having a temperature compensation resistor, the temperature compensation resistor being in thermal contact with the strain resistor; and wherein one of the strain resistor and the temperature compensation resistor area overlies the other, the temperature gauge being directly bonded to the strain gauge. - View Dependent Claims (18, 19, 20)
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Specification