×

Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields

  • US 6,974,713 B2
  • Filed: 02/25/2005
  • Issued: 12/13/2005
  • Est. Priority Date: 08/11/2000
  • Status: Expired due to Term
First Claim
Patent Images

1. A method of making a micromirror device, the method comprising:

  • depositing a first sacrificial layer on a substrate;

    forming a mirror plate on the first sacrificial layer;

    depositing a second sacrificial layer on the mirror plate;

    forming a hinge, a hinge support and an extension plate, further comprising;

    removing a first portion and a second portion of the second sacrificial layer at a first location and at second portion above the mirror plate so as to expose a first portion and a second portion of the mirror plate; and

    depositing the extension plate over the second sacrificial layer and over the exposed first portion of the mirror plate depositing the hinge on the second sacrificial layer and on the exposed second portion of the mirror plate; and

    removing the first and the second sacrificial layers.

View all claims
  • 4 Assignments
Timeline View
Assignment View
    ×
    ×