Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields
First Claim
1. A method of making a micromirror device, the method comprising:
- depositing a first sacrificial layer on a substrate;
forming a mirror plate on the first sacrificial layer;
depositing a second sacrificial layer on the mirror plate;
forming a hinge, a hinge support and an extension plate, further comprising;
removing a first portion and a second portion of the second sacrificial layer at a first location and at second portion above the mirror plate so as to expose a first portion and a second portion of the mirror plate; and
depositing the extension plate over the second sacrificial layer and over the exposed first portion of the mirror plate depositing the hinge on the second sacrificial layer and on the exposed second portion of the mirror plate; and
removing the first and the second sacrificial layers.
4 Assignments
0 Petitions
Accused Products
Abstract
A micromirror device is disclosed, along with a method of making such a micromirror device that comprises a mirror plate, a hinge and an extension plate. The extension plate is formed on the mirror plate and between the mirror plate and the electrode associated with the mirror plate for rotating the mirror plate. The extension plate can be metallic or dielectric. Also disclosed is a method of making such a micromirror device. In particular, the extension plate is formed after the formation of the mirror plate. Moreover, also disclosed is a projection system that comprises a spatial light modulator having an array of such micromirrors, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.
-
Citations
15 Claims
-
1. A method of making a micromirror device, the method comprising:
-
depositing a first sacrificial layer on a substrate; forming a mirror plate on the first sacrificial layer; depositing a second sacrificial layer on the mirror plate; forming a hinge, a hinge support and an extension plate, further comprising; removing a first portion and a second portion of the second sacrificial layer at a first location and at second portion above the mirror plate so as to expose a first portion and a second portion of the mirror plate; and depositing the extension plate over the second sacrificial layer and over the exposed first portion of the mirror plate depositing the hinge on the second sacrificial layer and on the exposed second portion of the mirror plate; and removing the first and the second sacrificial layers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
-
9. A method of making a micromirror device, comprising:
-
depositing a first sacrificial layer on a light transmissive substrate; forming a reflective mirror plate on the first sacrificial layer; depositing a second sacrificial layer on the mirror plate; forming a first and second posts in the sacrificial layers; forming a hinge and an extension plate on the second sacrificial layer and connected to the reflective mirror plate, wherein the first post connects the extension plate to the mirror plate, and the second post connects the hinge to the mirror plate; and removing the first and second sacrificial layers so as to release the micromirror device. - View Dependent Claims (10, 11, 12, 13, 14, 15)
-
Specification