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BAW resonator having piezoelectric layers oriented in opposed directions

  • US 6,975,183 B2
  • Filed: 04/08/2004
  • Issued: 12/13/2005
  • Est. Priority Date: 10/08/2001
  • Status: Expired due to Term
First Claim
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1. A bulk acoustic wave resonator, comprisinga first piezoelectric layer made of a material oriented toward a first direction;

  • and a second piezoelectric layer made of a material oriented toward a second direction opposed to the first direction;

    the first piezoelectric layer and the second piezoelectric layer being acoustically coupled with each other;

    a first electrode, on which the first piezoelectric layer is at least partially formed;

    a second electrode formed at least partially on the first piezoelectric layer, the second piezoelectric layer being at least partially arranged on a first portion of the second electrode;

    an additional first piezoelectric layer arranged at least partially on a second portion of the second electrode, the second piezoelectric layer and the additional first piezoelectric layer being arranged so as to be spaced apart from each other;

    a third electrode arranged at least partially on the second piezoelectric layer; and

    a fourth electrode arranged at least partially on the additional first piezoelectric layer.

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