Damascene optical waveguides
First Claim
Patent Images
1. A process of fabricating on optical waveguide comprising the steps of:
- forming a mold in amorphous silicon over a thermal oxide optical buffer material which overlays a substrate;
patterning a mold layer using a resist and etching sub step to transfer a predetermined pattern in the mold;
filling the mold with a dielectric;
planarizing a surface of the mold; and
removing the mold to leave behind an optical waveguide.
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Abstract
A method for fabricating electromagnetic waveguides. The primary expected application is for the formation of dielectric type waveguides suitable for the confinement and guidance of intra-red and visible wavelengths. A secondary application is the formation of waveguides which can be filled with liquids or gases. The method uses standard microelectronic processing techniques.
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Citations
2 Claims
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1. A process of fabricating on optical waveguide comprising the steps of:
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forming a mold in amorphous silicon over a thermal oxide optical buffer material which overlays a substrate; patterning a mold layer using a resist and etching sub step to transfer a predetermined pattern in the mold; filling the mold with a dielectric; planarizing a surface of the mold; and removing the mold to leave behind an optical waveguide. - View Dependent Claims (2)
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Specification
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Current AssigneeAir Force Government of The United States of America As Represented By The Secretary
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Original AssigneeUnited States Of America As Represented By The Secretary Of The Air Force
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InventorsPalmateer, Susan C., Maki, Paul A.
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Primary Examiner(s)Ullah, Akm Enayet
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Application NumberUS11/136,802Time in Patent Office201 DaysField of Search385129-131, 385/147, 264/24US Class Current385/129CPC Class CodesG02B 6/13 Integrated optical circuits...
