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Damascene optical waveguides

  • US 6,975,802 B1
  • Filed: 05/26/2005
  • Issued: 12/13/2005
  • Est. Priority Date: 05/26/2005
  • Status: Expired due to Fees
First Claim
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1. A process of fabricating on optical waveguide comprising the steps of:

  • forming a mold in amorphous silicon over a thermal oxide optical buffer material which overlays a substrate;

    patterning a mold layer using a resist and etching sub step to transfer a predetermined pattern in the mold;

    filling the mold with a dielectric;

    planarizing a surface of the mold; and

    removing the mold to leave behind an optical waveguide.

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