Alternating phase shift mask
First Claim
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1. An alternating phase shift mask, comprising:
- a transparent substrate;
a light-shielding layer on the transparent substrate to define a transparent array consisting of a plurality of first phase rows and a plurality of second phase rows alternately interposed between the first phase rows; and
a phase interference enhancement feature disposed a predetermined distance from the outermost row of the transparent array, wherein the phases of the phase interference enhancement feature and the outermost row are reverse.
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Abstract
An alternating phase shift mask. The alternating phase shift mask includes a transparent substrate, a light-shielding layer disposed on the transparent substrate to define a transparent array consisting of a plurality of first phase rows and a plurality of second phase rows alternately interposed between the first phase rows. The alternating phase shift mask further comprises a phase interference enhancement feature disposed a predetermined distance from the outermost row of the transparent array, wherein the phases of the phase interference enhancement feature and the outermost row are reverse.
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Citations
18 Claims
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1. An alternating phase shift mask, comprising:
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a transparent substrate;
a light-shielding layer on the transparent substrate to define a transparent array consisting of a plurality of first phase rows and a plurality of second phase rows alternately interposed between the first phase rows; and
a phase interference enhancement feature disposed a predetermined distance from the outermost row of the transparent array, wherein the phases of the phase interference enhancement feature and the outermost row are reverse. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An alternating phase shift mask, comprising:
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a transparent substrate;
a light-shielding layer disposed on the transparent substrate to define a transparent array consisting of a plurality of first phase columns and a plurality of second phase columns alternately interposed between the first phase columns; and
a phase interference enhancement feature disposed a predetermined distance from the outermost column of the transparent array, wherein the phases of the phase interference enhancement feature and the outermost column are reversed. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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Specification