Method and apparatus for nitride spacer etch process implementing in situ interferometry endpoint detection and non-interferometry endpoint monitoring

• US 6,977,184 B1
• Filed: 10/31/2001
• Issued: 12/20/2005
• Est. Priority Date: 10/31/2001
• Status: Expired due to Fees

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Cheng, Shih-Yuan, Tu, Wayne, Chou, Wen-Ben
• Primary Examiner(s): CHEN, KIN CHAN
• Application Number:
  US09/998,858
• Time in Patent Office: 1,511 Days
• Field of Search: 438/8, 438/9, 438/706, 438/710, 438/712, 438/714, 438/724
• US Class Current: 438/9
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01L 21/31116 by dry-etching
• CPC Class Codes: H01L 21/823468 with a particular manufacturing method of the gate sidewall spacers, e.g. double spacers, particular spacer material or shape

Abstract

A method for fabricating a spacer of a gate structure is provided. The method performing a first etch process implementing a first etchant gas. The first etch process is configured to implement an interferometry endpoint (IEP) detection method to detect a removal of a portion of a spacer layer having a specific thickness from over the surface of the substrate, thus leaving a thin spacer layer. The method further includes performing a second etch process for a predetermined period of time implementing a second etchant gas. The second etch process is configured to remove the thin spacer layer, leaving the spacer for the gate structure.

Claims

1. A method for fabricating a spacer of a gate structure, the method comprising:

performing a first etch process implementing a first etchant gas, the first etch process configured to remove a portion of a spacer layer, leaving a thin spacer layer, the first etch process configured to implement an interferometry endpoint (IEP) detection method to detect the removal of the portion of the spacer layer; and

performing a second etch process implementing a second etchant gas, the second etch process including monitoring by a non-IEP etch endpoint process, the second etch process configured to remove the thin spacer layer, leaving the spacer for the gate structure,

wherein the second etchant gas includes a combination of O₂, HBr, and SF₆.

2. The method as recited in claim 1, wherein the first etchant gas includes a combination of C₂F₆, CH₂F₂, and O₂, a combination of CF₄, CH₂F₂, and O₂, or a combination of CF₄, HBr, and O₂.

3. The method as recited in claim 1, further comprising:

discontinuing the first etch process upon removing the portion of the spacer layer, leaving the thin spacer layer.

4. The method as recited in claim 1, further comprising:

discontinuing the second etch process in response to monitoring the removal of the thin spacer layer by the non-IEP etch endpoint process and when the second etch process has continued for a predetermined period of time.

5. The method of claim 1, wherein the IEP etch endpoint monitoring method is configured to monitor a photon beam reflected by the spacer layer so as to determine the thickness of an etch depth during the first etch operation implementing a distance between consecutive maximum intensities.

6. The method of claim 5, wherein the non-IEP etch endpoint monitoring method is optical emission spectroscopy (OES).

7. The method of claim 1, wherein the spacer layer is a nitride layer.

8. A method for fabricating a silicon nitride spacer, the method comprising:

performing a first etch process implementing a first etchant gas in a plasma chamber, the first etch process configured to control a removal of a portion of a silicon nitride layer from over a surface of a substrate by monitoring a light reflected by the silicon nitride layer, the first etch process further configured to leave a thin silicon nitride layer over the surface of the substrate and to maintain a thickness of the thin silicon nitride layer substantially uniform throughout the surface of the substrate and a gate structure formed thereon, the first etchant gas configured to include a combination of CF₄, HBr, and O₂; and

performing a second etch process implementing a second etchant gas, the second etch process including monitoring an optical signal produced by a second plasma during the second etch operation, the second etch process configured to remove the thin silicon nitride layer, leaving the silicon nitride spacer for the gate structure.

9. The method as recited in claim 8, further comprising:

purging a first plasma content defined within the plasma chamber.

10. The method as recited in claim 8, wherein the second etch process is performed for a predetermined period of time.

11. The method as recited in claim 8, wherein the first etch operation and the second etch operation are performed in situ.

12. The method as recited in claim 8, wherein monitoring the light reflected by the silicon nitride layer includes,

directing a photon beam onto the silicon nitride layer;

observing a reflected photon beam reflected by the silicon nitride layer; and

determining an etch depth as the first etch operation proceeds.

13. The method of claim 12, wherein determining the etch depth includes:

monitoring an intensity of the reflected photon beam;

determining a distance between a pair of consecutive maximum intensities; and

determining the thickness of the etch depth implementing the distance between consecutive maximum intensities.

14. The method as recited in claim 8, wherein the second etchant gas includes a combination of C₂F₆, CH₂F₂, and O₂, or a combination of O₂, HBr, and SF₆.

15. A method for fabricating a nitride spacer of a gate structure, the method comprising:

performing a first etch process using a first etchant gas, the first etch process implementing an interferometry endpoint (IEP) detection process to detect a removal of a portion of a nitride spacer layer;

discontinuing the first etch process upon removing the portion of the nitride spacer layer, leaving a thin nitride spacer layer;

performing a second etch process using a second etchant gas implementing optical emission spectroscopy (OES) endpoint monitoring process, the second etch process configured to remove the thin nitride spacer layer, leaving the nitride spacer for the gate structure; and

discontinuing the second etch process in response to the OES monitoring process,

wherein the first etchant gas includes a combination of C₂F₆, CH₂F₂, and O₂ and the second etchant gas includes a combination of O₂, HBr, and SF₆, the first etchant gas includes a combination of CF₄, CH₂F₂, and O₂ and the second etchant gas includes a combination of O₂, HBr, and SF₆, the first etchant gas includes a combination of CF₄, HBr, and O₂ and the second etchant gas includes a combination of C₂F₆, CH₂F₂, and O₂, or the first etchant gas includes a combination of CF₄, HBr, O₂ and the second etchant gas includes a combination of O₂, HBr, and SF₆.

16. The method of claim 15, wherein a thickness of the thin nitride spacer layer is configured to range between approximately about 50 Å

and 300 Å

.

17. The method of claim 15, wherein a thickness of the thin nitride layer is configured to range between approximately about 100 Å

and 200 Å

.

18. The method of claim 15, wherein a thickness of the thin nitride spacer layer is configured to be about 100 Å

.