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Sensor and sensor array having improved selectivity

  • US 6,977,511 B2
  • Filed: 03/08/2005
  • Issued: 12/20/2005
  • Est. Priority Date: 06/20/2002
  • Status: Expired due to Term
First Claim
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1. A sensor array for sensing an airborne analyte, the sensor array comprising at least a first sensor and a second sensor, wherein at least the first sensor comprises:

  • a first conductive plate, which first conductive plate serves as a base plate;

    a second conductive plate disposed in spaced relation to and in electrical communication with the first conductive plate, wherein at least a portion of the second conductive plate is moveable in relation to the first conductive plate;

    a reactive layer disposed between at least a portion of the second conductive plate and the first conductive plate, the reactive layer being comprised of a polymer film comprised of at least one polymer species and configured to effect a change in capacitance between the second conductive plate and the first conductive plate when the reactive layer is exposed to the analyte; and

    a capacitance sensing circuit for detecting a change in capacitance between the first conductive plate and the second conductive plate indicative of the presence of the analyte.

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