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Thin-film piezoelectric resonator and method for fabricating the same

  • US 6,977,563 B2
  • Filed: 09/26/2003
  • Issued: 12/20/2005
  • Est. Priority Date: 09/27/2002
  • Status: Active Grant
First Claim
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1. A thin-film piezoelectric resonator comprising:

  • a piezoelectric thin film having piezoelectric characteristic; and

    an upper electrode and a lower electrode arranged on opposite surfaces of said piezoelectric thin film for applying an excitation voltage to said piezoelectric thin film, wherein each of said upper electrode and said lower electrode includes a resonant portion and a lead-out portion, and an electrode thickness of at least one part of said lead-out portion in at least one of said upper electrode and said lower electrode is larger than an electrode thickness of said resonant portion formed to be continued from said lead-out portion.

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