Method of manufacturing an electronic device containing a carbon nanotube

• US 6,979,244 B2
• Filed: 11/14/2003
• Issued: 12/27/2005
• Est. Priority Date: 10/30/1997
• Status: Expired due to Fees

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Iwasaki, Tatsuya, Den, Tohru
• Primary Examiner(s): Santiago, Mariceli
• Application Number:
  US10/712,101
• Publication Number:
  US 20040116034A1
• Time in Patent Office: 774 Days
• Field of Search: 445 49- 51
• US Class Current: 445/24
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 15/00 Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: D01F 9/127 by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
• CPC Class Codes: G01Q 60/16 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: G01Q 60/38 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: G01Q 70/12 Nanotube tips
• CPC Class Codes: H01J 1/14 characterised by the material
• CPC Class Codes: H01J 1/30 Cold cathodes, e.g. field-emissive cathode
• CPC Class Codes: H01J 1/304 Field-emissive cathodes
• CPC Class Codes: H01J 2201/30469 Carbon nanotubes (CNTs)
• CPC Class Codes: H01J 9/025 of field emission cathodes
• CPC Class Codes: Y10S 977/932 for electronic or optoelectronic application
• CPC Class Codes: Y10S 977/939 Electron emitter, e.g. spindt emitter tip coated with nanoparticles

Abstract

A method of manufacturing an electronic device in which a substrate with a pair of electrodes is provided and a carbon nanotube is formed or arranged to electrically connect the electrodes.

Claims

1. A method of manufacturing an electronic device, comprising the steps of:

(i) providing a substrate on which a pair of electrodes is arranged; and

(ii) arranging a carbon nanotube to electrically connect the electrodes.

3. The method according to claim 1 or 2, wherein said step (ii) comprises forming the carbon nanotube by a CVD method.

4. The method according to claim 3, further comprising a step of providing a catalyst on one of the electrodes.

5. The method according to claim 3, further comprising a step of providing a catalytic particle on one of the electrodes.

6. The method according to claim 4, wherein the catalyst is selected from the group consisting of iron, cobalt and nickel.

7. The method according to claim 5, wherein the catalytic particle is selected from the group consisting of iron, cobalt and nickel.

8. The method according to claim 5, wherein a diameter of the catalytic particle is not more than 5×

10<sup>−

8</sup> m.

9. The method according to claim 5, wherein a diameter of the catalytic particle is not less than 1×

10<sup>−

9</sup> m.

2. A method of manufacturing an electronic device, comprising the steps of:

(i) providing a substrate on which a pair of electrodes is arranged; and

(ii) forming a carbon nanotube electrically connecting the electrodes.