Methods of making electromechanical three-trace junction devices
First Claim
Patent Images
1. A method of producing an electromechanical circuit element, the method comprising:
- providing a lower structure having lower support structures and a lower electrically conductive element;
forming an electromechanically responsive element on an upper surface of the lower structure so as to contact the lower support structures;
forming an upper structure over the nanotube ribbon, the upper structure including upper support structures and an upper electrically conductive element;
wherein the electromechanically responsive element is a nanotube.
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Abstract
Methods of producing an electromechanical circuit element are described. A lower structure having lower support structures and a lower electrically conductive element is provided. A nanotube ribbon (or other electromechanically responsive element) is formed on an upper surface of the lower structure so as to contact the lower support structures. An upper structure is provided over the nanotube ribbon. The upper structure includes upper support structures and an upper electrically conductive element. In some arrangements, the upper and lower electrically conductive elements are in vertical alignment, but in some arrangements they are not.
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Citations
29 Claims
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1. A method of producing an electromechanical circuit element, the method comprising:
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providing a lower structure having lower support structures and a lower electrically conductive element;
forming an electromechanically responsive element on an upper surface of the lower structure so as to contact the lower support structures;
forming an upper structure over the nanotube ribbon, the upper structure including upper support structures and an upper electrically conductive element;
wherein the electromechanically responsive element is a nanotube.
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2. A method of producing an electromechanical circuit element, the method comprising:
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providing a lower structure;
forming a nanotube ribbon on an upper surface of the lower structure;
after the nanotube ribbon is formed on the lower structure, forming an upper structure over the nanotube ribbon.
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3. A method of producing an electromechanical circuit element, the method comprising:
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providing a lower structure;
forming a nanotube ribbon on an upper surface of the lower structure;
forming an upper structure over the nanotube ribbon;
wherein at least one of the lower and upper structures includes a region having sacrificial material in contact with the nanotube ribbon and wherein the method includes the removal of such sacrificial material;
further wherein the lower and upper structures are formed to have recesses in at least one of their surfaces and wherein the nanotube ribbon is made to suspend between the recesses of the lower and upper structures. - View Dependent Claims (4)
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5. A method of producing an electromechanical circuit element, the method comprising:
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providing a generally planar, periodic structure having an alternating array of nonconductive supports and electrical traces, the nonconductive supports having upper surfaces disposed in a plane higher than the electrical traces;
wherein each member of the alternating array extends substantially in the same direction as one another;
forming an array of nanotube ribbons across the nonconductive supports so as to contact the upper surfaces of the nonconductive supports; and
forming an upper periodic structure having an alternating array of nonconductive supports and electrical traces over the nanotube ribbon array, the alternating array of the upper structure extending in substantially the same direction as the alternating array of the generally planar, periodic structure.
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6. A method of producing an electromechanical circuit element, the method comprising:
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providing a first nonconductive support having an upper surface and extending in a first direction;
providing a second nonconductive surface having an upper surface and generally extending in the first direction;
wherein the upper surfaces of the first and second nonconductive supports form a plane;
providing an electrical trace generally extending in the first direction, the electrical trace disposed between the first and second nonconductive supports and a non-zero distance away from the plane;
forming an array of nanotube ribbons across the nonconductive supports so as to contact the upper surfaces of the nonconductive supports; and
forming an upper structure over the array of nanotube ribbons, the upper structure including upper support structure generally extending in the first direction and an upper electrically conductive element. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method of producing an electromechanical circuit element, the method comprising:
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providing a structure having a first electrically conductive element;
forming a defined pattern of non-woven nanotube fabric spaced relative to the first electrically conductive element; and
providing a structure having a second electrically conductive element spaced relative to the defined pattern of non-woven nanotube fabric and disposed on the opposite side of the non-woven nanotube fabric from the first electrically conductive element. - View Dependent Claims (18)
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19. A method of producing an electromechanical circuit element, the method comprising:
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providing a first structure having a first electrically conductive element having a longitudinal axis;
forming a defined pattern of non-woven nanotube fabric in spaced relation to the first electrically conductive element; and
forming a second structure having a second electrically conductive element having a longitudinal axis, the second electrically conductive element in spaced relation to the defined pattern of non-woven nanotube fabric;
wherein, the second electrically conductive element is disposed on the opposite side of the non-woven nanotube fabric from the first electrically conductive element;
further wherein, the longitudinal axes of the first and second electrically conductive elements are generally parallel.
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20. A method of producing an electromechanical circuit element, the method comprising:
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providing a lower structure having lower support structures and a lower electrically conductive element;
forming a defined pattern of non-woven nanotube fabric on an upper surface of the lower structure so as to contact the lower support structures;
forming an upper structure over the defined pattern of non-woven nanotube fabric, the upper structure including upper support structures and an upper electrically conductive element. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29)
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Specification