Reflection-transmission type liquid crystal display device and method for manufacturing the same
First Claim
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1. A method for manufacturing a liquid crystal display device, the method comprising the steps of:
- forming an active pattern on a substrate;
forming a gate insulation layer on the substrate having the active pattern;
simultaneously forming a gate electrode on the gate insulation layer where the active pattern is formed and a lower electrode of a capacitor on the gate insulation layer adjacent the active pattern;
successively forming first and second interlayer dielectric layers on the gate electrode and the gate insulation layer;
etching the second interlayer dielectric layer to expose the first interlayer dielectric layer over the lower electrode of the capacitor;
etching the first and second interlayer dielectric layers and the gate insulating layer to form contact holes respectively exposing first and second regions of the active pattern;
forming first and second electrodes respectively coupled to the first and second regions through the contact holes, wherein the second electrode is formed to be overlapped with the lower electrode of the capacitor;
forming a passivation layer on the second interlayer dielectric layer having the first and second electrodes;
etching the passivation layer to form a via hole for exposing the second electrode;
forming a transparent electrode on the passivation layer, the transparent electrode being electrically connected to the second electrode;
successively forming a barrier metal layer and a reflective layer on the transparent electrode;
annealing the reflective layer for preventing the reflective layer from being lifted; and
patterning the reflective layer and the barrier metal layer to form a barrier metal layer pattern and a reflective electrode.
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Abstract
Disclosed are a liquid crystal display (LCD) device and a method for manufacturing the LCD device. The LCD device has a substrate including a display region and a pad region located in a periphery of the display region, the display region having a transparent electrode, the pad region having a pad electrode. The transparent electrode and the pad electrode are formed from the same layer. A reflective electrode having a transmission window exposing a portion of the transparent electrode is formed on the transparent electrode. The manufacturing process can be simplified because the transparent electrode is directly connected to the reflective electrode. Since the pad electrode is formed of the same layer as the transparent electrode, no metal corrosion occurs to thereby increase the pad reliability during COG bonding.
40 Citations
9 Claims
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1. A method for manufacturing a liquid crystal display device, the method comprising the steps of:
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forming an active pattern on a substrate; forming a gate insulation layer on the substrate having the active pattern; simultaneously forming a gate electrode on the gate insulation layer where the active pattern is formed and a lower electrode of a capacitor on the gate insulation layer adjacent the active pattern; successively forming first and second interlayer dielectric layers on the gate electrode and the gate insulation layer; etching the second interlayer dielectric layer to expose the first interlayer dielectric layer over the lower electrode of the capacitor; etching the first and second interlayer dielectric layers and the gate insulating layer to form contact holes respectively exposing first and second regions of the active pattern; forming first and second electrodes respectively coupled to the first and second regions through the contact holes, wherein the second electrode is formed to be overlapped with the lower electrode of the capacitor; forming a passivation layer on the second interlayer dielectric layer having the first and second electrodes; etching the passivation layer to form a via hole for exposing the second electrode; forming a transparent electrode on the passivation layer, the transparent electrode being electrically connected to the second electrode; successively forming a barrier metal layer and a reflective layer on the transparent electrode; annealing the reflective layer for preventing the reflective layer from being lifted; and patterning the reflective layer and the barrier metal layer to form a barrier metal layer pattern and a reflective electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Current AssigneeSamsung Display Company Limited (Samsung Electronics Co. Ltd.)
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Original AssigneeSamsung Electronics Co. Ltd.
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InventorsYou, Chun-Gi
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Primary Examiner(s)Ngo, Huyen
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Application NumberUS10/754,822Publication NumberTime in Patent Office718 DaysField of Search349/43, 349/113, 349/122, 259/59, 259/72, 345/92US Class Current349/113CPC Class CodesG02F 1/133388 with constructional differe...G02F 1/133555 TransflectorsG02F 1/1345 Conductors connecting elect...G02F 1/13454 Drivers integrated on the a...G02F 1/13458 Terminal padsG02F 1/136213 Storage capacitors associat...G02F 1/136227 Through-hole connection of ...G02F 1/136236 using a grey or half tone l...G02F 1/13685 Top gatesH01L 27/1248 with a particular compositi...
