Deformable MEMS mirror
First Claim
1. A MEMS device, comprising:
- a deformable plate; and
a first actuator mounted on the deformable plate and adapted to apply a deformation force to the deformable plate to change the shape of the plate, wherein the first actuator comprises first and second electrodes mounted on the deformable plate, wherein, when a voltage differential is applied between the first and second electrodes, one of the electrodes moves with respect to the other electrode thereby applying the deformation force to the plate.
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Accused Products
Abstract
A MEMS device having a deformable mirror. In representative embodiments, the MEMS device includes (1) a deformable plate having a reflective surface and movably connected to a substrate and (2) a deformation actuator mounted on the plate such that, when the plate moves with respect to the substrate, the actuator moves together with the plate without any changes in the relative position of the plate and the actuator. In one embodiment, the actuator has (i) a first electrode, one end of which is attached to an edge of the plate and (ii) a second electrode attached to an interior portion of the plate. When a voltage differential is applied between the first and second electrodes, an unattached end of the first electrode moves with respect to the second electrode, thereby applying a deformation force to the plate. Advantageously, motion and deformation of the deformable plate in such MEMS device are decoupled.
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Citations
28 Claims
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1. A MEMS device, comprising:
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a deformable plate; and a first actuator mounted on the deformable plate and adapted to apply a deformation force to the deformable plate to change the shape of the plate, wherein the first actuator comprises first and second electrodes mounted on the deformable plate, wherein, when a voltage differential is applied between the first and second electrodes, one of the electrodes moves with respect to the other electrode thereby applying the deformation force to the plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method of deforming a plate in a MEMS device, comprising:
applying to the plate a deformation force produced by a first actuator mounted on the plate and adapted to change the shape of the plate wherein the first actuator comprises first and second electrodes mounted on the plate, wherein, when a voltage differential is applied between the first and second electrodes, the electrodes move with respect to each other thereby generating the deformation force. - View Dependent Claims (16, 17, 18, 19, 20, 21)
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22. A MEMS device, comprising:
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a deformable plate movably connected to a substrate; and a deformation actuator mounted on the deformable plate, wherein, when the plate adopts a shape and moves with respect to the substrate without a change of the adopted shape, the actuator moves together with the plate without a change in a deformation force applied to the plate by said deformation actuator. - View Dependent Claims (23)
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24. A MEMS device, comprising:
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a deformable plate movably supported on a substrate; means for moving the deformable plate with respect to the substrate; and means for deforming the plate, said means for deforming mounted on said plate, wherein, when the deformable plate adopts a shape and moves with respect to the substrate without a change of the adopted shape, the means for deforming the plate moves together with the plate without a change in a deformation force applied to the plate by said means for deforming.
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25. A MEMS device, comprising:
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a deformable plate; a first actuator mounted on the deformable plate and adapted to apply a deformation force to the deformable plate to change the shape of the plate; a substrate, wherein the plate is movably connected to the substrate; and a second actuator adapted to move the plate with respect to the substrate, wherein the second actuator comprises; a first electrode attached to the plate, and a second electrode mounted on the substrate, wherein, when a voltage differential is applied between the first and second electrodes, the first electrode moves with respect to the second electrode thereby rotating the plate. - View Dependent Claims (26)
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27. A method of deforming a plate in a MEMS device, comprising:
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applying to the plate a deformation force produced by a first actuator mounted on the plate and adapted to change the shape of the plate, wherein the plate is movably connected to a substrate; and moving the plate with respect to the substrate using a second actuator, wherein; the second actuator comprises; a first electrode attached to the plate, and a second electrode mounted on the substrate; and the step of moving comprises applying a voltage differential between the first and second electrodes, wherein the first electrode moves with respect to the second electrode thereby rotating the plate. - View Dependent Claims (28)
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Specification