Micromirrors with novel mirror plates
First Claim
Patent Images
1. A projector, comprising:
- a light source for providing illumination light for the projector;
a condensing lens for condensing the light from the light source onto a spatial light modulator, said spatial light modulator comprising an array of micromirrors, each of which further comprises;
a substrate;
a mirror plate having a deformable portion and a non-deformable portion,wherein the deformable portion of the mirror plate is defined by an incision that is fully enclosed within an area of the mirror plate and/or the deformable portion of the mirror plate; and
a post disposed at the deformable portion of the mirror plate and connecting the mirror plate to the substrate; and
a display target.
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Abstract
A spatial light modulator is disclosed, along with methods for making such a modulator. The spatial light modulator comprises an array of micromirrors each of which comprises a deflectable and reflective mirror plate. For enabling the deflection of the mirror plate, incisions are made within the area of the mirror plate with each incision being fully enclosed within the area of the mirror plate. The incisions collectively define a deformable hinge that is on the same plane as the mirror plate at the non-deflected state.
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Citations
29 Claims
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1. A projector, comprising:
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a light source for providing illumination light for the projector; a condensing lens for condensing the light from the light source onto a spatial light modulator, said spatial light modulator comprising an array of micromirrors, each of which further comprises; a substrate; a mirror plate having a deformable portion and a non-deformable portion, wherein the deformable portion of the mirror plate is defined by an incision that is fully enclosed within an area of the mirror plate and/or the deformable portion of the mirror plate; and a post disposed at the deformable portion of the mirror plate and connecting the mirror plate to the substrate; and a display target. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of making a projector, comprising:
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providing a light source, a collection lens, a projection lens and a display target; providing a spatial light modulator, wherein the spatial light modulator comprises; a substrate that is transmissive to visible light; a mirror plate having a deformable portion and a non-deformable portion; and a post disposed at the deformable portion of the mirror plate and connecting the mirror plate to the substrate; and arranging the spatial light modulator, the collection lens, the light source, the projection lens and the display target such that, a light beam from the light source is focused by the collection lens onto the mirror plate through the glass substrate, and reflected by the mirror plate, the reflected light being collected by the projection lens and projected onto the display target.
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17. A micromirror device, comprising:
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a light transmissive substrate; and a mirror plate held on the substrate such that the mirror plate is operable to rotate relative to the substrate, wherein the mirror plate has a deformable portion and a non-deformable portion, the deformable portion being defined by an incision fully enclosed within the mirror plate. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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Specification