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System and method for real-time fault detection, classification, and correction in a semiconductor manufacturing environment

  • US 6,980,873 B2
  • Filed: 04/23/2004
  • Issued: 12/27/2005
  • Est. Priority Date: 04/23/2004
  • Status: Expired due to Fees
First Claim
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1. A computer-executable method for detecting a fault and identifying a remedy for the fault in real-time in a semiconductor product manufacturing facility, the system comprising:

  • importing data from a manufacturing device into an analysis tool;

    importing data representing a plurality of different manufacturing devices into the analysis tool;

    analyzing the imported data to determine if a fault exists in the manufacturing device'"'"'s operation;

    if a fault exists, classifying the fault and identifying a remedy for the fault based at least partly on the classification;

    updating configuration data used to control the manufacturing device, wherein the updating applies the remedy to the configuration information; and

    modifying the manufacturing device'"'"'s operation using the updated configuration data.

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