Method and device for the temperature control of surface temperatures of substrates in a CVD reactor
First Claim
1. A CVD reactor having a multiplicity of substrate holders carried on dynamic gas cushions on a substrate holder carrier, characterized by a measuring device, which has at least one temperature-measuring element, for determining the surface temperatures of all the substrates located on the substrate holders, a temperature-control element and gas mass flow control means which are individually associated with each substrate holder and are actuated by the temperature-control element in such a manner that the substrate temperatures are kept within a predetermined temperature window by variation of the gas cushion height.
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Abstract
The invention relates to a method for controlling the surface temperatures of substrates arranged on substrate supports borne by a substrate support carrier on dynamic gas cushions in a processing chamber of a CVD-reactor. The aim of the invention is to reduce or adjust the temperature variations. According to the invention, an average surface temperature value is calculated, being measured in a particularly optical manner, and the level of the gas cushions is regulated by varying the individually controlled gas flow producing the gas cushions in such a way that the variations of the measured surface temperatures in relation to the average value lies within a predetermined temperature window.
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Citations
6 Claims
- 1. A CVD reactor having a multiplicity of substrate holders carried on dynamic gas cushions on a substrate holder carrier, characterized by a measuring device, which has at least one temperature-measuring element, for determining the surface temperatures of all the substrates located on the substrate holders, a temperature-control element and gas mass flow control means which are individually associated with each substrate holder and are actuated by the temperature-control element in such a manner that the substrate temperatures are kept within a predetermined temperature window by variation of the gas cushion height.
Specification