Method for making a micro-electro-mechanical gyroscope

• US 6,984,332 B2
• Filed: 12/04/2002
• Issued: 01/10/2006
• Est. Priority Date: 06/17/1999
• Status: Expired due to Fees

• Current Assignee: Penn State Research Foundation (Pennsylvania State University)
• Original Assignee: Penn State Research Foundation (Pennsylvania State University)
• Inventors: Kollakompil, Jose A, Varadan, Vasundara V, Varadan, Vijay K., Xavier, Pascal B, Suh, William D.
• Primary Examiner(s): Ahmed, Shamim
• Application Number:
  US10/309,566
• Publication Number:
  US 20030167841A1
• Time in Patent Office: 1,133 Days
• Field of Search: 216/2, 216/41, 216/66, 735/040.1, 310/313.A
• US Class Current: 216/2
• CPC Class Codes: G01C 19/5698 using acoustic waves, e.g. surface acoustic wave gyros
• CPC Class Codes: H03H 9/02645 Waffle-iron or dot arrays
• CPC Class Codes: H03H 9/6486 having crossing or intersecting acoustic tracks, e.g. intersection in a perpendicular or diagonal orientation

Abstract

A gyroscope comprises a piezoelectric substrate having a surface. Disposed on the surface are a resonator transducer, a pair of reflectors, a structure such as a metallic dot, and a sensor transducer. The resonator transducer creates a first surface acoustic wave on the surface. The pair of reflectors reflects the first surface acoustic wave to form a standing wave within a region of the surface between the pair of reflectors. The structure is disposed on the surface within the region, wherein a Coriolis force acting upon the structure creates a second surface acoustic wave. The sensor senses the second surface acoustic wave and provides an output indicative thereof.

Claims

1. A method for manufacturing a micro-electro-mechanical gyroscope, comprising:

providing a piezoelectric substrate;

forming a pattern having a plurality of apertures therethrough; and

fabricating, using said pattern, a plurality of features on said substrate, said features comprising;

a resonator transducer for creating a first surface acoustic wave on said surface;

a pair of reflectors for reflecting said first surface acoustic wave to form a standing wave within a first region of said surface between said pair of reflectors;

a structure within said region, wherein a Coriolis force acting upon said structure creates a second surface acoustic wave; and

a first sensor transducer disposed on said surface for sensing said second surface acoustic wave; and

a second sensor transducer disposed on said surface for sensing a residual surface acoustic wave from a second region of said surface that is free of any structure that said Coriolis force can act upon, and for providing an output indicative of said residual surface acoustic wave.

2. The method of claim 1, wherein said step of fabricating comprises the steps of:

depositing a layer of metal on said pattern and through said apertures; and

lifting off said pattern, thereby leaving said metal deposited through said apertures to define said features.

3. The method of claim 1,

wherein said step of forming said pattern comprises a preliminary step of depositing a layer of metal on said surface, and

wherein said step of fabricating comprises the steps of selectively removing said layer of metal exposed within said apertures to define said features, and removing said pattern.

4. The method of claim 3, wherein said step of selectively removing comprises a step of etching.

5. The method of claim 4, wherein said step of etching comprises a step of reactive ion etching.